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   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
Excitation of Electronic States of N2 in Radio-Frequency Electric Field by Electron Impact
Miroslav M. Ristić, Muna M. Aoneas, Mirjana M. Vojnović, Goran B. Poparić
Plasma Chem. Plasma Process., Vol: 37, No: 5 , published: 01 September 2017
The effect of singlet metastable states on the ion energy distribution in capacitively coupled oxygen discharges
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Jon Gudmundsson, Holmfridur Hannesdottir
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Gas temperature dynamics in pulsed CO2 microwave plasma: unravelling quenching of vibrational excitation
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Dirk van den Bekerom, Jose Palomares-Linares, Tiny Verreycken, Nicola Gatti, Teofil Minea, Srinath Ponduri, Qin Ong, Waldo Bongers, Richard van de Sanden, Gerard van Rooij
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Investigation of RF discharge parameters in diffusion regimes
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
George Paskalov, Ildar Gafarov, C Lazzaroni, Mehrdad Nikravech, K Baba, Viktor Zeltukhin
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Continuum emission as a diagnostic tool in CO2 microwave plasma
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Floran Peeters, Huub Hendrickx, Bram Wolf, Richard van de Sanden, Waldo Bongers
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Time resolved optical emission spectroscopy of a pulsed CO2 microwave discharge
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Tiny Verreycken, Federico D'Isa, Richard van de Sanden, Emile Carbone, Waldo Bongers
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Interaction of N and O atoms with wood surfaces in the flowing afterglow of N2-O2 microwave plasmas
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Julien Pregent, Luc Stafford
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Uncertainty analysis of a reduced CO2 global model
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Peter Koelman, Danka Yordanova, Samaneh Tadayon Musavi, Wouter Graef, Diana Mihailova, Jan van Dijk
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
Microwave discharge igniter for combustion applications: discharge development and energy distribution in time and space
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
S.A. Shcherbanev, A. De Martino, A.Yu Khomenko, S.M. Starikovskaia, S. Padala  and Y. Ikeda
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
An Argon Recycling System for Inductively-Coupled Plasma Mass Spectrometry (ICP-MS)
23rd International Symposium on Plasma Chemistry (ISPC 23) , Montréal, Canada, July 30th – August 4th, 2017
Sina Alavi, Subramaniam Yugeswaran, Larry Pershin, Javad Mostaghimi, Hamid Badiei, Brian Chan
Int. Symposium on Plasma Chemistry (ISPC), Vol: 2017, No: 23 , published: 01 August 2017
A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
De-Qi Wen, E. Kawamura, M. A. Lieberman, A. J. Lichtenberg, and You-Nian Wang
Phys. Plasmas, Vol: 24, No: 8 , published: 01 August 2017
Broadband microwave absorption and standing wave effect in helium capacitively coupled plasma
Yachun Zhang, Xiang He, Jianping Chen, Li Chen, Hongchao Zhang, Xiaowu Ni, Jian Lu, and Zhonghua Shen
Phys. Plasmas, Vol: 24, No: 8 , published: 01 August 2017
Kinetic study on gas discharge plasma generated by focused microwaves
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Wei Yang, Qianhong Zhou and Zhiwei Dong
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
A novel non-invasive technique for detection and analysis of harmonics in Radio Frequency plasmas
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Arti Rawat, Ashish Ganguli, Ramesh Narayanan and Ram Dattatraya Tarey
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
In-flight modification of metallic nanoparticles by low pressure RF plasma
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Ondrej Kylian, Anna Kuzminova, Jan Hanus, Mykhajlo Vaydulych, Choukourov Andrey, Miroslav Cieslar, Danka Slavin-
ska and Hynek Biederman

Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
Investigation of the RF power transfer efficiency of a planar ICP operated in Hydrogen
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Stefan Briefi, David Rauner and Ursel Fantz
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
H atom generation and loss kinetics in VHF plasmas
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Shota Nunomura, Hirotaka Katayama and Isao Yoshida
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
A modified fluid simulation of an inductively coupled plasma discharge with radio frequency bias considering heat transfer effect
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Youngdo Jeong, Young Jun Lee, Deuk-Chul Kwon and Heehwan Choe
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
Simulation Study of Radio Frequency Capacitively Coupled CF4 Plasma Discharge
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Chia-Yu Chen and Keh-Chyang Leou
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
RF plasma simulation using semi-analytical sheath model
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Masaru Miyashita
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
Fine Structure of Ionisation Patterns and Confinement of Energetic Electrons in Asymmetric Capacitive Radio Frequency Discharges
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltán Donkó and Thomas Mussenbrock
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
Non-intrusive method for electron-density determination in low-pressure microwave plasma
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Abderrahmane Kais, Juslan Lo, Laurent Therese and Philippe Guillot
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
A Numerical and Experimental Study of Ion Impingement from RF Discharge on the Mirror Surface in Strong Magnetic Field
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Anton A. Kobelev, Alexander S. Smirnov, Nikita A. Babinov, Artem M. Dmitriev, Eugene E. Mukhin and Aleksey G. Razdobarin
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
Levitation of Dust in a Magnetised RF Plasma
Proc. of the XXXIII International Conference on Phenomena in Ionized Gases (ICPIG 2017), Estoril, Portugal, July 9-14, 2017
Brandon Harris and Paul Bryant
Int. Conf. on Phenomena in Ionized Gas (ICPIG) , Vol: 2017, No: , published: 09 July 2017
Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expansion region
Fei Gao, Yu-Ru Zhang, Hong Li, Yang Liu, and You-Nian Wang
Phys. Plasmas, Vol: 24, No: 7 , published: 01 July 2017
Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap
Yong-Xin Liu, Ihor Korolov, Edmund Schüngel, You-Nian Wang, Zoltán Donkó, and Julian Schulze
Phys. Plasmas, Vol: 24, No: 7 , published: 01 July 2017
Electrical asymmetry effects in magnetized capacitively coupled plasmas in argon
Shali Yang, Ya Zhang, Hong-Yu Wang, Shuai Wang and Wei Jiang
Plasma Sources Sci. and Technol., Vol: 26, No: 6 , published: 01 June 2017
Microwave Plasma Generation With Resonance Frequency Tracking and Power Regulation
Soon Ku Kwon ; Seung-Jin Park ; Im Hee Won ; Cheolmin Ahn ; Jae-Yoon Sim
IEEE Trans. Plasma Sci., Vol: 45, No: 6 , published: 01 June 2017
Investigation of the resonance frequency and performance of a partially plasma filled reconfigurable cylindrical TE111 mode cavity
Mostafa Hadaegh, and Farzad Mohajeri
Phys. Plasmas, Vol: 24, No: 5 , published: 01 May 2017
The effects of gas dilution on the nanoparticles nucleation in a low pressure capacitively coupled acetylene discharge
A. Akhoundi, and G. Foroutan
Phys. Plasmas, Vol: 24, No: 5 , published: 01 May 2017
Microwave plasma formation within a 2D photonic crystal
Stephen Parsons, José Gregório and Jeffrey Hopwood
Plasma Sources Sci. and Technol., Vol: 26, No: 5 , published: 01 May 2017
Features of RF low-pressure discharge with inductive and capacitive channels
E A Kralkina, P A Nekliudova, V B Pavlov, A K Petrov and K V Vavilin
Plasma Sources Sci. and Technol., Vol: 26, No: 5 , published: 01 May 2017
Hydrogen atom kinetics in capacitively coupled plasmas
Shota Nunomura, Hirotaka Katayama and Isao Yoshida
Plasma Sources Sci. and Technol., Vol: 26, No: 5 , published: 01 May 2017
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency
Yong-Xin Liu, Ihor Korolov, Edmund Schüngel, You-Nian Wang, Zoltán Donkó and Julian Schulze
Plasma Sources Sci. and Technol., Vol: 26, No: 5 , published: 01 May 2017
Corrigendum: Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown (2017 Plasma Sources Sci. Technol. 26 034003)
Min Uk Lee, Jimo Lee, Jae Koo Lee and Gunsu S Yun
Plasma Sources Sci. and Technol., Vol: 26, No: 5 , published: 01 May 2017
Spatial distribution of plasma parameters in a dc - magnetron discharge and influence of the discharge power
44th IOP Plasma Physics Conference, 3-6 April 2017, Oxford, UK
C. Saringer, A. Dagmar Pajdarová, P. Baroch, K. Zorn, R. Franz and C. Mitterer
IOP Plasma Physics Conference, Vol: 2017, No: , published: 03 April 2017
In situ impedance measurement of microwave atmospheric pressure plasma
S T Lee, W J Nam, J K Lee and G S Yun
Plasma Sources Sci. and Technol., Vol: 26, No: 4 , published: 01 April 2017
Analysis and characterization of microwave plasma generated with rectangular all-dielectric resonators
K Kourtzanidis and L L Raja
Plasma Sources Sci. and Technol., Vol: 26, No: 4 , published: 01 April 2017
Numerical characterization of magnetized capacitively coupled argon plasmas driven by combined dc/rf sources
Shali Yang, Ya Zhang, Hong-Yu Wang, Shuai Wang, and Wei Jiang
Phys. Plasmas, Vol: 24, No: 3 , published: 01 March 2017
Basic Processes in Fully and Partially Ionized Plasmas Comparisons of the Characteristic on the Mode Transition in an Inductively Coupled Discharge by Exciting Coil Change
X. Zhang, J.-X. Cao, Y. Liu, Y.-P. Wang, P.-C. Yu, and Z.-K. Zhang
IEEE Trans. Plasma Sci., Vol: 45, No: 3 , published: 01 March 2017
Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
Aranka Derzsi, Bastien Bruneau, Andrew Robert Gibson, Erik Johnson, Deborah O'Connell, Timo Gans, Jean-Paul Booth and Zoltán Donkó
Plasma Sources Sci. and Technol., Vol: 26, No: 3 , published: 01 March 2017
Моделирование высокочастотного емкостного разряда (локальное и нелокальное приближение)
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
1Бадриев И.Б., Желтухин В.С., 1Чебакова В.Ю. (Казанский национальный исследовательский технический университет им. А.Н. Туполева, Казань, Россия, 1Казанский (Приволжский) Федеральный университет, Казань, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
Некоторые результаты исследования СВЧ разряда в жидких С7-С16 углеводородах
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
Аверин К.А., Лебедев Ю.А. (Институт нефтехимического синтеза им. А.В. Топчиева РАН, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
Оптимальные характеристики высокочастотного разряда и параметры разрядной камеры для получения озона
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
Валиев Р.И., 1Багаутдинова Л.Н., 1Гайсин А.Ф., 1Гайсин Ф.М., Искаков И.М., Садриев Р.Ш. (Набережночелнинский институт (филиал) Казанского (Приволжского) федерального университета, Набережные Челны, Россия, 1Казанский национальный исследовательский технический университет им. А.Н. Туполева, Казань, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
Влияние диэлектрического покрытия антенны на параметры электродного микроволнового разряда
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
Лебедев Ю.А., Татаринов А.В., Титов А.Ю., Эпштейн И.Л. (Институт нефтехимического синтеза им. А.В. Топчиева РАН, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
Сравнение спектрофотометрических характеристик излучения плазмы импульсно-периодического резонансного микроволнового разряда в верхнем диапазоне рабочих давлений инертных газов (He, Ar)
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
Андреев В.В., Асанина С.Г., Корнеева М.А. (Российский Университет Дружбы Народов, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
УФ-излучение свободно локализованного в атмосфере подпорогового разряда в пучке микроволн
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
Артемьев К.В., Батанов Г.М., Бережецкая Н.К., Грицинин С.И., Коссый И.А., Сарксян К.А., Харчев Н.К. (Институт Общей Физики им. А.М. Прохорова РАН, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
Факельный СВЧ разряд при атмосферном давлении и его применение в технологии MPACVD синтеза алмаза
XLIV конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 13 — 17 февраля 2017 г.
Арутюнян Н.Р., Летунов А.А., Лукина Н.А., Савельев А.В., Светогоров Д. И., Сергейчев К.Ф. (Институт Общей Физики им. А.М. Прохорова РАН, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2017, No: , published: 13 February 2017
Nonlinear series resonance and standing waves in dual-frequency capacitive discharges
De-Qi Wen, E Kawamura, M A Lieberman, A J Lichtenberg and You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 26, No: 1 , published: 01 February 2017
Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICP
Jaewon Lee (이재원 ), Kyung-Hyun Kim (김경현 ), and Chin-Wook Chung (정진욱 )
Phys. Plasmas, Vol: 24, No: 2 , published: 01 February 2017
Kinetic analysis of negative power deposition in inductive low pressure plasmas
Jan Trieschmann and Thomas Mussenbrock
Plasma Sources Sci. and Technol., Vol: 26, No: 2 , published: 01 February 2017
On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen
Th Wegner, C Küllig and J Meichsner
Plasma Sources Sci. and Technol., Vol: 26, No: 2 , published: 01 February 2017
On the E-H transition in inductively coupled radio frequency oxygen plasmas: II. Electronegativity and the impact on particle kinetics
Th Wegner, C Küllig and J Meichsner
Plasma Sources Sci. and Technol., Vol: 26, No: 2 , published: 01 February 2017
An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation
Partha Saikia, Heman Bhuyan, Mario Favre, Edmundo Wyndham, Felipe Veloso
Phys. Plasmas, Vol: 24, No: 1 , published: 01 January 2017
The effect of intermediate frequency on sheath dynamics in collisionless current driven triple frequency capacitive plasmas
S. Sharma, S. K. Mishra, P. K. Kaw, M. M. Turner
Phys. Plasmas, Vol: 24, No: 1 , published: 01 January 2017
Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges
Jan Trieschmann, Frederik Schmidt and Thomas Mussenbrock
Plasma Processes and Polymers, Vol: 14, No: 1-2 , published: 01 January 2017
Kinetic simulations and photometry measurements of the E-H transition in cylindrical inductively coupled plasmas
S Mattei, K Nishida, S Mochizuki, A Grudiev, J Lettry, M Q Tran and A Hatayama
Plasma Sources Sci. and Technol., Vol: 25, No: 6 , published: 01 December 2016
An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge
J T Gudmundsson, D Lundin, N Brenning, M A Raadu, Chunqing Huo and T M Minea
Plasma Sources Sci. and Technol., Vol: 25, No: 6 , published: 01 December 2016
A continuous microwave discharge maintained by two crossing millimeter-wave beams in hydrogen and argon: numerical simulation and experiment
V V Chernov, A M Gorbachev, A L Vikharev, D B Radishev and A V Kozlov
Plasma Sources Sci. and Technol., Vol: 25, No: 6 , published: 01 December 2016
The role of Ohmic heating in dc magnetron sputtering
N Brenning, J T Gudmundsson, D Lundin, T Minea, M A Raadu and U Helmersson
Plasma Sources Sci. and Technol., Vol: 25, No: 6 , published: 01 December 2016
Transient electromagnetic behaviour in inductive oxygen and argon–oxygen plasmas
A R Chadwick, G Herdrich, M Kim and B Dally
Plasma Sources Sci. and Technol., Vol: 25, No: 6 , published: 01 December 2016
A High-Power Widely Tunable Limiter Utilizing an Evanescent-Mode Cavity Resonator Loaded With a Gas Discharge Tube
Abbas Semnani ; Sergey O. Macheret ; Dimitrios Peroulis
IEEE Trans. Plasma Sci. Pt 3, Vol: 44, No: 12 , published: 01 December 2016
Comparison of plasma excitation, ionization, and energy influx in single and dual frequency capacitive discharges
B. B. Sahu, Jeon G. Han
Phys. Plasmas, Vol: 23, No: 12 , published: 01 December 2016
Experimental investigations of the plasma radial uniformity in single and dual frequency capacitively coupled argon discharges
Kai Zhao, Yong-Xin Liu, Fei Gao, Gang-Hu Liu, Dao-Man Han, You-Nian Wang
Phys. Plasmas, Vol: 23, No: 12 , published: 01 December 2016
Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pressures
Wei Yang, Hong Li, Fei Gao, You-Nian Wang
Phys. Plasmas, Vol: 23, No: 12 , published: 01 December 2016
Flow-field differences and electromagnetic-field properties of air and N2 inductively coupled plasmas
Minghao Yu, Kazuhiko Yamada, Yusuke Takahashi, Kai Liu, Tong Zhao
Phys. Plasmas, Vol: 23, No: 12 , published: 01 December 2016
Численное моделирование коагуляции наночастиц в радиочастотном разряде
A.Ю. Кравченко, Ю.В. Ющишена
Вопр. атом. науки и техн. Сер. Физика плазмы, Vol: 2016, No: 6 , published: 01 December 2016
Comparison of the Active Species in the RF and Microwave Flowing Discharges of N2 and Ar–20 %N2
André Ricard Jean-Philippe Sarrette Soo-Ghee Oh Yu Kwon Kim
Plasma Chem. Plasma Process., Vol: 36, No: 6 , published: 01 November 2016
Quasi-optical theory of microwave plasma heating in open magnetic trap
A. G. Shalashov, A. A. Balakin, E. D. Gospodchikov, T. A. Khusainov
Phys. Plasmas, Vol: 23, No: 11 , published: 01 November 2016
Dynamics of a pulsed inductively coupled oxygen plasma
Mujahid Zaka-ul-Islam
Phys. Plasmas, Vol: 23, No: 11 , published: 01 November 2016
Electrical description of N2 capacitively coupled plasmas with the global model
58th Annual Meeting of the APS Division of Plasma Physics, October 31–November 4, 2016, San Jose, US
Ming-Lu Cao , Yi-Jia Lu , Jia Cheng , Lin-Hong Ji
Bull. Am. Phys. Soc., Vol: 61, No: 18 , published: 31 October 2016
Study of a dual frequency capacitively coupled rf discharge in the background of multi-component plasma and its validation by a simple analytical sheath model
58th Annual Meeting of the APS Division of Plasma Physics, October 31–November 4, 2016, San Jose, US
Heman Bhuyan , Partha Saikia , Mario Favre , Edmundo Wyndham , Felipe Veloso
Bull. Am. Phys. Soc., Vol: 61, No: 18 , published: 31 October 2016
Electrical Properties for Capacitively Coupled Radio Frequency Discharges of Helium and Neon at Low Pressure
58th Annual Meeting of the APS Division of Plasma Physics, October 31–November 4, 2016, San Jose, US
Murat Tanisli, Neslihan Sahin, Suleyman Demir
Bull. Am. Phys. Soc., Vol: 61, No: 18 , published: 31 October 2016
Boundary conditions for electropositive and electronegative radio-frequency sheaths
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Mark Sobolewski
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Control of ion energy distributions in inductively coupled ratio-frequency plasmas with a biased electrode
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Chan Xue , Wei Liu , Fei Gao , You-Nian Wang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Control of electron energy distribution by the power balance of the combined inductively and capacitively coupled RF plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Jin Seok Kim , Ho-Jun Lee , Hae June
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Neutral and ion dynamics at the plasma-surface interface region in inductively coupled plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Martin Blake , Andrew Robert Gibson , Kari Niemi , Deborah O'Connell , Timo Gans
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Striations in electronegative capacitively coupled radio frequency plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Julian Schulze, Yong-Xin Liu, Edmund Schuengel, Ihor Korolov, You-Nian Wang, Zoltan Donko
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Parametric investigations of striations in electronegative capacitively coupled radio-frequency plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Yong-Xin Liu, Edmund Schungel, Ihor Korolov, Zoltan Donko, Julian Schulze, You-Nian Wang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Yue Liu, Jean-Paul Booth, Pascal Chabert
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Virtual IED sensor at an rf-biased electrode in low-pressure plasma
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Maria Bogdanova , Dmitry Lopaev , Sergey Zyryanov , Alexander Rakhimov
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Precise measurements of neutral gas temperature using Fiber Bragg Grating sensor in Argon capacitively coupled plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Daoman Han, Zigeng Liu, Yongxin Liu, Wei Peng, Younian Wang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Standing helicon induced by a rapidly bent magnetic field in plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Kazunori Takahashi, Sho Takayama, Atsushi Komuro, Akira Ando
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Measuring atomic oxygen densities and electron properties in an Inductively Coupled Plasma for thin film deposition
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
David Meehan, Andrew Gibson, Jean-Paul Booth, Erik Wagenaars
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Quantitative measurement of VUV radiation related to polymer pre-treatment in a microwave driven low pressure plasma
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Felix Mitschker, Enrique Iglesias, Marcel Fiebrandt, Nikita Bibinov, Peter Awakowicz
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Comparative Study in Stabilization Methods for Capacitively Coupled Plasma Simulation Using Finite Element Method
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Hyonu Chang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Effects of partially covered metallic wave guide on the linear microwave plasma source with TE-TEM power coupling
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Haemaro Kim, Moon-Ki Han, Dong-Hyun Kim, Hae June Lee, Ho-Jun Lee
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Radial Distribution of Plasma Parameters in an Asymmetric Coaxial Capacitive Discharge
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Jeremy Peshl, Milka Nikolic, Janardan Upadhyay, Svetozar Popovic, Lepsha Vuskovic
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
PIC/MCC simulation for magnetized capacitively coupled plasmas driven by combined dc/rf sources
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Shali Yang, Ya Zhang, Wei Jiang, Hongyu Wang, Shuai Wang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Julian Schulze, Edmund Schuengel, Bastien Bruneau, Eric Johnson, Jean-Paul Booth, Aranka Derzsi, Zoltan Donko, Deborah O'Connell, Timo Gans
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Spatial structure of plasma density and electron temperature in capacitive RF discharges with a single ring-shaped narrow trench of various depths
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Julian Schulze, Edmund Schuengel, Naoki Matsumoto, Yasunori Ohtsu
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Coupling mechanisms in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable relative phase
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Thomas Steinberger , Birk Berger , Julian Schulze , Edmund Schuengel , Mark Koepke
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Effects of hydrogen as sheath gas on properties of inductive coupled thermal plasma for B4C/Cu functionally gradient material preparation
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Qijia Guo, Peng Zhao, Lin Li, Guohua Ni, Xiaodong Zhang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Electron heating in the inductive discharge array (IDA): theoretical concept and first measurements
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Philipp Ahr, Uwe Czarnetzki
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Experimental and simulation study of capacitively coupled electronegative discharges
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Aranka Derzsi
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Plasma Self-organization in Moderately High Pressure Capacitively Coupled RF Discharge
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Anton Kobelev, Kallol Bera, John Forster, Alexander Smirnov
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Comparison of different methods for the measurements and calculations of Capacitively Coupled Plasmas electrical characteristics
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Giannis Tsigaras, Nikolaos Spiliopoulos, Eleftherios Amanatides, Dimitrios Mataras
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Fluid Modeling of a Very High Frequency Capacitively Coupled Reactor
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Rochan Upadhyay, Laxminarayan Raja, Peter Ventzek, Toshihiko Iwao, Kiyotaka Ishibashi
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Variation in photon-induced interface defects due to transient behavior of pulse modulated inductively coupled plasma
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Y. Miyoshi, M. Fukasawa, K. Nagahata, T. Tatsumi, Z. Liu, Y. Zhang, A. Ando, K. Takeda, K. Ishikawa, M. Sekine, M. Hori
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
A hybrid model of biased inductively coupled discharges
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Deqi Wen, Michael A Lieberman, Quanzhi Zhang, Yongxin Liu, Younian Wang
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Modeling of inductively coupled plasmas at low pressure conditions
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Sotiris Mouchtouris, George Kokkoris
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
On the Significance of Metastable States in Low Pressure Capacitively Coupled Oxygen Discharges
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Jon Gudmundsson, Holmfridur Hannesdottir
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Plasma Instability in Radio-Frequency Capacitively Coupled Discharge
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Kallol Bera, Ankur Agarwal, Shahid Rauf, John Forster
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Voltage vs. Current Driven CCRF Discharges: Differences in Electron and Ion Dynamics
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Aranka Derzsi, Peter Hartmann, Zoltan Donko, Thomas Mussenbrock
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Investigation of plasma-sheath resonances in low pressure discharges
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Schabnam Naggary, Efe Ke­man­eci, Ralf Peter Brinkmann, Mustafa Megahed
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Effect of driving frequency on the electron-sheath interaction and electron energy distribution function in a low pressure capacitively coupled plasmas
69th Annual Gaseous Electronics Conference, Oct. 10–14, 2016, Bochum, Germany
Sarveshwar Sharma, Nishant Sirse, Predhiman Kaw, Miles Turner, Albert R. Ellingboe
Bull. Am. Phys. Soc., Vol: 61, No: 9 , published: 10 October 2016
Standing striations due to ionization instability in atmospheric pressure He/H2O radio frequency capacitive discharges
E Kawamura, M A Lieberman and A J Lichtenberg
Plasma Sources Sci. and Technol., Vol: 25, No: 5 , published: 01 October 2016
Comparison of vacuum ultra-violet emission of Ar/CF4 and Ar/CF3I capacitively coupled plasmas
A Zotovich, O Proshina, Z el Otell, D Lopaev, T Rakhimova, A Rakhimov, J-F de Marneffe and M R Baklanov
Plasma Sources Sci. and Technol., Vol: 25, No: 5 , published: 01 October 2016
Numerical study of capacitive coupled HBr/Cl2 plasma discharge for dry etch applications
Banat Gul, Iftikhar Ahmad, Gulfam Zia and Aman-ur-Rehman
Phys. Plasmas, Vol: 23, No: 9 , published: 01 October 2016
Effect of the radial plasma nonuniformity on the propagation of guided m=+1 and m=−1 modes in helicon discharges
Yu. M. Aliev and M. Krämer
Phys. Plasmas, Vol: 23, No: 10 , published: 01 October 2016
Time-independent states of a non-neutral plasma diode when emitted electrons are partially turned around by a transverse magnetic field
Sourav Pramanik, V. I. Kuznetsov, A. B. Gerasimenko, and Nikhil Chakrabarti
Phys. Plasmas, Vol: 23, No: 10 , published: 01 October 2016
A hybrid model of radio frequency biased inductively coupled plasma discharges: description of model and experimental validation in argon
De-Qi Wen, Wei Liu, Fei Gao, M A Lieberman and You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 25, No: 4 , published: 01 August 2016
Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4
S. Brandt, B. Berger, E. Schüngel, I. Korolov, A. Derzsi, B. Bruneau, E. Johnson, T. Lafleur, D. O'Connell, M. Koepke, T. Gans, J.-P. Booth, Z. Donkó and J. Schulze
Plasma Sources Sci. and Technol., Vol: 25, No: 4 , published: 01 August 2016
Experimental studies of the overshoot and undershoot in pulse-modulated radio-frequency atmospheric discharge
W. G. Huo, R. M. Li, J. J. Shi and Z. F. Ding
Phys. Plasmas, Vol: 23, No: 8 , published: 01 August 2016
Electron density and gas density measurements in a millimeter-wave discharge
S. C. Schaub, J. S. Hummelt, W. C. Guss, M. A. Shapiro and R. J. Temkin
Phys. Plasmas, Vol: 23, No: 8 , published: 01 August 2016
Mapping of force fields in a capacitively driven radiofrequency plasma discharge
Michael Dropmann, M. Chen, H. Sabo, R. Laufer, G. Herdrich, L. S. Matthews, T. W. Hyde
J. Plasma Phys., Vol: 82, No: 4 , published: 01 August 2016
Характеристики бесферритного индукционного разряда низкого давления. Часть 2. Излучательные характеристики плазмы
Свитнев С. А., Попов О. А., Левченко В. А., Старшинов П. В.
Успехи прикл. физ., Vol: 4, No: 4 , published: 01 August 2016
Analysis of non-equilibrium phenomena in inductively coupled plasma generators
W. Zhang, A. Lani and M. Panesi
Phys. Plasmas, Vol: 23, No: 7 , published: 01 July 2016
Investigation of large-area multicoil inductively coupled plasma sources using three-dimensional fluid model
Jozef Brcka
Jpn. J. Appl. Phys., Part 3, Vol: 55, No: 7S2 , published: 01 July 2016
Additively manufactured structures for high power microwave devices
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
Nicholas M. Jordan ; Geoffrey B. Greening ; Steven C. Exelby ; Ronald M. Gilgenbach ; Brad W. Hoff ; Sabrina S. Maestas
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
Numerical simulation of exploding wires driven by pulsed capacitive discharge
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
Kyoung-Jae Chung ; Kern Lee ; Y. S. Hwang ; Deok-Kyu Kim
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
Investigation of plasma parameters in dual antenna CF4/Ar/O2 inductively coupled plasma
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
Sangho Park ; Duksun Han ; Se Youn Moon
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
The role of the singlet metastables in capacitively coupled oxygen discharges
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
J. T. Gudmundsson ; H. Hannesdottir
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
Hysteresis effects and confinement of beam electrons in capacitive discharges
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
S. Wilczek ; J. Trieschmann ; R. P. Brinkmann ; T. Mussenbrock ; J. Schulze ; E. Schüngel ; A. Derzsi ; I. Korolov ; P. Hartmann ; Z. Donkó
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
Chirped pulsed bias power in inductively coupled plasma reactors
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
Steven J. Lanham ; Mark J. Kushner
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
Field emission excitation of a high pressure noble gas
2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada June 19–23, 2016
Nathaniel P. Lockwood ; Greg A. Pitz ; Steven B. Fairchild ; Matthew A. Lange
IEEE Int. Conf. Plasma Sci. (ICOPS) , Vol: 2016, No: , published: 19 June 2016
2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges
E. Kawamura, A. J. Lichtenberg, M. A. Lieberman and A. M. Marakhtanov
Plasma Sources Sci. and Technol., Vol: 25, No: 3 , published: 01 June 2016
Comparison of the B field dependency of plasma parameters of a weakly magnetized inductive and Helicon hydrogen discharge
S. Briefi, P. Gutmann, D. Rauner and U. Fantz
Plasma Sources Sci. and Technol., Vol: 25, No: 3 , published: 01 June 2016
Experimental study of plasma decay in pulsed microwave discharges of H2, CH4 and their mixtures
O. A. Ivanov, A. L. Vikharev and A. M. Gorbachev
Plasma Sources Sci. and Technol., Vol: 25, No: 3 , published: 01 June 2016
Liquid fuel reforming using microwave plasma at atmospheric pressure
Robert Miotk, Bartosz Hrycak, Dariusz Czylkowski, Miroslaw Dors, Mariusz Jasinski and Jerzy Mizeraczyk
Plasma Sources Sci. and Technol., Vol: 25, No: 3 , published: 01 June 2016
Influence of molecular oxygen on iodine atoms production in an RF discharge
P. A. Mikheyev, N. I. Ufimtsev, A. V. Demyanov, I. V. Kochetov, V. N. Azyazov and A. P. Napartovich
Plasma Sources Sci. and Technol., Vol: 25, No: 3 , published: 01 June 2016
Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge
Kuan-Chen Chen, Kuo-Feng Chiu, Chia-Fu Chen, Cheng-Yang Lien, Yu-Jer Tsai, Ting-Kuei Lien, Fumihiko Matsunaga, Masaaki Tanaka, Kohei Ogiwara, Kiichiro Uchino and Yoshinobu Kawai
Plasma Processes and Polymers, Vol: 13, No: 6 , published: 01 June 2016
Corrigendum on: Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge
Kuan-Chen Chen, Kuo-Feng Chiu, Chia-Fu Chen, Cheng-Yang Lien, Yu-Jer Tsai, Ting-Kuei Lien, Fumihiko Matsunaga, Masaaki Tanaka, Kohei Ogiwara, Kiichiro Uchino and Yoshinobu Kawai
Plasma Processes and Polymers, Vol: 13, No: 6 , published: 01 June 2016
Simulation of nanoparticle coagulation in radio-frequency C2H2/Ar microdischarges
Xiang-Mei Liu (刘相梅), Qi-Nan Li (李奇楠) and Rui Li (李瑞)
Chin. Phys. B, Vol: 25, No: 6 , published: 01 June 2016
О роли электронного удара в СВЧ-разряде в жидком н-гептане при атмосферном давлении
Лебедев Ю. А., Татаринов А. В., Эпштейн И. Л.
Прикл. физ., Vol: 2016, No: 3 , published: 01 June 2016
Preparation of Silicon Thin Films of Different Phase Composition from Monochlorosilane as a Precursor by RF Capacitive Plasma Discharge
L. A. Mochalov , R. A. Kornev , A. V. Nezhdanov , A. I. Mashin , A. S. Lobanov , A. V. Kostrov , V. M. Vorotyntsev , A. V. Vorotyntsev
Plasma Chem. Plasma Process., Vol: 36, No: 3 , published: 01 May 2016
The radiofrequency magnetic dipole discharge
E. Martines, M. Zuin, M. Marcante, R. Cavazzana, A. Fassina and M. Spolaore
Phys. Plasmas, Vol: 23, No: 5 , published: 01 May 2016
Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges
B. B. Sahu and Jeon G. Han
Phys. Plasmas, Vol: 23, No: 5 , published: 01 May 2016
Synthesis of Microparticles With Narrow Size Distribution in the Plasma of Arc and Radio-Frequency Discharges
D. G. Batryshev ; T. S. Ramazanov ; M. K. Dosbolayev ; M. T. Gabdullin ; Yerassyl Yerlanuly
IEEE Trans. Plasma Sci., Vol: 44, No: 5 , published: 01 May 2016
Investigation on the role of the blocking capacitor in single and dual CCRF discharge
19th International Conference on Atomic Processes in Plasmas, 4-8 April 2016, Paris, France
R.Benallal, A.Boudghene Stambouli, SM.Mesli, M.Habchi
Int. Conf. on Atomic Processes in Plasmas (APiP), Vol: 2016, No: , published: 04 April 2016
Electron heating in technological plasmas
Julian Schulze and Thomas Mussenbrock
Plasma Sources Sci. and Technol., Vol: 25, No: 2 , published: 01 April 2016
A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions
S. Mouchtouris and G. Kokkoris
Plasma Sources Sci. and Technol., Vol: 25, No: 2 , published: 01 April 2016
A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma
Efe Kemaneci et al
Plasma Sources Sci. and Technol., Vol: 25, No: 2 , published: 01 April 2016
Параметры радиационных процессов в плазме микроволнового резонансного разряда
Андреев В. В., Волдинер И. А., Корнеева М. А.
Прикл. физ., Vol: 2016, No: 2 , published: 01 April 2016
Характеристики бесферритного индукционного разряда низкого давления. Часть I. Электрические параметры индуктивной катушки
Свитнев С. А., Попов О. А., Левченко В. А., Старшинов П. В.
Успехи прикл. физ., Vol: 4, No: 2 , published: 01 April 2016
The Formation of Gas Bubbles by Processing of Liquid n-Heptane in the Microwave Discharge
Yu. A. Lebedev , A. V. Tatarinov , I. L. Epstein , K. A. Averin
Plasma Chem. Plasma Process., Vol: 36, No: 2 , published: 01 March 2016
Capacitive radio frequency discharges with a single ring-shaped narrow trench of various depths to enhance the plasma density and lateral uniformity
Y. Ohtsu, N. Matsumoto, J. Schulze and E. Schuengel
Phys. Plasmas, Vol: 23, No: 3 , published: 01 March 2016
Electric and plasma characteristics of RF discharge plasma actuation under varying pressures
Huimin Song (宋慧敏), Min Jia (贾敏), Di Jin (金迪), Wei Cui (崔巍) and Yun Wu (吴云)
Chin. Phys. B, Vol: 25, No: 3 , published: 01 March 2016
Физические основы и актуальные приложения новой формы мощного микроволнового разряда в газах высокого давления
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
Коссый И.А. (Институт Общей Физики им. А.М. Прохорова РАН, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Изучение структуры сильно неоднородного СВЧ разряда в азоте с помощью двойного зонда и эмиссионной спектроскопии
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1,2Крашевская Г.В., 1Лебедев Ю.А., 1Гоголева М.А. (1Институт нефтехимического синтеза им. А.В. Топчиева РАН, Москва, Россия, 2Национальный исследовательский центр "Курчатовский институт", Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Теория стационарного СВЧ разряда с многозарядными ионами в расходящейся струе газа
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1Шалашов А.Г., 1Господчиков Е.Д., 2Абрамов И.С. (1Институт прикладной физики РАН, Нижний Новгород, Россия, 2Нижегородский государственный университет им. Н.И. Лобачевского, Нижний Новгород, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Компьютерная модель КМПУ и неаксиально-симметричного ВЧ-разряда
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1,2,3Кузенов В.В., 3Рыжков С.В., 1Сторожев Д.А., 2Суржиков С.Т. (1Центр фундаментальных и прикладных исследований, Всероссийский научно-исследовательский институт автоматики им. Н.Л. Духова, Москва, Россия, 2Институт проблем механики им. А.Ю. Ишлинского РАН, Москва, Россия, 3Московский Государственный Технический Университет им. Н.Э. Баумана, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
ВЧЕ-разряд при атмосферном давлении в локальной постановке
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
2Желтухин В.С., 1Чебакова В.Ю. (1Казанский (Приволжский) Федеральный университет, Казань, Россия, 2Казанский национальный исследовательский технический университет им. А.Н. Туполева, Казань, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Аппроксимация минимального собственного значения в задаче баланса частиц ВЧИ-разряда
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1Соловьёв С.И., 1Соловьёв П.С., 2Желтухин В.С. (1Казанский (Приволжский) Федеральный университет, Казань, Россия, 2Казанский национальный исследовательский технический университет им. А.Н. Туполева, Казань, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Шнурование емкостного высокочастотного разряда при низких давлениях
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
Двинин С.А., Кодирзода З.А. (Московский Государственный Университет им. М.В. Ломоносова, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Энергетические распределения потоков ионов, полученных при помощи емкостного ВЧ разряда в радиальном магнитном поле
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1Задириев И.И., 1Рухадзе А.А., 2Кралькина Е.А., 2Вавилин К.В., 2Павлов В.Б. (1Институт Общей Физики им. А.М. Прохорова РАН, Москва, Россия, 2Московский Государственный Университет им. М.В. Ломоносова, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Влияние внешних условий на физические процессы и параметры плазмы в двухкамерном вч индуктивном источнике плазмы с внешним магнитным полем
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
Вавилин К.В., Кралькина Е.А., Неклюдова П.А., Никонов А.М., Павлов В.Б., Петров А.К., Вавулов О.Ю., Куликов С.В. (Московский Государственный Университет им. М.В. Ломоносова, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Математическое моделирование индуктивного ВЧ разряда, помещенного во внешнее магнитное поле с помощью программы КАРАТ
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1Вавилин К.В., 1Кралькина Е.А., 1Павлов В.Б., 1Петров А.К., 2Тараканов В.П. (1Московский Государственный Университет им. М.В. Ломоносова, Москва, Россия, 2Институт теплофизики экстремальных состояний Объединенного института высоких температур РАН, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Высокочастотный источник плазмы низкого давления для создания тяги
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1,2Кузенов В.В., 1Полозова Т.Н., 1Рыжков С.В. (1Московский Государственный Технический Университет им. Н.Э. Баумана, Москва, Россия, 2Всероссийский научно-исследовательский институт автоматики им. Н.Л. Духова, Москва, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Модификация поверхности синтетического алмаза при воздействии СВЧ-плазмы и ионной бомбардировки
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1,2Андрианова Н.Н., 1,2Борисов А.М., 3Казаков В.А., 1Машкова Е.С., 4Пальянов Ю.Н., 5Попов В.П., 6Питиримова Е.А., 2Ризаханов Р.Н., 2Сигалаев С.К. (1НИИ Ядерной физики им. Д.В. Скобельцына, МГУ, Москва Россия, 2МАТИ - Российский государственный технологический университет им. К.Э. Циолковского, Москва, Россия, 3Исследовательский центр имени М.В. Келдыша, Москва, Россия, 4Институт геологии и минералогии им.В.С. Соболева СО РАН, Новосибирск, Россия, 5Институт физики полупроводников им. А. В. Ржанова СО РАН, Новосибирск, Россия, 6Нижегородский государственный университет им. Н.И. Лобачевского, Нижний Новгород, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Очистка молибденовых зеркал от алюминиевых осаждений в ВЧ-разряде
XLIII конференция по физике плазмы и управляемому термоядерному синтезу, г. Звенигород Московской обл., 8 — 12 февраля 2016 г.
1Дмитриев А.М., 1Раздобарин А.Г., 1Самсонов Д.С., 1Масюкевич С.В., 1Мухин Е.Е., 1Толстяков С.Ю., 1Семенов В.В., 1Кочергин М.М., 1Kурскиев Г.С., 1Чернаков Ал.П., 1Чернаков Ан.П., 1Баженов А.Н., 1Коваль А.Н., 2Городецкий А.Е., 2Маркин А.В., 2Залавутдинов Р.Х., 2Буховец В.Л., 3Смирнов А.С., 3Черноизюмская Т.В., 3Кобелев А.А. (1Физико-Технический институт им. А.Ф. Иоффе РАН, С.-Петербург, Россия, 2Институт Физической Химии и Электрохимии им. А.Н. Фрумкина, РАН, Moсква, Россия, 3Санкт-Петербургский политехнический университет Петра Великого, С.-Петербург, Россия)
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2016, No: , published: 08 February 2016
Mode transition and hysteresis in inductively coupled radio frequency argon discharge
Th. Wegner, C. Küllig and J. Meichsner
Phys. Plasmas, Vol: 23, No: 2 , published: 01 February 2016
Electrical method for the measurements of volume averaged electron density and effective coupled power to the plasma bulk
M. Henault, G. Wattieaux, T. Lecas, J. P. Renouard and L. Boufendi
Phys. Plasmas, Vol: 23, No: 2 , published: 01 February 2016
Characterization of electron kinetics regime with electron energy probability functions in inductively coupled hydrogen plasmas
June Young Kim, Won-Hwi Cho, Jeong-Jeung Dang, Kyoung-Jae Chung and Y. S. Hwang
Phys. Plasmas, Vol: 23, No: 2 , published: 01 February 2016
Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
T. Lafleur
Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
Electron heating in capacitively coupled RF plasmas: a unified scenario
Ralf Peter Brinkmann
Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms
Aranka Derzsi, Trevor Lafleur, Jean-Paul Booth, Ihor Korolov and Zoltán Donkó
Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
RF power absorption by plasma of a low-pressure inductive discharge
E. A. Kralkina, A. A. Rukhadze, V. B. Pavlov, K. V. Vavilin, P. A. Nekliudova, A. K. Petrov and A. F. Alexandrov
Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF–UHF hybrid plasmas
B. B. Sahu, Kyung S. Shin and Jeon G. Han
Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas

Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4
B. Bruneau, T. Lafleur, T. Gans, D. O'Connell, A. Greb, I. Korolov, A. Derzsi, Z. Donkó, S. Brandt, E. Schüngel, J. Schulze, P. Diomede, D. J. Economou, S. Longo, E. Johnson and J.-P. Booth
Plasma Sources Sci. and Technol., Vol: 25, No: 1 , published: 01 February 2016
Low temperature plasma RF capacitive discharge in helium at atmospheric pressure
VII Conference on Low temperature Plasma in the Processes of Functional Coating Preparation, 4–7 November 2015, Kazan, Russia
A. Hakki, I. Fayrushin and N. Kashapov
J. Phys.: Conf. Ser., Vol: 2016, No: 669 , published: 14 January 2016
Linear electromagnetic excitation of an asymmetric low pressure capacitive discharge with unequal sheath widths
M. A. Lieberman, A. J. Lichtenberg, E. Kawamura and P. Chabert
Phys. Plasmas, Vol: 23, No: 1 , published: 01 January 2016
Collisionless expansion of pulsed radio frequency plasmas. I. Front formation
T. Schröder, O. Grulke, T. Klinger, R. W. Boswell and C. Charles
Phys. Plasmas, Vol: 23, No: 1 , published: 01 January 2016
Collisionless expansion of pulsed radio frequency plasmas. II. Parameter study
T. Schröder, O. Grulke, T. Klinger, R. W. Boswell and C. Charles
Phys. Plasmas, Vol: 23, No: 1 , published: 01 January 2016
Optical characteristics for capacitively and inductively radio frequency discharge and post-discharge of helium
Murat Tanışlı and Neslihan Şahin
Phys. Plasmas, Vol: 23, No: 1 , published: 01 January 2016
Effects of Continuous Volumetric Direct-Coupled Nonequilibrium Atmospheric Microwave Plasma Discharge on Swirl-Stabilized Premixed Flames
Rajasegar R., Mitsingas C.M., Mayhew E.K., Hammack S., Hyungrok Do, Tonghun Lee
IEEE Trans. Plasma Sci., Vol: 44, No: 1 , published: 01 January 2016
One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma
Vernon H. Chaplin and Paul M. Bellan
J. Appl. Phys. , Vol: 118, No: 24 , published: 28 December 2015
Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms
Birk Berger, Steven Brandt, James Franek, Edmund Schüngel, Mark Koepke, Thomas Mussenbrock and Julian Schulze
J. Appl. Phys. , Vol: 118, No: 22 , published: 14 December 2015
The electric field in capacitively coupled RF discharges: a smooth step model that includes thermal and dynamic effects
Ralf Peter Brinkmann
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
Detection of fast electrons in pulsed argon inductively-coupled plasmas using the 420.1–419.8 nm emission line pair
John B. Boffard, S. Wang, Chun C. Lin and A. E. Wendt
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma
D. Marinov, Z. el Otell, M. D. Bowden and N. St. J. Braithwaite
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
Improvement of uniformity in a weakly magnetized inductively coupled plasma
W. H. Lee, H. W. Cheong, J. W. Kim and K. W. Whang
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part I: basic concepts
A. A. Howling, Ph. Guittienne, R. Jacquier and I. Furno
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network
Ph Guittienne, R. Jacquier, A. A. Howling and I. Furno
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 054002)
B. Bora
Plasma Sources Sci. and Technol., Vol: 24, No: 6 , published: 01 December 2015
A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
Young-Cheol Kim, Hyun-Jun Kim, Hyo-Chang Lee and Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 12 , published: 01 December 2015
E-H Transition in Argon/Oxygen Inductively Coupled RF Plasmas
Th. Wegner, C. Küllig and J. Meichsner
Contrib. Plasma Phys., Vol: 55, No: 10 , published: 01 December 2015
Characterization and Effects of Ar/Air Microwave Plasma on Wound Healing
Ho Young Kim, Sung Kil Kang, Seon Min Park, Hoe Yune Jung, Bo Hwa Choi, Jae Yoon Sim and Jae Koo Lee
Plasma Processes and Polymers, Vol: 12, No: 12 , published: 01 December 2015
keV-energy x-rays from a low-pressure, low-power, low-field, capacitively coupled 27-MHz hydrogen plasma source
57th Annual Meeting of the APS Division of Plasma Physics, November 16-20, 2015, Savannah, US
Peter Jandovitz , Charles Swanson , Jackson Matteucci , S.A. Cohen
Bull. Am. Phys. Soc., Vol: 60, No: 19 , published: 16 November 2015
Design Considerations in Capacitively Coupled Plasmas
57th Annual Meeting of the APS Division of Plasma Physics, November 16-20, 2015, Savannah, US
Sang-Heon Song , Peter Ventzek , Alok Ranjan
Bull. Am. Phys. Soc., Vol: 60, No: 19 , published: 16 November 2015
Measurement of electron density transients in pulsed RF discharges using a frequency boxcar hairpin probe
57th Annual Meeting of the APS Division of Plasma Physics, November 16-20, 2015, Savannah, US
David Peterson , David Coumou , Steven Shannon
Bull. Am. Phys. Soc., Vol: 60, No: 19 , published: 16 November 2015
Phenomenological Studies of an Indium-Tin-Oxide (ITO) Box in a RF Plasma
57th Annual Meeting of the APS Division of Plasma Physics, November 16-20, 2015, Savannah, US
Jorge Carmona-Reyes , Rebecca Kaplan , Jimmy Schmoke , Michael Cook , Lorin Matthews , Truell Hyde
Bull. Am. Phys. Soc., Vol: 60, No: 19 , published: 16 November 2015
Destruction of molecular compounds in gaseous and liquid medium in microwave discharge plasma
12th International Conference on Gas Discharge Plasmas and Their Applications, 6-11 September 2015, Tomsk, Russia
A. G. Zherlitsyn, V. P. Shiyan, L. N. Shiyan and S. O. Magomadova
J. Phys.: Conf. Ser., Vol: 2015, No: 652 , published: 05 November 2015
Hydrogen Reduction of Germanium Tetrafluoride in RF-Discharge
R. A. Kornev, P. G. Sennikov
Plasma Chem. Plasma Process., Vol: 35, No: 6 , published: 01 November 2015
Fluid simulation of the bias effect in inductive/capacitive discharges
Yu-Ru Zhang, Fei Gao, Xue-Chun Li, Annemie Bogaerts and You-Nian Wang
J. Vac. Sci. Technol., A, Vol: 33, No: 6 , published: 01 November 2015
Etch characteristics of magnetic tunnel junction materials using substrate heating in the pulse-biased inductively coupled plasma
Min Hwan Jeon, Kyung Chae Yang, Sehan Lee and Geun Young Yeom
J. Vac. Sci. Technol., A, Vol: 33, No: 6 , published: 01 November 2015
Reversal of the asymmetry in a cylindrical coaxial capacitively coupled Ar/Cl2 plasma
Janardan Upadhyay, Do Im, Svetozar Popović, Leposava Vušković, Anne-Marie Valente-Feliciano and Larry Phillips
J. Vac. Sci. Technol., A, Vol: 33, No: 6 , published: 01 November 2015
О возможности использования емкостного ВЧ-разряда в источнике плазмы с замкнутым дрейфом электронов
Задириев И. И., Рухадзе А. А., Кралькина Е. А., Вавилин К. В., Павлов В. Б.
Прикл. физ., Vol: 2015, No: 6 , published: 01 November 2015
Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model
Xu Hui-Jing (徐会静), Zhao Shu-Xia (赵书霞)1, Fei Gao (高飞), Yu-Ru Zhang (张钰如), Xue-Chun Li (李雪春) and You-Nian Wang (王友年)
Chin. Phys. B, Vol: 24, No: 11 , published: 01 November 2015
Optical diagnostic and electrical analysis in dusty RF discharges containing plasmoids
J. F. Lagrange, I. Géraud-Grenier, F. Faubert and V. Massereau-Guilbaud
J. Appl. Phys. , Vol: 118, No: 16 , published: 28 October 2015
The pressure dependence of the discharge properties in a capacitively coupled oxygen discharge
J. T. Gudmundsson and Bruno Ventéjou
J. Appl. Phys. , Vol: 118, No: 15 , published: 21 October 2015
A tightly coupled non-equilibrium model for inductively coupled radio-frequency plasmas
A. Munafò, S. A. Alfuhaid, J.-L. Cambier and M. Panesi
J. Appl. Phys. , Vol: 118, No: 13 , published: 07 October 2015
Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma
B. Bora
Plasma Sources Sci. and Technol., Vol: 24, No: 5 , published: 01 October 2015
Structure of the velocity distribution of sheath-accelerated secondary electrons in an asymmetric RF-dc discharge
Alexander V. Khrabrov, Igor D. Kaganovich, Peter L. G. Ventzek, Alok Ranjan and Lee Chen
Plasma Sources Sci. and Technol., Vol: 24, No: 5 , published: 01 October 2015
Experimental and theoretical study of RF capacitively coupled plasma in Ar–CF4–CF3I mixtures
O. V. Proshina, T. V. Rakhimova, D. V. Lopaev, V. Šamara, M. R. Baklanov and J.-F. de Marneffe
Plasma Sources Sci. and Technol., Vol: 24, No: 5 , published: 01 October 2015
Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges
M. A. Lieberman, A. J. Lichtenberg, E. Kawamura and A. M. Marakhtanov
Plasma Sources Sci. and Technol., Vol: 24, No: 5 , published: 01 October 2015
Excited state population dynamics of a xenon ac discharge
A. Lucca Fabris, C. V. Young and M. A. Cappelli
Plasma Sources Sci. and Technol., Vol: 24, No: 5 , published: 01 October 2015
Discharge regime of non-ambipolarity with a self-induced steady-state magnetic field in plasma sources with localized radio-frequency power deposition
A. Shivarova, St. Lishev, D. Todorov and Ts. Paunska
Phys. Plasmas, Vol: 22, No: 10 , published: 01 October 2015
Effect of driving voltages in dual capacitively coupled radio frequency plasma: A study by nonlinear global model
B. Bora
Phys. Plasmas, Vol: 22, No: 10 , published: 01 October 2015
The transition mechanisms of the E to H mode and the H to E mode in an inductively coupled argon-mercury mixture discharge
Xiao Zhang, Peng-Cheng Yu, Yu Liu, Zhe Zheng, Liang Xu, Pi Wang and Jin-Xiang Cao
Phys. Plasmas, Vol: 22, No: 10 , published: 01 October 2015
Dual-frequency glow discharges in atmospheric helium
Xiaojiang Huang, Lu Dai, Ying Guo, Jing Zhang and J. J. Shi
Phys. Plasmas, Vol: 22, No: 10 , published: 01 October 2015
A comparative study of capacitively coupled HBr/He, HBr/Ar plasmas for etching applications: Numerical investigation by fluid model
Banat Gul and Aman-ur-Rehman
Phys. Plasmas, Vol: 22, No: 10 , published: 01 October 2015
Relatively high plasma density in low pressure inductive discharges
Hyun-Ju Kang, Yu-Sin Kim and Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 9 , published: 01 September 2015
Electron Temperatures and Electron Densities in Microwave Helium Discharges with Pressures Higher than 0.1 MPa
K. Sasaki, S. Soma, H. Akashi, M. ElSabbagh and Y. Ikeda
Contrib. Plasma Phys., Vol: 55, No: 8 , published: 01 September 2015
Characteristics of a VHF H2 plasma at high pressures for different discharge gaps
Cheng-Yang Lien, Chia-Fu Chen, Ching-Lung Yang, Yoshinobu Kawai, Kuo-Feng Chiu, Jen-Bin Shi, Sy-Ruen Huang, Jui-Hao Wang, Yu-Jer Tsai and Ting-Kuei Lien
Jpn. J. Appl. Phys., Vol: 54, No: 9 , published: 01 September 2015
Kinetic model and spectroscopic measurement of NO (A, B, C) states in low-pressure N2—O2 microwave discharge
Hao Tan, Atsushi Nezu and Hiroshi Akatsuka
Jpn. J. Appl. Phys., Vol: 54, No: 9 , published: 01 September 2015
Математическое моделирование индуктивного ВЧ-разряда, помещенного во внешнее магнитное поле, посредством программы КАРАТ
Александров А. Ф., Вавилин К. В., Кралькина Е. А., Павлов В. Б., Петров А. К., Тараканов В. П.
Прикл. физ., Vol: 2015, No: 5 , published: 01 September 2015
External control of electron energy distributions in a dual tandem inductively coupled plasma
Lei Liu, Shyam Sridhar, Weiye Zhu, Vincent M. Donnelly, Demetre J. Economou, Michael D. Logue and Mark J. Kushner
J. Appl. Phys. , Vol: 118, No: 8 , published: 28 August 2015
Profile simulation model for sub-50 nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma
Valentyn Ishchuk, Deirdre L. Olynick, Zuwei Liu and Ivo W. Rangelow
J. Appl. Phys. , Vol: 118, No: 5 , published: 07 August 2015
Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
Oh S., Lee H., Chung, C.
IEEE Trans. Plasma Sci. Pt 3, Vol: 43, No: 8 , published: 01 August 2015
Capacitive and resistive double sheath model in an asymmetric radio frequency plasma discharge
E. Faudot
Phys. Plasmas, Vol: 22, No: 8 , published: 01 August 2015
Erratum: “Characteristics of anomalous skin effect and evolution of power absorption regions in a cylindrical radio frequency inductively coupled plasma” [Phys. Plasmas 22, 063504 (2015)]
Z. F. Ding, B. Sun and W. G. Huo
Phys. Plasmas, Vol: 22, No: 8 , published: 01 August 2015
Electron heating during E-H transition in inductively coupled RF plasmas
Th. Wegner, C. Küllig and J. Meichsner
Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Is collisionless heating in capacitively coupled plasmas really collisionless?
T. Lafleur and P. Chabert
Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma

Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Nonlocal behavior of the excitation rate in highly collisional RF discharges
Denis Eremin, Torben Hemke and Thomas Mussenbrock
Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Influence of a phase-locked RF substrate bias on the E- to H-mode transition in an inductively coupled plasma
P. Ahr, E. Schüngel, J. Schulze, Ts. V. Tsankov and U. Czarnetzki
Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

E. Schüngel, S. Brandt, Z. Donkó, I. Korolov, A. Derzsi and J. Schulze

Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Atomic and molecular hydrogen gas temperatures in a low-pressure helicon plasma
Cameron M. Samuell and Cormac S. Corr
Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
E. Schüngel, Z. Donkó, P. Hartmann, A. Derzsi, I. Korolov and J. Schulze
Plasma Sources Sci. and Technol., Vol: 24, No: 4 , published: 01 August 2015
Correlation between vibrational temperature of N2 and plasma parameters in inductively coupled Ar/N2 plasmas
Young-Cheol Kim, Hyo-Chang Lee, Yu-Sin Kim and Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 8 , published: 01 August 2015
Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma
Shu-Xia Zhao, Fei Gao, Ya-Ping Wang, You-Nian Wang and Annemie Bogaerts
J. Appl. Phys. , Vol: 118, No: 3 , published: 21 July 2015
Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma
Ju-Ho Kim, Young-Cheol Kim and Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 7 , published: 01 July 2015
Vertically aligned dust particles under the influence of crossed electric and magnetic fields in the sheath of a radio frequency discharge
M. Puttscher and A. Melzer
Phys. Plasmas, Vol: 22, No: 7 , published: 01 July 2015
Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma
Hee-Woon Cheong, Woohyun Lee, Ji-Won Kim, Ki-Woong Whang, Hyuk Kim and Wanjae Park
J. Vac. Sci. Technol., A, Vol: 33, No: 4 , published: 01 July 2015
Trapped electron plasma formation and equilibrium with a low-power radio-frequency drive
11th International Workshop on Non-Neutral Plasmas : 1-4 December 2014, Takamatsu, Japan
M. Romé, S. Chen, G. Maero, B. Paroli and R. Pozzoli
AIP Conf. Proc., Vol: 1668, No: , published: 29 June 2015
Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study
Shu-Xia Zhao, Yu-Ru Zhang, Fei Gao, You-Nian Wang and Annemie Bogaerts
J. Appl. Phys. , Vol: 117, No: 24 , published: 28 June 2015
Characteristics of anomalous skin effect and evolution of power absorption regions in a cylindrical radio frequency inductively coupled plasma
Z. F. Ding, B. Sun and W. G. Huo
Phys. Plasmas, Vol: 22, No: 6 , published: 01 June 2015
A Global Enhanced Vibrational Kinetic Model for High-Pressure Hydrogen RF Discharges
Averkin S.N., Gatsonis N.A., Olson L.
IEEE Trans. Plasma Sci., Vol: 43, No: 6 , published: 01 June 2015
Confinement of highly energetic electron beams in low pressure capacitive discharges
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Wilczek S., Trieschmann J., Schulze J., Schuengel E., Brinkmann R.P., Derzsi A., Korolov I., Donko Z., Mussenbrock T.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Validation and parallelization of the particle in Cell/Monte Carlo Collision numerical code for the RF discharge simulations
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Sarikaya C.K., Rafatov I., Cakir S.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Modeling electromagnetic effects in large-area capacitively coupled discharges
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Hyowon Bae, Jin Woo Hong, Hae June Lee, Ming-Chieh Lin
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Mode transitions in low-pressure nitrogen RF-CCP at different frequencies
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Erozbek-Gungor U., Bilikmen S.K.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Inductively coupled plasma for graphene production
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Durmaz Y., Bozduman F., Koc I.U., Ismael M., Nore S., Gulec A., Oksuz L.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Vibrational and rotational temperatures of NO A 2Σ+ metastable state in N2-O2 mixture microwave discharge
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Hao Tan, Nezu A., Akatsuka H.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Advanced coatings for RF sources
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Ives R.L., Collins G., Falce L., Flannery M., Desai T.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
The electron energy distribution in a low-pressure system combined inductive and capacitive discharge
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Jin Seok Kim, Gyoo Cheon Kim, Ho-Jun Lee, Hae June Lee
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Experimental results for uniformity and IEDF control with phase-locked RF source and bias on an inductively coupled plasma system
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Coumou D.J., Shannon S.C.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Electron properties of radio-frequency capacitive discharge at atmospheric pressure
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Park S., Wonho Choe, Kim K., Park J.Y., Moon S.Y.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Characterization of an electrothermal plasma with polymer and metal source materials
The 42nd IEEE International Conference on Plasma Science (ICOPS), May 24 – 28, Antalya, Turkey
Gebhart T.E., Echols J.R., Winfrey A.L.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2015, No: , published: 24 May 2015
Modulations of the plasma uniformity by low frequency sources in a large-area dual frequency inductively coupled plasma based on fluid simulations
Xiao-Yan Sun, Yu-Ru Zhang, Xue-Chun Li and You-Nian Wang
Phys. Plasmas, Vol: 22, No: 5 , published: 01 May 2015
A Method of Separation of Polydisperse Particles in the Plasma of Radio-Frequency Discharge
D. G. Batryshev, T. S. Ramazanov, M. K. Dosbolayev and M. T. Gabdullin
Contrib. Plasma Phys., Vol: 55, No: 5 , published: 01 May 2015
Excited State Distributions of Hydrogen Atoms in the Microwave Discharge Hydrogen Plasma and the Effect of Electron Energy Probabilistic Function
Shimizu Y., Kittaka Y., Nezu A., Matsuura H., Akatsuka H.
IEEE Trans. Plasma Sci. Pt 2, Vol: 43, No: 5 , published: 01 May 2015
Two Temperatures Components in CCP Argon 13.56-MHz RF Discharge
Azooz A.A., Ali Z.T.
IEEE Trans. Plasma Sci. Pt 2, Vol: 43, No: 5 , published: 01 May 2015
Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure
Sanghoo Park, Wonho Choe, Se Youn Moon and Suk Jae Yoo
Plasma Sources Sci. and Technol., Vol: 24, No: 3 , published: 01 May 2015
Heating mode transition in capacitively coupled CF4 discharges: comparison of experiments with simulations
Gang-Hu Liu, Yong-Xin Liu, De-Qi Wen and You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 24, No: 3 , published: 01 May 2015
Localized electron heating and density peaking in downstream helicon plasma
Soumen Ghosh, K. K. Barada, P. K. Chattopadhyay, J. Ghosh and D. Bora
Plasma Sources Sci. and Technol., Vol: 24, No: 3 , published: 01 May 2015
Electrode impedance effect in dual-frequency capacitively coupled plasma Special Issue on Electron Heating in Technological Plasmas
Yohei Yamazawa
Plasma Sources Sci. and Technol., Vol: 24, No: 3 , published: 01 May 2015
Controlling VUV photon fluxes in low-pressure inductively coupled plasmas
Peng Tian and Mark J. Kushner
Plasma Sources Sci. and Technol., Vol: 24, No: 3 , published: 01 May 2015
On the role of metastables in capacitively coupled oxygen discharges
J. T. Gudmundsson and M. A. Lieberman
Plasma Sources Sci. and Technol., Vol: 24, No: 3 , published: 01 May 2015
Измерение населенностей метастабильных и резонансных уровней в плазме высокочастотного емкостного разряда в аргоне
Васильева А.Н., Волошин Д.Г., Ковалев А.С., Курчиков К.А.
Физ. плазмы, Vol: 41, No: 5 , published: 01 May 2015
Experimental investigations of driving frequency effect in low-pressure capacitively coupled oxygen discharges
Jia Liu, Yong-Xin Liu, Gang-Hu Liu, Fei Gao and You-Nian Wang
J. Appl. Phys. , Vol: 117, No: 14 , published: 14 April 2015
Triple Probe Measurements in Transient Plasma of Pulsed Capacitive Discharge
A. Qayyum, S. Ahmad, N. Ahmad, Farah Deeba, S. Hussain
J. Fusion Energy, Vol: 34, No: 2 , published: 01 April 2015
Experimental diagnostics of plasma radial uniformity and comparisons with computational simulations in capacitive discharges
Yong-Xin Liu, Ying-Shuang Liang, De-Qi Wen, Zhen-Hua Bi and You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 24, No: 2 , published: 01 April 2015
Edge-to-center density ratios in low-temperature plasmas
T. Lafleur and P. Chabert
Plasma Sources Sci. and Technol., Vol: 24, No: 2 , published: 01 April 2015
Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals
S. Sharma, S. K. Mishra, P. K. Kaw, A. Das, N. Sirse and M. M. Turner
Plasma Sources Sci. and Technol., Vol: 24, No: 2 , published: 01 April 2015
Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas
Hyun Jun Kim, Hye Ju Hwang, Dong Hwan Kim, Jeong Hee Cho, Hee Sun Chae and Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 4 , published: 01 April 2015
Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas
Hui-Jing Xu, Shu-Xia Zhao, Yu-Ru Zhang, Fei Gao, Xue-Chun Li and You-Nian Wang
Phys. Plasmas, Vol: 22, No: 4 , published: 01 April 2015
Response to “Comment on ‘Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas’” [Phys. Plasmas 22, 044701 (2015)]
June Young Kim, Young-Cheol Kim, Yu-Sin Kim and Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 4 , published: 01 April 2015
Determination of the de-excitation probability of argon metastable (1s5 and 1s3) atoms on aluminum, stainless steel, silicon, quartz and Pyrex surfaces
Zhen-Bin Wang, Jiang-Tao Li, Xi-Ming Zhu, Yi-Kang Pu
J. Phys. D: Appl. Phys., Vol: 48, No: 10 , published: 18 March 2015
A study on asymmetric current in plasma-mediated electrosurgery
Y.B. Seol, J.H. Kim, B.K. Na, S.J. You, E.H. Choi, H.Y. Chang
Curr. Appl Phys., Vol: 15, No: 3 , published: 03 March 2015
Micro-arc ignition on the oily surface of capacitively-coupled plasma
Yonghoon Kim, Hunsu Lee, Hongyoung Chang
Curr. Appl Phys., Vol: 15, No: 3 , published: 03 March 2015
Experimental and Theoretical Study of Transition Between Glow Modes of Planar Barrier Capacitive RF Discharge in Argon at One Atmosphere Pressure
Bazhenov V.Y., Kuzmichev A.I., Tsiolko V.V., Chaplinskiy R.Y., Piun V.M.
IEEE Trans. Plasma Sci. Pt 1, Vol: 43, No: 3 , published: 01 March 2015
Modeling and simulation of ion-filtered inductively coupled plasma using argon plasma
Chao Wu, Jian Wang, Weiwang Zhang, Yi Luo
, Vol: 54, No: 3 , published: 01 March 2015
Нагрев газа и полимерного материала в низкотемпературной плазме высокочастотного разряда
Марков А.В., Юленец Ю.П.
Теплофиз. высок. температур, Vol: 53, No: 2 , published: 01 March 2015
Исследование электрофизических и теплофизических характеристик низкочастотного индукционного разряда трансформаторного типа низкого давления
Исупов М.В., Федосеев А.В., Сухинин Г.И., Уланов У.М.
Теплофиз. высок. температур, Vol: 53, No: 2 , published: 01 March 2015
Fluid simulation and experimental validation of plasma radial uniformity in 60 MHz capacitively coupled nitrogen discharges
Ying-Shuang Liang, Yong-Xin Liu, Yu-Ru Zhang, You-Nian Wang
J. Appl. Phys. , Vol: 117, No: 8 , published: 28 February 2015
СВЧ разряды при пониженных давлениях и особенности процессов в сильно неоднородной плазме
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
Ю.А. Лебедев
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Численное иследование высокочастотного емкостного разряда пониженного давления
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
И.Ш. Абдуллин, И.Б. Бадриев, В.С. Желтухин, В.Ю. Чебакова
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Ионизационно-полевая неустойчивость ВЧ разряда при произвольных граничных условиях
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
С.А. Двинин, В.А. Довженко, О.А. Синкевич
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Сверхвысокочастотный разряд с жидкими электродами
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
Садриев Р.Ш., Гайсин Ф.М., Багаутдинова Л.Н.
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Математическая модель ВЧЕ разряда с жидкими электродами
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
В.С. Желтухин, А.Ф. Гайсин, И.Ш. Абдуллин, В.Ю. Чебакова
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Высокочастотный емкостной разряд с жидкими электродами
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
А.Ф. Гайсин, И.Ш. Абдуллин
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Зондовое исследование структуры неоднородного СВЧ разряда в азоте
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
Г.В. Крашевская, Ю.А. Лебедев, М. А. Гоголева
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Спектроскопия аргоновой плазмы импульсно-периодического микроволнового резонансного разряда
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
В.В. Андреев, И. Василеска, М.А. Корнеева
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Оптические свойста микроволновых разрядов в смесях порошков титана и магния с диэлектриками
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
Г.М.Батанов, В.Д. Борзосеков, Л.В. Колик, Е.М. Кончеков, А.А. Летунов, Д.В. Малахов, А.Е. Петров, И.Г. Рябикина, К.А.Сарксян, Н.Н.Скворцова, В.Д. Степахин, Н.К. Харчев
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Оптимизация характеристик плоской индуктивной антенны для возбуждения ВЧ разряда
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
С.А. Двинин, Н.И. Буслеев
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Резонансный характер индуктивного вч разряда, помещенного во внешнее магнитное поле
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
К.В. Вавилин, Е.А. Кралькина, А.М.Никонов, В.Б.Павлов, А.К. Петров
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Активное управление течением в пристеночной области дозвуковых диффузоров инициированными СВЧ-разрядами
XLII Международная Звенигородская конференция по физике плазмы и УТС, 9–13 февраля 2015 г.
Виноградов В.А., Есаков И.И., Комратов Д.В., Макаров А.Ю.
Сб. тр. Междунар. Звенигородской конф. по физ. плазмы и УТС, Vol: 2015, No: , published: 09 February 2015
Mode transition in a planar-coil inductively driven discharge caused by an external magnetic field
A. Demerdzhiev, Kh. Tarnev, St. Lishev, A. Shivarova
J. Phys. D: Appl. Phys., Vol: 48, No: 4 , published: 04 February 2015
Электронная температура плазмы в источнике кальциевой плазмы на основе ЭЦР-разряда в парах
Горшунов Н.М., Потанин Е.П.
Ж. техн. физ., Vol: 85, No: 2 , published: 01 February 2015
Dual-frequency capacitively coupled chlorine discharge
Shuo Huang, J. T. Gudmundsson
Plasma Sources Sci. and Technol., Vol: 24, No: 1 , published: 01 February 2015
The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
J. Schulze, Z. Donkó, A. Derzsi, I. Korolov,  E. Schuengel
Plasma Sources Sci. and Technol., Vol: 24, No: 1 , published: 01 February 2015
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
B. Bruneau, T. Novikova, T. Lafleur, J. P. Booth, E. V. Johnson
Plasma Sources Sci. and Technol., Vol: 24, No: 1 , published: 01 February 2015
Evaluation of the energy efficiency of CO2 conversion in microwave discharges using a reaction kinetics model
Tomáš Kozák, Annemie Bogaerts
Plasma Sources Sci. and Technol., Vol: 24, No: 1 , published: 01 February 2015
Spatially resolved Langmuir probe diagnostics in a capacitively coupled radio frequency argon and oxygen plasma
C. Küllig, Th. Wegner, J, Meichsner
Plasma Sources Sci. and Technol., Vol: 24, No: 1 , published: 01 February 2015
Transient phenomena during dust formation in a N2–CH4 capacitively coupled plasma
G. Wattieaux, N. Carrasco, M. Henault, L. Boufendi, G. Cernogora
Plasma Sources Sci. and Technol., Vol: 24, No: 1 , published: 01 February 2015
Особенности перехода слаботочного высокочастотного емкостного разряда с электролитическим электродом в сильноточный разряд
Гайсин А.Ф.
Теплофиз. высок. температур, Vol: 53, No: 1 , published: 01 February 2015
The electron density evolution in pulsed 60 MHz capacitively coupled oxygen discharges
Fei-Xiang Liu, Tsanko V. Tsankov, Yi-Kang Pu
J. Phys. D: Appl. Phys., Vol: 48, No: 3 , published: 28 January 2015
Reaction pathways for bio-active species in a He/H2O atmospheric pressure capacitive discharge
Ke Ding,  M. A. Lieberman
J. Phys. D: Appl. Phys., Vol: 48, No: 3 , published: 28 January 2015
Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power
Michael D. Logue, Mark J. Kushner
J. Appl. Phys. , Vol: 117, No: 4 , published: 28 January 2015
Growth dynamics of copper oxide nanowires in plasma at low pressures
Gregor Filipič, Oleg Baranov, Miran Mozetič, Uroš Cvelbar
J. Appl. Phys. , Vol: 117, No: 4 , published: 28 January 2015
An investigation of Ar metastable state density in low pressure dual-frequency capacitively coupled argon and argon-diluted plasmas
Wen-Yao Liu, Yong Xu, Yong-Xin Liu, Fei Peng, Qian Guo, Xiao-Song Li, Ai-Min Zhu, You-Nian Wang
J. Appl. Phys. , Vol: 117, No: 2 , published: 14 January 2015
Properties of NiOx and its influence upon all-thin-film ITO/NiOx/LiTaO3/WO3/ITO electrochromic devices prepared by magnetron sputtering
Xingwang Song, Guobo Dong, Fangyuan Gao, Yu Xiao, Qirong Liu, Xungang Diao
Vacuum, Vol: 111, No: , published: 01 January 2015
Synthesis of submicron-sized rods and trees of Cu2O by radio-frequency magnetron sputtering
Vu Xuan Hien, Jae-Lok You, Kwang-Min Jo, Se-Yun Kim, Joon-Hyung Lee, Jeong-Joo Kim, Young-Woo Heo
Vacuum, Vol: 111, No: , published: 01 January 2015
Measurement of energy flux to a substrate by thermal and Langmuir probes during inductively coupled plasma assisted DC magnetron sputtering
Yoshinobu Matsuda, Kenji Mine, Shintaro Wakiyama, Masanori Shinohara
, Vol: 54, No: 1 , published: 01 January 2015
Spectroscopic determination of vibrational and rotational temperatures of NO molecules in N2–O2 mixture microwave discharge
Hao Tan, Atsushi Nezu, Haruaki Matsuura, Hiroshi Akatsuka
, Vol: 54, No: 1 , published: 01 January 2015
Characteristics of pulsed dual frequency inductively coupled plasma
Jin Seok Seo, Kyoung Nam Kim, Ki Seok Kim, Tae Hyung Kim, Geun Young Yeom
Jpn. J. Appl. Phys., Part 1, Vol: 54, No: 1S , published: 01 January 2015
Spectroscopic determination of vibrational and rotational temperatures of NO molecules in N2–O2 mixture microwave discharge
Hao Tan, Atsushi Nezu, Haruaki Matsuura, Hiroshi Akatsuka
Jpn. J. Appl. Phys., Part 1, Vol: 54, No: 1S , published: 01 January 2015
Effect of source frequency and pulsing on the SiO2 etching characteristics of dual-frequency capacitive coupled plasma
Hoe Jun Kim, Min Hwan Jeon, Anurag Kumar Mishra, In Jun Kim, Tae Ho Sin, Geun Young Yeom
Jpn. J. Appl. Phys., Part 1, Vol: 54, No: 1S , published: 01 January 2015
Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas
June Young Kim, Young-Cheol Kim, Yu-Sin Kim, Chin-Wook Chung
Phys. Plasmas, Vol: 22, No: 1 , published: 01 January 2015
Particle modelling of magnetically confined oxygen plasma in low pressure radio frequency discharge
Djilali Benyoucef, Mohammed Yousfi
Phys. Plasmas, Vol: 22, No: 1 , published: 01 January 2015
Probing properties of cold radiofrequency plasma with polymer probe
E. Bormashenko, G. Chaniel, V. Multanen
J. Plasma Phys., Vol: 81, No: 1 , published: 01 January 2015
Пространственное распределение параметров электронной компоненты азотной плазмы электродного микроволнового разряда при пониженных давлениях
Лебедев Ю. А., Крашевская Г. В., Гоголева М. А.
Прикл. физ., Vol: 2015, No: 1 , published: 01 January 2015
Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation
Dmitry Voloshin, Alexander Kovalev, Yuri Mankelevich, Olga Proshina, Tatyana Rakhimova and Anna Vasilieva
Eur. Phys. J. D, Vol: 69, No: 1 , published: 01 January 2015
Высокочастотный емкостной разряд с непроточным и капельно-струйным электролитическим электродами
Гайсин А.Ф., Абдуллин И.Ш., Басыров Р.Ш., Хазиев Р.М., Самитова Г.Т., Шакирова Э.Ф.
Физ. плазмы, Vol: 40, No: 12 , published: 01 December 2014
Fast 2D fluid-analytical simulation of ion energy distributions and electromagnetic effects in multi-frequency capacitive discharges
E. Kawamura, M. A. Lieberman, D. B. Graves
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Control of electron energy distribution by adding a pulse inductive field in capacitive discharge
Hyo-Chang Lee, Chin-Wook Chung
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Plasma distributions observed in a 2.45 GHz hydrogen discharge
O. D. Cortázar, A. Megía-Macías, O. Tarvainen, A. Vizcaíno-de-Julián, H. Koivisto
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Investigation of absolute atomic fluorine density in a capacitively coupled SF6/O2/Ar and SF6/Ar discharge
S. Kechkar, S. K. Babu, P. Swift, C. Gaman, S. Daniels, M. Turner
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Effect of electron Monte Carlo collisions on a hybrid simulation of a low-pressure capacitively coupled plasma
Seok Won Hwang, Ho-Jun Lee,  Hae June Lee
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges
P. D. Machura, A. Hecimovic, S. Gallian, J. Winter, T. de los Arcos
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge
N. Sirse, M. H. Jeon, G. Y. Yeom, A. R. Ellingboe
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Comparison of a hybrid model with experiments in atmospheric pressure helium and argon capacitive rf discharges
Ke Ding, M. A. Lieberman, A. J. Lichtenberg, Jian Jun Shi, Jing Zhang
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments
P. Diomede, D. J. Economou, T. Lafleur, J.-P. Booth, S. Longo
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
A study on reactive ion etching lag of a high aspect ratio contact hole in a magnetized inductively coupled plasma
H. W. Cheong, W. H. Lee, J. W. Kim, W. S. Kim, K. W. Whang
Plasma Sources Sci. and Technol., Vol: 23, No: 6 , published: 01 December 2014
Effects of RF-Bias Power Application in an Inductively Coupled CF4 Plasma on the Nanoscale Morphology and Chemical Bond Structure of Polyethylene Terephthalate Surface
Kim W., Cheong H., Park W., Whang K.
IEEE Trans. Plasma Sci. Pt 3, Vol: 42, No: 12 , published: 01 December 2014
Complex Plasma Structure Observed in the Inlet of an Argon Radio-Frequency Discharge
Lemmer K.M., Kirtley D.E.
IEEE Trans. Plasma Sci. Pt 3, Vol: 42, No: 12 , published: 01 December 2014
The GaN-Based Light Emitting Diode Grown on Nanopattern Sapphire Substrate Prepared by Inductively Coupled Plasma Etching
Lin J., Huang S., Su Y., Huang K.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 12 , published: 01 December 2014
Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo
Kim J.S., Hur M.Y., Song I.C., Lee H., Lee H.J.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 12 , published: 01 December 2014
Experimental Investigations of the APT-60 High-Pressure Inductively Coupled Plasma System on Different Plasma Gases
Matveev I., Matveyeva S., Zverev S.
IEEE Trans. Plasma Sci. Pt 2, Vol: 42, No: 12 , published: 01 December 2014
MW Plasma Filaments for Applications
Ardelyan N.V., Bychkov V.L., Kosmachevskii K.V.
IEEE Trans. Plasma Sci. Pt 2, Vol: 42, No: 12 , published: 01 December 2014
Diocotron modulation in an electron plasma through continuous radio-frequency excitation
B. Paroli, G. Maero, R. Pozzoli, M. Romé
Phys. Plasmas, Vol: 21, No: 12 , published: 01 December 2014
Electron heating in low pressure capacitive discharges revisited
E. Kawamura, M. A. Lieberman, A. J. Lichtenberg
Phys. Plasmas, Vol: 21, No: 12 , published: 01 December 2014
Collisionless electron heating in periodic arrays of inductively coupled plasmas
U. Czarnetzki, Kh. Tarnev
Phys. Plasmas, Vol: 21, No: 12 , published: 01 December 2014
Dust particles under the influence of crossed electric and magnetic fields in the sheath of an rf discharge
M. Puttscher, A. Melzer
Phys. Plasmas, Vol: 21, No: 12 , published: 01 December 2014
Новый маркер для определения степени неоднородности емкостного и барьерного разрядов
Соснин Э.А., Пикулев А.А.
Ж. техн. физ., Vol: 84, No: 12 , published: 01 December 2014
Resonant-frequency discharge in a multi-cell radio frequency cavity
S. Popović, J. Upadhyay, J. Mammosser, M. Nikolić, L. Vušković
J. Appl. Phys. , Vol: 116, No: 17 , published: 07 November 2014
Simulation of inductively coupled plasma with applied bias voltage using COMSOL
Angel Ochoa Brezmes, Cornelia Breitkopf
Vacuum, Vol: 109, No: , published: 01 November 2014
Contrasting Characteristics of Radio-Frequency Atmospheric Argon Discharges With and Without Dielectric Barriers
Huang X., Zhang J., Guo Y., Zhang J., Shi J.J.
IEEE Trans. Plasma Sci., Vol: 42, No: 11 , published: 01 November 2014
How the “main condition” of phase stability can explain the effect of the velocity deviation of secondary electrons in DC-biased single-sided multipactors
M. Mostajeran
Phys. Plasmas, Vol: 21, No: 11 , published: 01 November 2014
Power dependence of electron density at various pressures in inductively coupled plasmas
June Young Kim, Dong-Hwan Kim, Ju Ho Kim, Sang-Bum Jeon, Sung-Won Cho,Chin-Wook Chung
Phys. Plasmas, Vol: 21, No: 11 , published: 01 November 2014
Uniform surface growth of copper oxide nanowires in radiofrequency plasma discharge and limiting factors
Gregor Filipič, Oleg Baranov, Miran Mozetič, Kostya (Ken) Ostrikov, Uroš Cvelbar
Phys. Plasmas, Vol: 21, No: 11 , published: 01 November 2014
Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias
Gao Fei (高 飞), Zhang Yu-Ru (张钰如), Zhao Shu-Xia (赵书霞), Li Xue-Chun (李雪春), Wang You-Nian (王友年)
Chin. Phys. B, Vol: 23, No: 11 , published: 01 November 2014
Low-frequency, self-sustained oscillations in inductively coupled plasmas used for optical pumping
J. Coffer, N. Encalada, M. Huang, J. Camparo
J. Appl. Phys. , Vol: 116, No: 16 , published: 28 October 2014
Atmospheric Pressure RF Discharge in Neon and Helium
Josepson R., Navratil Z., Dosoudilova L., Dvorak P., Trunec D.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen
Mohr S., Schungel E., Schulze J., Czarnetzki U.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Inductive Discharge Driving by Oblique Field Penetration into the Plasma
Demerdzhiev A.P., Tarnev K.T., Lishev S.S., Yordanov D.Y., Shivarova A.P.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Glow Modes in Radio Frequency Atmospheric Discharge Operating With and Without Anodized Electrodes
Hussain S., Qazi H.I.A., Malik A.A., Badar M.A.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
E and H Modes of Inductively Coupled SO2 Plasma
Zaplotnik R.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Structure and Energy Deposition Process of an Inductively Coupled Plasma Under Confronting Divergent Magnetic Fields
Minami Y., Asami Y., Sugawara H.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Lighthouse Plasma Instability in a Capacitive RF Discharge
Wegner T., Kullig C., Meichsner J.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Dust Hour Glass in a Capacitive RF Discharge
Iwashita S., Schungel E., Schulze J., Hartmann P., Donko Z., Uchida G., Koga K., Shiratani M., Czarnetzki U.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Particle Movement in a Dusty RF Plasma at Power Switch-OFF
Lagrange J., Geraud-Grenier I., Faubert F., Massereau-Guilbaud V.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Enhanced Plasma Uniformity in RF Plasma With Side Multihole
Lee H., Chung C.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Complex Electron Heating in Capacitive Multi-Frequency Plasmas
Schulze J., Schungel E., Derzsi A., Korolov I., Mussenbrock T., Donko Z.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Exothermic Surface Reactions on Sintered Graphite Upon Exposure to CO2 Plasma Created in Microwave Discharge
Vesel A., Balat-Pichelin M.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Observation of Stationary Plasma Striation and Collimated Plasma Transport in a 100-kHz Inductively Coupled Plasma Discharge
Takahashi K.,Ando A.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
DC and Microwave Plasmas for Synthesis of Vertically Oriented Graphene
Bo Z., Tian Y., Yu K., Yang H., Hu D., Chen J., Yan J., Cen K.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Trapezoidal Voltage Pulses
Diomede P., Economou D.J., Donnelly V.M.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges
Wegner T., Kullig C., Meichsner J.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Fully Self-Consistent 3-D Modeling of Inductively Coupled Plasmas
Agarwal A., Kenney J.A., Rauf S., Collins K.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Ion Energy and Angular Distributions in a Dual-Frequency Capacitively Coupled Chlorine Discharge
Huang S., Gudmundsson J.T.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas
Kim Y., Lee H., Chung C.
IEEE Trans. Plasma Sci. Pt 1, Vol: 42, No: 10 , published: 01 October 2014
Nitriding molybdenum: Effects of duration and fill gas pressure when using 100-Hz pulse DC discharge technique
U. Ikhlaq, R. Ahmad, M. Shafiq, S. Saleem, M. S. Shah, T. Hussain, I. A. Khan, K. Abbas, M. S. Abbas
Chin. Phys. B, Vol: 23, No: 10 , published: 01 October 2014
An Experimental and Analytical Study of an Asymmetric Capacitively Coupled Plasma Used for Plasma Polymerization
Andrew Michelmore, Jason D. Whittle, Robert D. Short, Rod W. Boswell, Christine Charles
Plasma Processes and Polymers, Vol: 11, No: 9 , published: 01 September 2014
Electron energy distributions in a magnetized inductively coupled plasma
Sang-Heon Song, Yang Yang, Pascal Chabert, Mark J. Kushner
Phys. Plasmas, Vol: 21, No: 9 , published: 01 September 2014
Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges
Fei Gao, Yu-Ru Zhang, Shu-Xia Zhao, You-Nian Wang
Phys. Plasmas, Vol: 21, No: 8 , published: 01 August 2014
Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma
B. Bora, L. Soto
Phys. Plasmas, Vol: 21, No: 8 , published: 01 August 2014
Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge
Qian Liu, Yue Liu, Tagra Samir, Zhaoshuai Ma
Phys. Plasmas, Vol: 21, No: 8 , published: 01 August 2014
Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C2H2 discharges
Liu Xiang-Mei (刘相梅), Li Qi-Nan (李奇楠), Xu Xiang (徐 翔)
Chin. Phys. B, Vol: 23, No: 8 , published: 01 August 2014
Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive discharges
Yong-Xin Liu, Fei Gao, Jia Liu, You-Nian Wang
J. Appl. Phys. , Vol: 116, No: 4 , published: 28 July 2014
Mechanism of Production of CN(X2Σ+) Radicals from the Decomposition Reaction of CH3CN with Microwave Discharge Flow of Ar
Haruhiko Ito, Katsuaki Koshimura, Ayumi Yamamoto, Hiroki Tsudome, Nurul Izzaty Binti Zamri, Hitoshi Araki, Akira Wada
Plasma Chem. Plasma Process., Vol: 34, No: 4 , published: 01 July 2014
Характеристики плазмы ЭЦР-разряда в узком коаксиальном резонаторе плазменного инжектора CERA-RI-2
Балмашнов А.А., Степина С.П., Умнов А.М.
Успехи прикл. физ., Vol: 2, No: 4 , published: 01 July 2014
Balmer-alpha and Balmer-beta Stark line intensity profiles for high-power hydrogen inductively coupled plasmas
Wang Song-Bai (王松柏), Lei Guang-Jiu (雷光玖), Liu Dong-Ping (刘东平), Yang Si-Ze (杨思泽)
Chin. Phys. B, Vol: 23, No: 7 , published: 01 July 2014
Spectroscopic analysis of H2/CH4 microwave plasma and fast growth rate of diamond single crystal
N. Derkaoui, C. Rond, K. Hassouni, A. Gicquel
J. Appl. Phys. , Vol: 115, No: 23 , published: 21 June 2014
Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses
Paola Diomede, Demetre J. Economou
J. Appl. Phys. , Vol: 115, No: 23 , published: 21 June 2014
Phase modulation in pulsed dual-frequency capacitively coupled plasmas
De-Qi Wen, Quan-Zhi Zhang, Wei Jiang, Yuan-Hong Song, Annemie Bogaerts, You-Nian Wang
J. Appl. Phys. , Vol: 115, No: 23 , published: 21 June 2014
Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF 4 discharge
Quan-Zhi Zhang, You-Nian Wang, Annemie Bogaerts
J. Appl. Phys. , Vol: 115, No: 22 , published: 14 June 2014
Breakdown in Air Produced by High Power Microwaves
Zhao P., Feng J., Liao C.
IEEE Trans. Plasma Sci. Pt 2, Vol: 42, No: 6 , published: 01 June 2014
Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge
Huai Y., Li S., Li H., Wu K., Zhang J., Wang S., Wang Y.
IEEE Trans. Plasma Sci. Pt 2, Vol: 42, No: 6 , published: 01 June 2014
Effect of Transmission Line on Impedance Matching of Atmospheric-Pressure Radio-Frequency Capacitive Microplasma Discharge
Li S., Li H., Zhang J., Wang S., Wang Y., Jin Z.
IEEE Trans. Plasma Sci. Pt 2, Vol: 42, No: 6 , published: 01 June 2014
Electron heating in capacitively coupled plasmas revisited
T. Lafleur, P. Chabert and J. P. Booth
Plasma Sources Sci. and Technol., Vol: 23, No: 3 , published: 01 June 2014
Particle-in-cell and global simulations of α to γ transition in atmospheric pressure Penning-dominated capacitive discharges
E. Kawamura, M. A. Lieberman, A. J. Lichtenberg, P. Chabert and C. Lazzaroni
Plasma Sources Sci. and Technol., Vol: 23, No: 3 , published: 01 June 2014
Direct current dielectric barrier assistant discharge to get homogeneous plasma in capacitive coupled discharge
Yinchang Du, Yangfang Li, Jinxiang Cao, Yu Liu, Jian Wang, Zhe Zheng
Phys. Plasmas, Vol: 21, No: 6 , published: 01 June 2014
A scaling law for the dust cloud in radio frequency discharge under microgravity conditions
D. I. Zhukhovitskii, V. I. Molotkov, V. E. Fortov
Phys. Plasmas, Vol: 21, No: 6 , published: 01 June 2014
Characteristics of dual-frequency capacitively coupled SF6/O2 plasma and plasma texturing of multi-crystalline silicon
Xu Dong-Sheng (徐东升), Zou Shuai (邹 帅), Xin Yu (辛 煜), Su Xiao-Dong (苏晓东), Wang Xu-Sheng (王栩生)
Chin. Phys. B, Vol: 23, No: 6 , published: 01 June 2014
The effect of structured electrodes on heating and plasma uniformity in capacitive discharges
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Schmidt N., Czarnetzki U., Schuengel E., Schulze J.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Influence of the excitation frequency increase on a fluid model of the capacitively coupled argon plasma
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Leszczynski S., Strobel C., Albert M., Bartha J.W., Stephan U.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Kinetic simulation of mode transitions and hysteresis effects in low pressure capacitive discharges
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Wilczek S., Trieschmann J., Brinkmann R.P., Mussenbrock T., Derzsi A., Korolov I., Donko Z., Schungel E., Schulze J.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Schulze J., Schuengel E., Korolov I., Derzsi A., Donko Z.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Effect of a DC preionization source on energy deposition in a pulsed inductive plasma
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Pahl R.A., Rovey J.L.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Active spectroscopic methods monitoring of active species in atmospheric radio frequency plasma
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014,  U.S.A, Washington, D.C.
Li L.,  Nikiforov A., Leys C., Britun N., Snyder R.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Shuo Huang, Gudmundsson J.T.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Schulze J., Schuengel E., Derzsi A., Korolov I., Donko Z.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Control of plasma uniformity with dual phase Very High Frequency Capacitively Coupled Plsamas
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Jin Seok Kim, Ho-Jun Lee, Hae June Lee
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Observation of electromagnetic effect in large-area capacitively coupled discharges
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C
Hyowon Bae, Ho-Jun Lee, Hae June Lee
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Collisional-radiative model for the diagnostics of low pressure inductively coupled krypton plasma
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C
Srivastava R., Dipti, Gangwar R.K., Stafford L.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C
Schungel E., Schulze J., Mohr S., Iwashita S., Czarnetzki U.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Simulation od capacitively coupled atmospheric pressure water vapor plasma
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C
Kechidi Z., Graham W.G., Belbachir A.H.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Experimental observation of standing wave effect in low-pressure 200 MHz capacitive discharges
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C
Yong-Xin Liu, Fei Gao, Jia Liu, You-Nian Wang
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Deposition of crystalline silicon thin films in electrically asymmetric capacitively coupled plasmas
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Schungel E., Schulze J., Mohr S., Hofmann R., Czarnetzki U.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Simulation od capacitively coupled atmospheric pressure water vapor plasma
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Kechidi Z., Graham W.G., Belbachir A.H.
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Experimental observation of standing wave effect in low-pressure 200 MHz capacitive discharges
41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High Power Particle Beams (BEAMS), 25 - 29 May 2014, U.S.A, Washington, D.C.
Yong-Xin Liu, Fei Gao, Jia Liu, You-Nian Wang
IEEE NPSS (Nuclear and Plasma Sciences Society) Plasma Science and Applications (PSAC), Vol: 2014, No: , published: 25 May 2014
Methane Conversion in a N2[BOND]CH4 Radiofrequency Discharge
Thomas Gautier, Nathalie Carrasco, Ilija Stefanovic, Brankica Sikimic, Guy Cernogora, Jörg Winter
Plasma Processes and Polymers, Vol: 11, No: 5 , published: 01 May 2014
Electrical characterization of the flowing afterglow of N2 and N2/O2 microwave plasmas at reduced pressure
J. Afonso Ferreira, L. Stafford, R. Leonelli, A. Ricard
J. Appl. Phys. , Vol: 115, No: 16 , published: 28 April 2014
Numerical study on microwave-sustained argon discharge under atmospheric pressure
Y. Yang, W. Hua, S. Y. Guo
Phys. Plasmas, Vol: 21, No: 4 , published: 01 April 2014
Experimental investigation of a relativistic magnetron with diffraction output on a repetitive short pulse generator
Wei Li, Jun Zhang, Zi-cheng Zhang, Xiao-liang Sun, Yong-gui Liu
Phys. Plasmas, Vol: 21, No: 4 , published: 01 April 2014
Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge
Kanesh K. Jayapalan, Oi-Hoong Chin
Phys. Plasmas, Vol: 21, No: 4 , published: 01 April 2014
Formation of diatomic molecular radicals in reactive nitrogen-carbon plasma generated by electron cyclotron resonance discharge and pulsed laser ablation
Peipei Liang, Yanli Li, Qinghu You, Hua Cai, Xu Yang, Jian Sun, Ning Xu, Jiada Wu
Phys. Plasmas, Vol: 21, No: 4 , published: 01 April 2014
VHF discharges for wall conditioning at the Uragan-2M torsatron
V.E. Moiseenko, A.V. Lozin, V.V. Chechkin, V.Ya. Chernyshenko, L.I. Grigor'eva, Ye.D. Kramskoi, V.B. Korovin, M.M. Kozulya, A.I. Lyssoivan, A.V. Schebetun, A.N. Shapoval, A.F. Shtan', S.I. Solodovchenko, V.S. Voitsenya, I.E. Garkusha
Nucl. Fusion, Vol: 54, No: 3 , published: 01 March 2014
Analytical Determination of Collisional Sheath Properties for Triple Frequency Capacitively Coupled Plasma
Rahman M.T., Dewan M.N.A.
IEEE Trans. Plasma Sci. Pt 2, Vol: 42, No: 3 , published: 01 March 2014
Влияние постоянного поля на приэлектродную область неоднородного CВЧ-разряда в водороде
Лебедев Ю.А., Эпштейн И.Л., Юсупова Е.В.
Теплофиз. высок. температур, Vol: 52, No: 2 , published: 01 March 2014
Исследование параметров плазмы индуктивного ВЧ-источника плазмы диаметром 46 см. Часть III. Эффективность вложения мощности
Александров А.Ф., Вавилин К.В., Кралькина Е.А., Неклюдова П.А., Павлов В.Б.
Прикл. физ., Vol: 2014, No: 2 , published: 01 March 2014
On the energy conservation electrostatic particle-in-cell/Monte Carlo simulation: Benchmark and application to the radio frequency discharges
Wang Hong-Yu (王虹宇), Jiang Wei (姜 巍), Sun Peng (孙 鹏), Kong Ling-Bao (孔令宝)
Chin. Phys. B, Vol: 23, No: 3 , published: 01 March 2014
Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
Sven Hofmann, Koen van Gils, Steven van der Linden, Sylvain Iseni and Peter Bruggeman
Eur. Phys. J. D, Vol: 68, No: 3 , published: 01 March 2014
The Role of Argon Metastables in an Inductively Coupled Plasma for Treatment of PET
Sandra Schröter, Hendrik Bahre, Marc Böke, Jörg Winter
Plasma Processes and Polymers, Vol: 11, No: 3 , published: 01 March 2014
Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges
Edmund Schüngel, Sebastian Mohr, Julian Schulze, Uwe Czarnetzki,  Mark J. Kushner
Plasma Sources Sci. and Technol., Vol: 23, No: 1 , published: 01 February 2014
Some Unsolved Challenges In Radio-Frequency Heating and Current Drive
N. J. Fisch
Fusion Science and Technology, Vol: 65, No: 1 , published: 28 January 2014
Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF 4 and Ar/O 2/CF 4 discharges
Jia Liu, Yong-Xin Liu, Zhen-Hua Bi, Fei Gao, You-Nian Wang
J. Appl. Phys. , Vol: 115, No: 1 , published: 07 January 2014
Emissive sheath measurements in the afterglow of a radio frequency plasma
J. P. Sheehan, E. V. Barnat, B. R. Weatherford, I. D. Kaganovich, N. Hershkowitz
Phys. Plasmas, Vol: 21, No: 1 , published: 01 January 2014
Microwave Plasmas at Atmospheric Pressure
M. Leins, J. Kopecki, S. Gaiser, A. Schulz, M. Walker, U. Schumacher, U. Stroth,  T. Hirth
Contrib. Plasma Phys., Vol: 54, No: 1 , published: 01 January 2014
Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
A. Derzsi, I. Korolov, E. Schüngel, Z. Donkó, J. Schulze
Plasma Sources Sci. and Technol., Vol: 22, No: 6 , published: 01 December 2013
Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms
T. Lafleur, P. Chabert, M. M. Turner, J. P. Booth
Plasma Sources Sci. and Technol., Vol: 22, No: 6 , published: 01 December 2013
“Anomalous” collisionality in low-pressure plasmas
T. Lafleur, P. Chabert, M. M. Turner, J. P. Booth
Phys. Plasmas, Vol: 20, No: 12 , published: 01 December 2013
Derivation and generalization of the dispersion relation of rising-sun magnetron with sectorial and rectangular cavities
Di-Fu Shi, Bao-Liang Qian, Hong-Gang Wang, Wei Li
Phys. Plasmas, Vol: 20, No: 12 , published: 01 December 2013
A double-beam magnetron-injection gun for third-harmonic continuous wave 1-THz gyrotron
M. Glyavin, V. Manuilov, T. Idehara
Phys. Plasmas, Vol: 20, No: 12 , published: 01 December 2013
Characteristics of capacitively coupled helium plasma driven by various frequencies under constant power conditions
E. Abdel-Fattah
Vacuum, Vol: 97, No: , published: 01 November 2013
Spectroscopy diagnostic of dual-frequency capacitively coupled CHF3/Ar plasma
Wen-Yao Liu, Yong-Quan Du, Yong-Xin Liu, Jia Liu, Tian-Liang Zhao, Yong Xu, Xiao-Song Li, Ai-Min Zhu, You-Nian Wang
Phys. Plasmas, Vol: 20, No: 11 , published: 01 November 2013
Particle-In-Cell simulation of laser photodetachment in capacitively coupled radio frequency oxygen discharges
T. Teichmann, C. Küllig, K. Dittmann, K. Matyash, R. Schneider, J. Meichsner
Phys. Plasmas, Vol: 20, No: 11 , published: 01 November 2013
Narrow gap electronegative capacitive discharges
E. Kawamura, M. A. Lieberman, A. J. Lichtenberg
Phys. Plasmas, Vol: 20, No: 10 , published: 01 October 2013
Effect of antenna size on electron kinetics in inductively coupled plasmas
Hyo-Chang Lee, Chin-Wook Chung
Phys. Plasmas, Vol: 20, No: 10 , published: 01 October 2013
Transition of electron kinetics in weakly magnetized inductively coupled plasmas
Jin-Yong Kim, Hyo-Chang Lee, Young-Do Kim, Young-Cheol Kim, Chin-Wook Chung
Phys. Plasmas, Vol: 20, No: 10 , published: 01 October 2013
Study of the effects of a transverse magnetic field on radio frequency argon discharges by two-dimensional particle-in-cell-Monte-Carlo collision simulations
Yu Fan, Ying Zou, Jizhong Sun, Thomas Stirner, Dezhen Wang
Phys. Plasmas, Vol: 20, No: 10 , published: 01 October 2013
Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas
Zhen-Hua Bi, Zhong-Ling Dai, Yu-Ru Zhang, Dong-Ping Liu, You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 22, No: 5 , published: 01 October 2013
Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma
Duksun Han, Hyo-Chang Lee, H J Kim, Yu Sin Kim, Chin-Wook Chung and Heesun Chae
Plasma Sources Sci. and Technol., Vol: 22, No: 5 , published: 01 October 2013
Kinetic simulation of the sheath dynamics in the intermediate radio frequency regime
M. Shihab, A. T. Elgendy, I. Korolov, A. Derzsi, J. Schulze, D. Eremin, T. Mussenbrock, Z. Donkó, R. P. Brinkmann
Plasma Sources Sci. and Technol., Vol: 22, No: 5 , published: 01 October 2013
On the spatial distribution of the electromagnetic field in small-radius planar coil inductive discharges
Kh. Tarnev, D. Todorov, B. Gilev, St. Lishev, Ts. Paunska
Plasma Sources Sci. and Technol., Vol: 22, No: 5 , published: 01 October 2013
A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge
Shuo Huang, J. T. Gudmundsson
Plasma Sources Sci. and Technol., Vol: 22, No: 5 , published: 01 October 2013
Generation of Reactive Oxygen Species in Helium–Oxygen Radio-Frequency Discharges at Atmospheric Pressure
Jin He, Yuantao Zhang
IEEE Trans. Plasma Sci. Pt 2, Vol: 41, No: 10 , published: 01 October 2013
Characterization of nanoparticle flow produced by gas aggregation source
Jaroslav Kousal, Oleksandr Polonskyi, Ondřej Kylián, Andrei Choukourov, Anna Artemenko, Josef Pešička, Danka Slavínská, Hynek Biederman
Vacuum, Vol: 96, No: , published: 01 October 2013
A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model
Young-Do Kim, Hyo-Chang Lee, Chin-Wook Chung
Phys. Plasmas, Vol: 20, No: 9 , published: 01 September 2013
Determination of N and O – Atom and N2(A) Metastable Molecule Densities in the Afterglows of N2 and N2-O2 Microwave Discharges
H. Zerrouki, A. Ricard,  J. P. Sarrette
Contrib. Plasma Phys., Vol: 53, No: 8 , published: 01 September 2013
Special Features of Low-Pressure Discharge Initiated by Microwave Radiation With Stochastic Jumping Phase
Karas V.I., Artamoshkin A.M., Alisov A.F., Bolotov O.V., Golota V.I., Karas I.V., Yegorov A.M., Zagrebelny I.A., Potapenko I.F., Starostin A.N.
IEEE Trans. Plasma Sci., Vol: 41, No: 9 , published: 01 September 2013
Application of the escape factor method for determination of excited states densities in a low-pressure argon radio-frequency discharge
V. P. Sushkov, H. T. Do, R. Hippler
Contrib. Plasma Phys., Vol: 53, No: 7 , published: 01 August 2013
High Speed Video Camera and Electrical Signal Analyses of Arcs Behavior in a 3-Phase AC Arc Plasma Torch
Christophe Rehmet, Frederic Fabry, Vandad Rohani, François Cauneau, Laurent Fulcheri
Plasma Chem. Plasma Process., Vol: 33, No: 4 , published: 01 August 2013
Study of the neutral gas flow on discharges of capacitively coupled plasma in a PECVD reactor
Xiang Xu, Jie Feng, Xiang-Mei Liu, You-Nian Wang, Jia Yan
Vacuum, Vol: 92, No: , published: 01 June 2013
A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code
J. T. Gudmundsson, E. Kawamura, M. A. Lieberman
Plasma Sources Sci. and Technol., Vol: 22, No: 3 , published: 01 June 2013
Control of plasma density distribution via wireless power transfer in an inductively coupled plasma
Hee-Jin Lee, Hyo-Chang Lee, Young-Cheol Kim, Chin-Wook Chung
Plasma Sources Sci. and Technol., Vol: 22, No: 3 , published: 01 June 2013
Experimental and numerical study on the optimization of pulse-modulated radio-frequency discharges
Jin He, Jiangtian Hu, Dawei Liu, Yuan-Tao Zhang
Plasma Sources Sci. and Technol., Vol: 22, No: 3 , published: 01 June 2013
Simulation study of stochastic heating in single-frequency capacitively coupled discharges with critical evaluation of analytical models
S. Sharma, M. M. Turner
Plasma Sources Sci. and Technol., Vol: 22, No: 3 , published: 01 June 2013
Production of a Periodic Plasma Structure by 400 kHz Capacitively Coupled Discharge
Kazuaki Miyamoto, Kazunori Takahashi
Fusion Science and Technology, Vol: 63, No: 1T , published: 01 May 2013
Trapping ions from a fast beam in a radio-frequency ion trap: Exploring the energy exchange with the longitudinal radio-frequency field
Annette Svendsen, Lutz Lammich, John E. Andersen, Henrik K. Bechtold, Erik Søndergaard, Frank Mikkelsen, and Henrik B. Pedersen
Phys. Rev. A: At. Mol. Opt. Phys., Vol: 87, No: 4 , published: 12 April 2013
Water dissociation in a radio-frequency electromagnetic field with ex situ electrodes—modelling of discharge initiation
Jens Schneider, Frank Holzer, Carsten Rabe, Tilmann Häupl, Frank-Dieter Kopinke
Plasma Sources Sci. and Technol., Vol: 22, No: 2 , published: 01 April 2013
Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges
Yong-Xin Liu, Quan-Zhi Zhang, Jia Liu, Yuan-Hong Song, Annemie Bogaerts, You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 22, No: 2 , published: 01 April 2013
Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas
Quan-Zhi Zhang, Yong-Xin Liu, Wei Jiang, Annemie Bogaerts, You-Nian Wang
Plasma Sources Sci. and Technol., Vol: 22, No: 2 , published: 01 April 2013
Measurement of hydroxyl radical (OH) concentration in an argon RF plasma jet by laser-induced fluorescence
J. Voráč, P. Dvořák, V. Procházka, J. Ehlbeck, S. Reuter
Plasma Sources Sci. and Technol., Vol: 22, No: 2 , published: 01 April 2013
Stereoscopic Observations of Dust Clouds in Front of a Pixel Electrode in a Radio Frequency Discharge
Schmidt C., Arp O., Himpel M. Melzer A., Piel A.
IEEE Trans. Plasma Sci. Pt 2, Vol: 41, No: 4 , published: 01 April 2013
Recirculating-Planar-Magnetron Simulations and Experiment
Franzi M.A., Gilgenbach R.M., Hoff B.W., Chalenski D.A., Simon D., Lau Y.Y., Luginsland J.
IEEE Trans. Plasma Sci. Pt 1, Vol: 41, No: 4 , published: 01 April 2013
Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films
S. Bornholdt, N. Itagaki, K. Kuwahara, H. Wulff, M. Shiratani, H. Kersten
Plasma Sources Sci. and Technol., Vol: 22, No: 2 , published: 01 April 2013
Effects of Increasing Magnetic Field and Decreasing Pressure on Asymmetric Magnetron Radio Frequency {\rm Ar}/{\rm O}_{2} Discharges
Benyoucef D., Yousfi M.
IEEE Trans. Plasma Sci. Pt 3, Vol: 41, No: 4 , published: 01 April 2013
Characterization of the supersonic flowing microwave discharge using two dimensional plasma tomography
M. Nikolić, A. Samolov, F. Čučkov, S. Popović, L. Vušković, A. Godunov
J. Appl. Phys. , Vol: 113, No: 10 , published: 14 March 2013
Influence of ambient air on the flowing afterglow of an atmospheric pressure Ar/O2 radiofrequency plasma
C. Y. Duluard, T. Dufour, J. Hubert, F. Reniers
J. Appl. Phys. , Vol: 113, No: 9 , published: 07 March 2013
Quantitative determination of mass-resolved ion densities in H2-Ar inductively coupled radio frequency plasmas
M. Sode, T. Schwarz-Selinger, W. Jacob
J. Appl. Phys. , Vol: 113, No: 9 , published: 07 March 2013
Charging and de-charging of dust particles in bulk region of a radio frequency discharge plasma
S. K. Mishra, Shikha Misra, M. S. Sodha
Phys. Plasmas, Vol: 20, No: 3 , published: 01 March 2013
Physical limitations in ferromagnetic inductively coupled plasma sources
Yury P. Bliokh, J. Felsteiner, Ya. Z. Slutsker
J. Appl. Phys. , Vol: 113, No: 8 , published: 28 February 2013
Numerical simulation of nanosecond-pulse electrical discharges
J. Poggie, I. Adamovich, N. Bisek, M. Nishihara, J. Poggie, I. Adamovich, N. Bisek, M. Nishihara
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma
Shu-Xia Zhao, Fei Gao, You-Nian Wang, Annemie Bogaerts
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Normal regime of the weak-current mode of an rf capacitive discharge
V. Lisovskiy, V. Yegorenkov, E. Artushenko, J.-P. Booth, S. Martins, K. Landry, D. Douai, V. Cassagne
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Modulation of electron energy distributions and discharge parameters in a dual frequency ICP discharge
Anurag Mishra, Tae Hyung Kim, Kyong Nam Kim, Geun Young Yeom
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Plasma drift in a low-pressure magnetized radio frequency discharge
D. Gerst, S. Cuynet, M. Cirisan, S. Mazouffre
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Experimental study of hydrogen plasma breakdown in a 2.45 GHz microwave discharge
O. D. Cortázar, J. Komppula, O. Tarvainen, A. Megía-Macías, A. Vizcaíno-de-Julián, H. Koivisto
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge
Young-Do Kim, Young-Kwang Lee, Hyo-Chang Lee, Chin-Wook Chung
Phys. Plasmas, Vol: 20, No: 2 , published: 01 February 2013
Plasma Functionalization of Carbon Nanotubes for the Synthesis of Stable Aqueous Nanofluids and Poly(vinyl alcohol) Nanocomposites
Nathan Hordy, Sylvain Coulombe, Jean-Luc Meunier
Plasma Processes and Polymers, Vol: 10, No: 2 , published: 01 February 2013
Колебательное распределение молекул азота в состоянии C3Πu в приповерхностной СВЧ-плазме в азоте при давлениях 1–5 Торр
Ю. А. Лебедев, И. Л. Эпштейн, Е. В. Юсупова
Физ. плазмы, Vol: 39, No: 2 , published: 01 February 2013
Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas
T. Hemke, D. Eremin, T. Mussenbrock, A. Derzsi, Z. Donkó, K. Dittmann, J. Meichsner, J. Schulze
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Laser-induced fluorescence diagnostics of the cross-field discharge of Hall thrusters
Stéphane Mazouffre
Plasma Sources Sci. and Technol., Vol: 22, No: 1 , published: 01 February 2013
Energy distribution of electron flux at electrodes in a low pressure capacitively coupled plasma
Shahid Rauf, Leonid Dorf, Jason Kenney, Ken Collins
J. Appl. Phys. , Vol: 113, No: 2 , published: 14 January 2013
A Time-Dependent Collisional Sheath Model for Dual-Frequency Capacitively Coupled RF Plasma
Rahman M. T., Dewan M. N. A., Ahmed A., Chowdhury M. R. H.
IEEE Trans. Plasma Sci., Vol: 41, No: 1 , published: 01 January 2013
Frequency effects on the production of reactive oxygen species in atmospheric radio frequency helium-oxygen discharges
Yuantao T. Zhang, Jin He
Phys. Plasmas, Vol: 20, No: 1 , published: 01 January 2013
Simulation benchmarks for low-pressure plasmas: Capacitive discharges
M. M. Turner, A. Derzsi, Z. Donkó, D. Eremin, S. J. Kelly, T. Lafleur, T. Mussenbrock
Phys. Plasmas, Vol: 20, No: 1 , published: 01 January 2013
Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure
Yinan Wang, Yue Liu, Shu Zheng, Guoqiang Lin
J. Plasma Phys., Vol: 78, No: 6 , published: 04 December 2012
Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments
Z. Donkó, J. Schulze, U. Czarnetzki, A. Derzsi, P. Hartmann, I. Korolov and E. Schüngel
Plasma Phys. and Contr. Fusion, Vol: 54, No: 12 , published: 01 December 2012
Fluid modelling of capacitively coupled radio-frequency discharges: a review
L. L. Alves and L. Marques
Plasma Phys. and Contr. Fusion, Vol: 54, No: 12 , published: 01 December 2012
Investigation of radiofrequency plasma sources for space travel
C. Charles, R. W. Boswell and K. Takahashi
Plasma Phys. and Contr. Fusion, Vol: 54, No: 12 , published: 01 December 2012
Electron and negative ion dynamics in electronegative cc-rf plasmas
K. Dittmann, C. Küllig and J. Meichsner
Plasma Phys. and Contr. Fusion, Vol: 54, No: 12 , published: 01 December 2012
Plasma-Induced Damage and Surface Functionalization of Double-Walled Carbon Nanotubes Using Atmospheric Pressure RF Discharge
Tomohiro Nozaki, Shinpei Yoshida and Ken Okazaki
Plasma Processes and Polymers, Vol: 9, No: 11-12 , published: 01 December 2012
Gas breakdown driven by L band short-pulse high-power microwave
Yi-Ming Yang, Cheng-Wei Yuan, Bao-Liang Qian
Phys. Plasmas, Vol: 19, No: 12 , published: 01 December 2012
Rotational and vibrational temperatures in a hydrogen discharge with a magnetic X-point
Tsanko V. Tsankov, Kaoru Toko, Uwe Czarnetzki
Phys. Plasmas, Vol: 19, No: 12 , published: 01 December 2012
Energy fluxes in a radio-frequency magnetron discharge for the deposition of superhard cubic boron nitride coatings
S. Bornholdt, J. Ye, S. Ulrich, H. Kersten
J. Appl. Phys. , Vol: 112, No: 12 , published: 01 December 2012
One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF4 plasmas
Shuai Wang, Xiang Xu, Younian Wang
Phys. Plasmas, Vol: 19, No: 11 , published: 26 November 2012
Dynamics and Electronegativity of Oxygen RF Plasmas
C. Küllig, K. Dittmann, W. Wegner, I. Sheykin, K. Matyash, D. Loffhagen, R. Schneider and J. Meichsner
Contrib. Plasma Phys., Vol: 52, No: 10 , published: 09 November 2012
Plasma Chemical Study of a RF Discharge Containing Aluminum Tri-Isopropoxide Using MIR Absorption Spectroscopy Based on External-Cavity Quantum Cascade Lasers
D. Lopatik, S. Niemietz, M. Fröhlich, J. Röpcke and H. Kersten
Contrib. Plasma Phys., Vol: 52, No: 10 , published: 09 November 2012
Dielectric properties in microwave remote plasma sustained in argon: Expanding plasma conditions
J. L. Jauberteau, I. Jauberteau
Phys. Plasmas, Vol: 19, No: 11 , published: 08 November 2012
Electron energy distribution functions measured by Langmuir probe with optical emission spectroscopy in very high frequency capacitive discharge in nitrogen
E. Abdel-Fattah, M. Bazavan, H. Sugai
Phys. Plasmas, Vol: 19, No: 11 , published: 08 November 2012
Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O2/Ar-O2 plasmas
T. H. Chung, Hae Ra Kang, Min Keun Bae
Phys. Plasmas, Vol: 19, No: 11 , published: 06 November 2012
Effect of capacitive coupling in a miniature inductively coupled plasma source
Yoshinori Takao, Koji Eriguchi, Kouichi Ono
J. Appl. Phys. , Vol: 112, No: 9 , published: 01 November 2012
A New Floating-Probe for Measurement of Insulated Plasma Produced by Radio-Frequency Power
Yasuyuki Taniuchi, Toshinori Yamada, Takanori Tokieda, Michiaki Utsumi, Masao Isomura, Haruo Shindo
Jpn. J. Appl. Phys., Vol: 51, No: 11R , published: 01 November 2012
Cyclic powder formation during pulsed injection of hexamethyldisiloxane in an axially asymmetric radiofrequency argon discharge
B. Despax, K. Makasheva, H. Caquineau
J. Appl. Phys. , Vol: 112, No: 9 , published: 01 November 2012
Vibrational Excitation of N2(B, C) and N+2(B) States in N2 and N2 – H2 Flowing Microwave Discharges
M. Abdeladim, A. Ricard, N. Mekkakia Maaza
Contrib. Plasma Phys., Vol: 52, No: 9 , published: 11 October 2012
An investigation of the temporal evolution of plasma potential in a 60 MHz/2 MHz pulsed dual-frequency capacitively coupled discharge
Anurag Mishra, Min Hwan Jeon, Kyong Nam Kim and Geun Young Yeom
Plasma Sources Sci. and Technol., Vol: 21, No: 5 , published: 01 October 2012
A possible explanation of the anomalous emissive probe behavior in a reactive RF plasma
R Kar, S A Barve, S S Chopade, A K Das and D S Patil
Plasma Sources Sci. and Technol., Vol: 21, No: 5 , published: 01 October 2012
Time-Resolved High-Speed Visualization and Analysis of Underwater Shock Wave Focusing Generated by a Magnetic Pulse Compression Unit
Oshita D., Hosseini S.H.R., Okuda Y., Miyamoto Y., Sakugawa T., Katsuki S., Akiyama H.
IEEE Trans. Plasma Sci. Pt 1, Vol: 40, No: 10 , published: 01 October 2012
Investigation of a Magnetic Pulse Compression System Containing Gas Switch
Hao-yin Bai, Cheng-zu Li, Jun Liu, Guo-liang Huang, Jin-bo Jiang, Meng-bing He
IEEE Trans. Plasma Sci. Pt 1, Vol: 40, No: 10 , published: 01 October 2012
Computer Simulation and Analysis of 350-MHz High-Power Coaxial RF Window and T-bar Transition
Vyas S., Shekhawat N., Maurya S., Singh V.V.P.
IEEE Trans. Plasma Sci. Pt 2, Vol: 40, No: 10 , published: 01 October 2012
Particle-in-Cell/Monte Carlo Collision Simulations of Striations in Inductively Coupled Plasmas
Kazuki Denpoh
Jpn. J. Appl. Phys., Vol: 51, No: 10R , published: 01 October 2012
Monitoring of hydrocarbon concentrations in dust-producing RF plasmas
F Hempel, D Lopatik, B Sikimic, I Stefanovic, J Winter and J Röpcke
Plasma Sources Sci. and Technol., Vol: 21, No: 5 , published: 01 October 2012
Performance of a permanent-magnet helicon source at 27 and 13 MHz
Francis F. Chen
Phys. Plasmas, Vol: 19, No: 9 , published: 26 September 2012
An analytical model of computing ion energy distributions for multiple frequencies capacitive discharges
Zhuwen Zhou, Rongfeng Linghu, Mingsen Deng, Deyong Xiong
J. Appl. Phys. , Vol: 112, No: 6 , published: 26 September 2012
Investigation of magnetic-pole-enhanced inductively coupled nitrogen-argon plasmas
F. Jan, A. W. Khan, A. Saeed, M. Zakaullah
J. Appl. Phys. , Vol: 112, No: 6 , published: 25 September 2012
The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrode
HunSu Lee, YunSeong Lee, HongYoung Chang
Phys. Plasmas, Vol: 19, No: 9 , published: 21 September 2012
Modeling Study on the Generation of Reactive Oxygen Species in Atmospheric Radio-Frequency Helium–Oxygen Discharges
Jin He, Yuantao T. Zhang
Plasma Processes and Polymers, Vol: 9, No: 9 , published: 11 September 2012
The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas
E. Schüngel, D. Eremin<, J. Schulze, T. Mussenbrock, U. Czarnetzki
J. Appl. Phys. , Vol: 112, No: 5 , published: 05 September 2012
One Dimensional Modeling of Radio Frequency Electric Field Penetration into Magnetized Plasmas
Takeshi Matsuoka, Timofei S. Rudenko, Ikkoh Funaki, Konstantin P. Shamrai, Takahiro Nakamura, Hiroyuki Nishida, Takao Tanikawa, Tohru Hada, Shunjiro Shinohara
Jpn. J. Appl. Phys., Vol: 51, No: 9R , published: 01 September 2012
Wave modeling in a cylindrical non-uniform helicon discharge
L. Chang, M. J. Hole, J. F. Caneses, G. Chen, B. D. Blackwell, C. S. Corr
Phys. Plasmas, Vol: 19, No: 8 , published: 31 August 2012
Modeling and Simulation of Ion Energy Distribution Functions in Technological Plasmas
T. Mussenbrock
Contrib. Plasma Phys., Vol: 52, No: 7 , published: 30 August 2012
Scalable Microwave Plasma Sources From Low to Atmospheric Pressure
A. Schulz, P. Büchele, E. Ramisch, O. Janzen, F. Jimenez, C. Kamm, J. Kopecki, M. Leins, S. Merli, H. Petto, F.R. Mendez, J. Schneider, U. Schumacher, M. Walker and U. Stroth
Contrib. Plasma Phys., Vol: 52, No: 7 , published: 30 August 2012
Spectroscopic Investigation of a Microwave-Generated Atmospheric Pressure Plasma Torch
M. Leins, M. Walker, A. Schulz, U. Schumacher and U. Stroth
Contrib. Plasma Phys., Vol: 52, No: 7 , published: 30 August 2012
Microwave Plasma Sources -Applications in Industry
M. Kaiser, K.-M. Baumgärtner and A. Mattheus
Contrib. Plasma Phys., Vol: 52, No: 7 , published: 30 August 2012
Electron and Negative Ion Analysis in Oxygen Capacitively Coupled Radio Frequency Plasma
J. Meichsner, K. Dittmann and C. Küllig
Contrib. Plasma Phys., Vol: 52, No: 7 , published: 30 August 2012
Comparison of (Cr0.75Al0.25)N Coatings Deposited by Conventional and High Power Pulsed Magnetron Sputtering
N. Bagcivan, K. Bobzin and S. Theiß
Contrib. Plasma Phys., Vol: 52, No: 7 , published: 30 August 2012
Transition from interpulse to afterglow plasmas driven by repetitive short-pulse microwaves in a multicusp magnetic field
Shail Pandey, Debaprasad Sahu, Sudeep Bhattacharjee
Phys. Plasmas, Vol: 19, No: 8 , published: 23 August 2012
Dust charge measurement in a strongly coupled dusty plasma produced by an rf discharge
S K Sharma, Ranjan Kalita, Y Nakamura, Bailung
Plasma Sources Sci. and Technol., Vol: 21, No: 4 , published: 16 August 2012
Capacitively coupled radio-frequency discharges in nitrogen at low pressures
L L Alves, L Marques, C D Pintassilgo, G Wattieaux, Et Es-sebbar, J Berndt, E Kovacević, N Carrasco, L Boufendi, G Cernogora
Plasma Sources Sci. and Technol., Vol: 21, No: 4 , published: 16 August 2012
Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton
Xi-Ming Zhu, Wen-Cong Chen, Jiang Li, Zhi-Wen Cheng, Yi-Kang Pu
Plasma Sources Sci. and Technol., Vol: 21, No: 4 , published: 16 August 2012
Fluid-dynamic characterization of a radio-frequency induction thermal plasma system for nanoparticle synthesis
V Colombo, C Deschenaux, E Ghedini, M Gherardi, C Jaeggi, M Leparoux, V Mani, P Sanibondi
Plasma Sources Sci. and Technol., Vol: 21, No: 4 , published: 16 August 2012
PTFE Surface Etching in the Post-discharge of a Scanning RF Plasma Torch: Evidence of Ejected Fluorinated Species
Thierry Dufour, Julie Hubert, Pascal Viville, Corinne Y. Duluard, Simon Desbief, Roberto Lazzaroni and François Reniers
Plasma Processes and Polymers, Vol: 9, No: 8 , published: 12 August 2012
Влияние постоянного поля на приповерхностную плазму сильно неоднородного СВЧ-разряда
Ю. А. Лебедев, Е. В. Юсупова
Физ. плазмы, Vol: 38, No: 8 , published: 01 August 2012
Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge
S. L. Mensah, Hameed H. Naseem, Husam Abu-Safe, M. H. Gordon
Phys. Plasmas, Vol: 19, No: 7 , published: 31 July 2012
Improved long-term electrical stability of pulsed high-power diodes using dense carbon fiber velvet cathodes
Jie Yang, Ting Shu, Hui Wang
Phys. Plasmas, Vol: 19, No: 7 , published: 23 July 2012
A novel thermal probe design for the measurement of energy influx in RF remote plasma
H. Jouhara, S. Saloum, M.B. Alsous
Vacuum, Vol: 86, No: 12 , published: 20 July 2012
High-density polyethylene functionalized by cold plasma and silanes
I. Novák, A. Popelka, I. Krupa, I. Chodák, I. Janigová, T. Nedelčev, M. Špírková, A. Kleinová
Vacuum, Vol: 86, No: 12 , published: 20 July 2012
Control of the Growth Regimes of Nanodiamond and Nanographite in Microwave Plasmas
Cheng C. Y.; Teii K.
IEEE Trans. Plasma Sci. Pt 1, Vol: 40, No: 7 , published: 19 July 2012
A finite-difference time-domain simulation of high power microwave generated plasma at atmospheric pressures
Patrick J. Ford, Sterling R. Beeson, Hermann G. Krompholz, Andreas A. Neuber
Phys. Plasmas, Vol: 19, No: 7 , published: 10 July 2012
Etching Behavior and Mechanism of In- and Ga-Doped ZnO Thin Films in Inductively Coupled BCl3/Cl2/Ar Plasmas
Kwang-Ho Kwon, Alexander Efremov, Sungchil Kang, Hanbyeol Jang, Hyungjin Yang, Kwangsoo Kim
Jpn. J. Appl. Phys., Vol: 51, No: 7R , published: 01 July 2012
Silicon Oxide Coatings with Very High Rates (>10 nm/s) by Hexamethyldisiloxane-Oxygen Fed Atmospheric-Pressure VHF Plasma: Film-Forming Behavior Using Cylindrical Rotary Electrode
Hiroaki Kakiuchi, Hiromasa Ohmi, Takahiro Yamada, Keiji Yokoyama, Kohei Okamura, et al.
Plasma Chem. Plasma Process., Vol: 32, No: 3 , published: 20 June 2012
Heating mechanisms in radio-frequency-driven ultracold plasmas
P. W. Smorenburg, L. P. J. Kamp, and O. J. Luiten
Phys. Rev. A: At. Mol. Opt. Phys., Vol: 85, No: 6 , published: 20 June 2012
Стабилизация горения жидкого углеводородного топлива с помощью программированного СВЧ-разряда в дозвуковом воздушном потоке
П. В. Копыл, О. С. Сурконт, В. М. Шибков, Л. В. Шибкова
Физ. плазмы, Vol: 38, No: 6 , published: 01 June 2012
Advanced Dispenser Cathodes
Ives R. L., Falce L. R., Miram G., Collins G.
IEEE Trans. Plasma Sci. Pt 1, Vol: 40, No: 5 , published: 23 May 2012
Modeling SiH4/O2/Ar Inductively Coupled Plasmas Used for Filling of Microtrenches in Shallow Trench Isolation (STI)
Stefan Tinck and Annemie Bogaerts
Plasma Processes and Polymers, Vol: 9, No: 5 , published: 01 May 2012
Frequency Scaling Laws of Plasma Bulk in Atmospheric Radio Frequency Discharges
Yuantao T. Zhang and Wanli Shang
Plasma Processes and Polymers, Vol: 9, No: 5 , published: 01 May 2012
Global Model of Cl2/Ar High-Density Plasma Discharge and 2-D Monte-Carlo Etching Model of InP
Chanson R., Rhallabi A., Fernandez M. C., Cardinaud C., Bouchoule S., Gatilova L., Talneau A.
IEEE Trans. Plasma Sci., Vol: 40, No: 4 , published: 25 April 2012
Interactive Phenomena of a Rotating Arc and a Premixed CH4 Flame
Nakyung Hwang, Jongguen Lee, Dae Hoon Lee,Young-Hoon Song
Plasma Chem. Plasma Process., Vol: 32, No: 2 , published: 20 April 2012
Диагностика параметров плазмы атмосферного давления методом ближнепольного СВЧ-зондирования
Янин Д.В., Костров А.В., Смирнов А.И., Гущин М.Е., Коробков С.В., Стриковский А.В., Гундорин В.И., Назаров В.В., Стародубцев М.В.
Ж. техн. физ., Vol: 82, No: 4 , published: 17 April 2012
rf-power and the ring-mode to red-mode transition in an inductively coupled plasma
J. G. Coffer, J. C. Camparo
J. Appl. Phys. , Vol: 111, No: 8 , published: 15 April 2012
160 GHz Gaussian beam microwave interferometry in low-density rf plasmas
K. Dittmann, C. Küllig and J. Meichsner
Plasma Sources Sci. and Technol., Vol: 21, No: 2 , published: 07 April 2012
Absolute number density and kinetic analysis of the CF radical in pulsed CF4 + H2 radio-frequency plasmas
S. Stepanov and J. Meichsner
Plasma Sources Sci. and Technol., Vol: 21, No: 2 , published: 07 April 2012
A two-dimensional nodal model with turbulent effects for the synthesis of Si nano-particles by inductively coupled thermal plasmas
V. Colombo, E. Ghedini, M. Gherardi, P. Sanibondi and M. Shigeta
Plasma Sources Sci. and Technol., Vol: 21, No: 2 , published: 07 April 2012
The effect of F2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 inductively coupled plasma
Shu-Xia Zhao, Fei Gao, You-Nian Wang and Annemie Bogaerts
Plasma Sources Sci. and Technol., Vol: 21, No: 2 , published: 07 April 2012
Ion energy distribution measurements in rf and pulsed dc plasma discharges
D. Gahan, S. Daniels, C. Hayden, P. Scullin, D. O'Sullivan, Y. T. Pei and M. B. Hopkins
Plasma Sources Sci. and Technol., Vol: 21, No: 2 , published: 07 April 2012
Electrical Model and Experimental Analysis of the Atmospheric-Pressure Homogeneous Dielectric Barrier Discharge in He
Zhi Fang, Shengchang Ji, Jun Pan, Tao Shao, Cheng Zhang
IEEE Trans. Plasma Sci. Pt 2, Vol: 40, No: 3 , published: 25 March 2012
Орбитальное движение пылевых частиц в магнетронном высокочастотном разряде: сила ионного увлечения или ветра нейтральных атомов
Паль А.Ф., Рябинкин А.Н., Серов А.О., Дятко Н.А., Старостин А.Н., Филиппов А.В.
Ж. эксперим. и теор. физ., Vol: 141, No: 3 , published: 13 March 2012
Optical properties and crystallinity of hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by rf-PECVD
Goh Boon Tong, Zarina Aspanut, Muhamad Rasat Muhamad, Saadah Abdul Rahman
Vacuum, Vol: 86, No: 8 , published: 29 February 2012
Statistical Prediction of Microwave Window Breakdown: Effects of RF Magnetic Field
Sazontov A.G., Nechaev V.E., Vdovicheva N.K.
IEEE Trans. Plasma Sci. Pt 2, Vol: 40, No: 2 , published: 23 February 2012
Low Pressure Radio Frequency Ammonia Plasma Surface Modification on Poly(ethylene terephthalate) Films and Fibers: Effect of the Polymer Forming Process
M. Ö. Öteyaka,P. Chevallier,S. Turgeon,L. Robitaille,G. Laroche
Plasma Chem. Plasma Process., Vol: 32, No: 1 , published: 15 February 2012
Energy Fluctuations in a Direct Current Plasma Torch with Inter-Electrode Inserts Operated at Reduced Pressure
Heji Huang,Wenxia Pan,Chengkang Wu
Plasma Chem. Plasma Process., Vol: 32, No: 1 , published: 15 February 2012
High rate deposition of microcrystalline silicon films using jet-type inductively coupled plasma chemical vapor deposition
Zewen Zuo, Yu Wang, Jin Lu, Junzhuan Wang, Lin Pu, Yi Shi, Youdou Zheng
Vacuum, Vol: 86, No: 7 , published: 08 February 2012
Influence of dual-frequency source powers on ion density and electron temperature in capacitively-coupled argon plasma
Xiang-Zhan Jiang, Yong-Xin Liu, Wen-Qi Lu, Zhen-Hua Bi, Fei Gao, You-Nian Wang
Vacuum, Vol: 86, No: 7 , published: 08 February 2012
Characterization of an asymmetric parallel plate radio-frequency discharge using a retarding field energy analyzer
D. Gahan, S. Daniels, C. Hayden, D. O' Sullivan and M. B. Hopkins
Plasma Sources Sci. and Technol., Vol: 21, No: 1 , published: 07 February 2012
The effect of small additives of argon on the parameters of a non-uniform microwave discharge in nitrogen at reduced pressures
Yu A. Lebedev, T. B. Mavludov, I. L. Epstein, A. V. Chvyreva and A. V. Tatarinov
Plasma Sources Sci. and Technol., Vol: 21, No: 1 , published: 07 February 2012
Novel plasma treatment in linear antenna microwave PECVD system
Neda Neykova, Halyna Kozak, Martin Ledinsky, Alexander Kromka
Vacuum, Vol: 86, No: 6 , published: 27 January 2012
Surface modification and ageing of PMMA polymer by oxygen plasma treatment
Alenka Vesel, Miran Mozetic
Vacuum, Vol: 86, No: 6 , published: 27 January 2012
Generation of Low-Frequency Homogeneous Dielectric Barrier Discharge at Atmospheric Pressure
Osawa  N., Yoshioka Y.
IEEE Trans. Plasma Sci., Vol: 40, No: 1 , published: 23 January 2012
Simulation of Self-Organized Pattern in Atmospheric Pressure Barrier Discharge Driven by Pulse-Modulated RF Voltage
Qi Wang, Ji-Zhong Sun, De-Zhen Wang
IEEE Trans. Plasma Sci., Vol: 40, No: 1 , published: 23 January 2012
Simulation of the Formation of an Ion Beam by Extraction From a Magnetically Confined Plasma
Sierra J.A.R., Velasco A.J.C.
IEEE Trans. Plasma Sci., Vol: 40, No: 1 , published: 23 January 2012
A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere
Sangeeta B. Punjabi, N. K. Joshi, H. A. Mangalvedekar, B. K. Lande, A. K. Das, D. C. Kothari
Phys. Plasmas, Vol: 19, No: 1 , published: 18 January 2012
High Voltage Series Switch and Crowbar Protection in RF Heating
H. K. Patel,Deep Shah,Mauli Thacker,Atman Shah
J. Fusion Energy, Vol: 30, No: 6 , published: 15 December 2011
Numerical prediction of the saturation limit of atmospheric pressure AC dielectric barrier discharges
Arshak Khalil/Guiney Ivor/Forde Edward
J. Plasma Phys., Vol: 75, No: 1 , published: 06 November 2009
A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer
Wang Zhao-Kui/Lin Kui-Xun/Lin Xuan-Ying/et al.
Chin. Phys., Vol: 14, No: 7 , published: 05 April 2009
Glow and pseudo-glow discharges in a surface discharge generator
Li Xue-Chen/Dong Li-Fang/Wang Long
Chin. Phys., Vol: 14, No: 7 , published: 05 April 2009
The electronic identity of inductive and capacitive plasmas
Burm K.T.A.L.
J. Plasma Phys., Vol: 74, No: 2 , published: 06 November 2008
Электродный СВЧ-разряд в азоте: структура и свойства приэлектродной области
Лебедев Ю.А./Соломахин П.В./Шахатов В.А.
Физ. плазмы, Vol: 34, No: 7 , published: 30 October 2008
Численное моделирование поверхностного барьерного разряда в воздухе
Соловьев В.Р./Кончаков А.М./Кривцов В.М./Александров Н.Л.
Физ. плазмы, Vol: 34, No: 7 , published: 30 October 2008
Порог развития ионизационно-перегревной неустойчивости в плазме безэлектродного СВЧ-разряда
Александров К.В./Бычков Д.В./Грачев Л.П./Есаков И.И.
Ж. техн. физ., Vol: 78, No: 7 , published: 19 October 2008
Numerical Model of an Argon Atmospheric Pressure RF Discharge
Balcon, N.; Hagelaar, G.; Boeuf, J.P.
IEEE Trans. Plasma Sci., Vol: 36, No: 5 , published: 01 October 2008
Относительная предельная плотность плазмы в разрядном канале свободно расширяющихся импульсных сильноточных разрядов в неограниченном плотном газе
Юсупалиев У./Рухадзе К.З.
Кpатк. сообщ. по физ. ФИAН, Vol: 2007, No: 9 , published: 10 August 2008
Влияние размера наночастиц на свойства емкостного высокочастотного разряда
Швейгерт И.В.\Питерс Ф.И.
Письма в ЖЭТФ, Vol: 86, No: 9-10 , published: 23 May 2008
Индуктивный высокочастотный разряд низкого давления и возможности оптимизации источников плазмы на его основе
Кралькина Е.А.
Успехи физ. наук, Vol: 178, No: 5 , published: 22 May 2008
Одномерная модель геликонного разряда
Сазонтов В.А.\Семенов В.Е.\Смирнов А.И.
Физ. плазмы, Vol: 33, No: 11 , published: 15 May 2008
Direct mass spectrometric study of the ionic species content of a C[2]HCl[3]/He/O[2] microwave discharge plasma
Takahashi S.\Fujii T.
Plasma Chem. Plasma Process., Vol: 27, No: 5 , published: 12 May 2008
К теории сверхвысокочастотного разряда на поверхности диэлектрической антенны
Двинин С.А.\Шибков В.М.\Михеев В.В.
Физ. плазмы, Vol: 32, No: 7 , published: 12 May 2008
Electrical features of radio-frequency, atmospheric-pressure, bare-metallic-electrode glow discharges
Li H.-P.\Sun W.-T.\Wang H.-B.\et al.
Plasma Chem. Plasma Process., Vol: 27, No: 5 , published: 12 May 2008
Modelling of carbon tetrachloride decomposition in oxidative RF thermal plasma
Kov~1acs T.\Tur~1anyi T.\F~:oglein K.\Sz~1epv~:olgyi J.
Plasma Chem. Plasma Process., Vol: 26, No: 3 , published: 04 May 2008
On the modelling of a nonequilibrium spherical microwave discharge at atmospheric pressure
Rafatov I.R.
Contrib. Plasma Phys., Vol: 47, No: 3 , published: 24 April 2008
Электродный микроволновой разряд в азоте: структура и газовая температура
Лебедев Ю.А.\Соломахин П.В.\Шахатов В.А.
Физ. плазмы, Vol: 33, No: 2 , published: 13 April 2008
Люминесценция XeO в самостоятельном щелевом ВЧ-разряде
Ионин А.А./Селезнев Л.В./Синицын Д.В.
Кpатк. сообщ. по физ. ФИAН, Vol: 2008, No: 4 , published: 08 April 2008
Параметры плазмы микроволнового разряда в порошковых смесях
Батанов Г.М./Бережецкая Н.К./Копьев В.А./и др.
Физ. плазмы, Vol: 34, No: 4 , published: 03 April 2008
Characteristics of VHF H2 plasma produced at high pressure
Yamauchi Y./Takeuchi Y./Takatsuka H./et al.
Contrib. Plasma Phys., Vol: 48, No: 4 , published: 02 April 2008
Multipactor breakdown prediction in a rectangular waveguide: statistical theory and simulation results
Sazontov A.G./Sazontov V.A./Vdovicheva N.K.
Contrib. Plasma Phys., Vol: 48, No: 4 , published: 02 April 2008
Effects of UV Illumination on Surface Flashover Under Pulsed Excitation
Krile, J.T.; Neuber, A.A.; Krompholz, H.G.
IEEE Trans. Plasma Sci., Vol: 36, No: 2 , published: 01 April 2008
Нагрев электронов в высокочастотном индукционном разряде с нейтральным контуром
Арсенин А.В.\Лейман В.Г.\Тараканов В.П.
Радиотехн. и электрон. (Россия), Vol: 52, No: 8 , published: 01 April 2008
О характере затухания электромагнитного поля в плазме высокочастотного факельного разряда
Луценко Ю.Ю.\Власов В.А.\Тихомиров И.А.
Письма в ЖТФ, Vol: 32, No: 9 , published: 01 April 2008
Электродный микроволновый разряд в постоянном поле
Лебедев Ю.А.\Татаринов А.В.\Эпштейн И.Л.
Теплофиз. высок. температур, Vol: 45, No: 3 , published: 27 March 2008
Моделирование процессов образования и гибели нейтральных частиц в плазме разряда постоянного тока в смеси аргон_-кислород
Смирнов С.А.\Рыбкин В.В.\Иванов А.Н.\Титов В.А.
Теплофиз. высок. температур, Vol: 45, No: 3 , published: 27 March 2008
Спектроскопическая диагностика плазмы барьерного разряда на смесях паров дииодида кадмия с газами
Гуйван Н.Н.\Малинин А.Н.
Оптика и спектроскопия, Vol: 102, No: 2 , published: 27 March 2008
"Резонансный" микроволновый источник объемной плазмы
Бережецкая Н.К.\Копьев В.А.\Коссый И.А.\и др.
Физ. плазмы, Vol: 33, No: 7 , published: 20 March 2008
Особенности индуктивного ВЧ-разряда низкого давления. I. Эксперимент
Александров А.Ф.\Вавилин К.В.\Кралькина Е.А.\и др.
Физ. плазмы, Vol: 33, No: 9 , published: 10 February 2008
Особенности индуктивного ВЧ-разряда низкого давления. II Математическое моделирование
Александров А.Ф.\Вавилин К.В.\Кралькина Е.А.\и др.
Физ. плазмы, Vol: 33, No: 9 , published: 10 February 2008
Характеристики молекулярного водорода и CH*-радикала в плазме метана в высокочастотном емкостном разряде магнетронного типа
Автаева С.В.\Лапочкина Т.М.
Физ. плазмы, Vol: 33, No: 9 , published: 10 February 2008
Геликонный источник плазмы в ионно-звуковой области частот
Рухадзе А.А.\Вавилин К.В.
Физ. плазмы, Vol: 33, No: 9 , published: 10 February 2008
Estimating electrons and ions energes in an RF capacitively-coupled argon discharge
Aflori M.\Ivan L.M.\Mihai-Plugaru M.\Dimitriu D.G.
Rom. J. Phys., Vol: 51, No: 1-2 , published: 21 January 2008
Нагрев ионов гадолиниевой плазмы методом ионного циклотронного резонанса
Потанин Е.П.
Ж. техн. физ., Vol: 76, No: 12 , published: 21 January 2008
Particle modeling of radiofrequency discharges of SF[6]
Tong Lizhu\Nanbu Kenichi
J. Plasma Phys., Vol: 72, No: 6 , published: 20 January 2008
Characterization of a tubular plasma reactor with external annular electrodes
Petcu C.\Mitu B.\Dunescu G.
Rom. Rep. Phys., Vol: 57, No: 3 , published: 14 January 2008
Долгоживущие плазмоиды, генерируемые поверхностным микроволновым разрядом в химически активной газовой среде
Бережецкая Н.К.\Грицинин С.И.\Копьев В.А.\и др.
Физ. плазмы, Vol: 31, No: 10 , published: 14 January 2008
Experimental study of capacitive He/O[2] discharges at atmospheric pressure (brief communication)
Kimura Takashi\Hanai Takamasa
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 5А , published: 13 January 2008
Разновидности свечения ВЧ разряда в зависимости от влажности воздуха
Протасевич Е.Т.
Ж. техн. физ., Vol: 75, No: 7 , published: 03 January 2008
Влияние колебательного возбуждения молекул CO на характеристики ВЧ-разряда
Ионин А.А.\Синицын Д.В.\Терехов Ю.В.\и др.
Физ. плазмы, Vol: 31, No: 9 , published: 03 January 2008
Свободнолокализованный сверхвысокочастотный разряд в сверхзвуковом потоке газа
Шибков В.М.\Александров А.Ф.\Ершов А.П.\и др.
Физ. плазмы, Vol: 31, No: 9 , published: 03 January 2008
Слаботочный ВЧ-разряд с фотоэмиссией в слое и выходом электронов слоя в столб
Баранов И.Я./Коптев А.В.
Физ. плазмы, Vol: 33, No: 12 , published: 30 December 2007
Квазистатическое моделирование микроволнового разряда в азоте в системе электродов со сферической симметрией
Лебедев Ю.А.\Эпштейн И.Л.
Физ. плазмы, Vol: 33, No: 1 , published: 23 December 2007
Модель расчета слаботочного ВЧ-разряда среднего давления с образованием фотонов в слое и фотоэмиссией электронов
Баранов И.Я.\Коптев А.В.
Физ. плазмы, Vol: 33, No: 1 , published: 23 December 2007
Поверхностный сверхвысокочастотный разряд в воздухе
Шибков В.М.\Двинин С.А.\Ершов А.П.\и др.
Физ. плазмы, Vol: 33, No: 1 , published: 23 December 2007
Ионизационно-перегревная неустойчивость разрядной плазмы воздуха в СВЧ-поле
Бычков В.Л.\Грачев Л.П.\Есаков И.И.
Ж. техн. физ., Vol: 77, No: 3 , published: 16 December 2007
New in-situ sampling and analysis of the production of CeO[2] powders from liquid precursors using a novel wet collection system in a rf inductively coupled thermal plasma reactor. Pt 1 . Reactor system and sampling probe
Castillo I.A./Munz R.J.
Plasma Chem. Plasma Process., Vol: 27, No: 6 , published: 15 December 2007
New in situ sampling and analysis of the production of CeO[2] powders from liquid precursors using a novel wet collection system in a rf inductively coupled thermal plasma reactor. Pt 2. Analysis of CeO[2] powders, fuel addition, and image analysis
Castillo I.A./Munz R.J.
Plasma Chem. Plasma Process., Vol: 27, No: 6 , published: 15 December 2007
Обобщенная модель Томсона высокочастотного индукционного разряда конечной длины
Гайнуллин Р.Н./Кирпичников А.П.
Прикл. физ., Vol: 2007, No: 3 , published: 02 December 2007
О взаимном расположении максимумов некоторых характеристик высокочастотного индукционного разряда
Гайнуллин Р.Н./Герасимов А.В./Зеленко О.В./Кирпичников А.П.
Прикл. физ., Vol: 2007, No: 3 , published: 02 December 2007
Кинетика высокочастотного разряда низкого давления с конденсированной фазой
Струнин В.И.\Ляхов А.А.\Худайбергенов Г.Ж.\Шкуркин В.В.
Ж. техн. физ., Vol: 74, No: 4 , published: 01 December 2007
Генерация звуковых волн ВЧ-разрядом геликонного типа
Белов А.С.\Марков Г.А.
Физ. плазмы, Vol: 32, No: 9 , published: 01 December 2007
Two-Dimensional and Three-Dimensional Simulation of DC Plasma Torches
Bhuyan, P.J.; Goswami, K.S.
IEEE Trans. Plasma Sci., Vol: 35, No: 6 , published: 01 December 2007
Наблюдение импульсных высыпаний быстрых электронов и циклотронный механизм генерации вспышечной активности в распадающейся плазме ЭЦР-разряда
Водопьянов А.В.\Голубев С.В.\Демехов А.Г.\и др.
Ж. эксперим. и теор. физ., Vol: 131, No: 2 , published: 17 November 2007
Optical and electrical diagnostics of a high-frequency glow_-arc discharge and its application to the synthesis of carbon nanofibers
Valdivia-Barrientos R./Pacheco-Sotelo J.O./Pacheco-Pacheco M./et al.
IEEE Trans. Plasma Sci. Pt 2, Vol: 35, No: 5 , published: 13 November 2007
Characteristics of large area inductively coupled plasma using a multiple linear antennas with U-type parallel connection for flat panel display processing
Kim Kyong Nam\Seok Kyung\Yeom Geun Young
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 11 , published: 10 November 2007
Experimental study on favorable properties of compound RF discharge plasmas with a tapered shape hollow cathode compared with a plane cathode
Yambe Kiyoyuki\Matsuoka Akio\Kondoh Yoshiomi
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 11 , published: 10 November 2007
Radio frequency plasma in water
Maehara Tsunehiro\Toyota Hiromichi\Kuramoto Makoto\et al.
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 11 , published: 10 November 2007
Генерация низкочастотных излучений неравновесной плазмой ВЧ-разряда в линейной магнитной ловушке
Доброхотов В.В.\Люкшин Н.М.\Марков Г.А.\Чугунов Ю.В.
Физ. плазмы, Vol: 31, No: 8 , published: 03 November 2007
PECVD of carbon nanostructures in hydrocarbon-based RF plasmas
Ostrikov K.\Tsakadze Z.\Rutkevych P.P.\et al.
Contrib. Plasma Phys., Vol: 45, No: 7 , published: 14 October 2007
Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges
Rakhimova T.V./Braginsky O.V./Ivanov V.V./et al.
IEEE Trans. Plasma Sci. Pt 1, Vol: 35, No: 5 , published: 14 October 2007
Nonthermal atmospheric RF plasma in 1-D spherical coordinates: a parametric study
Sakiyama Y./Graves D.B.
IEEE Trans. Plasma Sci. Pt 1, Vol: 35, No: 5 , published: 14 October 2007
In-situ method of monitoring argon plasma density variation using current and voltage of flat antenna in inductively coupled plasma source
Lee S.-H.\Cho J.-H.\Kim G.-H.
Contrib. Plasma Phys., Vol: 46, No: 5-6 , published: 01 October 2007
Probe diagnostics of microwave plasma at frequency 2.45 GHz in CW and pulse regime
Stra~3n~1ak V.\Ad~1amek P.\Bla~3zek M.\et al.
Contrib. Plasma Phys., Vol: 46, No: 5-6 , published: 01 October 2007
Evidence of an energy transfer reaction between atomic hydrogen and argon ~I~I or helium ~I~I as the source of excessively hot H atoms in radio-frequency plasmas
Mills R.\Ray P.\Dhandapani B.
J. Plasma Phys., Vol: 72, No: 4 , published: 28 September 2007
Moltipactor discharge in magnetically insulated transmission line oscillator
Hao Jian-Hong\Ding Wu\Dong Zhi-Wei
Acta phys. sin., Vol: 55, No: 9 , published: 27 September 2007
The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge. ~I. Physical model and theoretical mehods
Jin Xiao-Lin\Yang Zhong-Hai
Acta phys. sin., Vol: 55, No: 11 , published: 25 September 2007
The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge. ~I~I. Numerical simulation and discussion of results
Jin Xiao-Lin\Yang Zhong-Hai
Acta phys. sin., Vol: 55, No: 11 , published: 25 September 2007
Приэлектродная область электродного СВЧ-разряда в водороде: спектрально-оптическое исследование и моделирование
Лебедев Ю.А.\Мокеев М.В.\Татаринов А.В.\Эпштейн И.Л.
Физ. плазмы, Vol: 30, No: 1 , published: 25 September 2007
A new atmospheric RF cold plasma source with microhollow cathode structure
Qiu Liang\Meng Yue-Dong\Ren Zhao-Xing\Zhong Shao-Feng
Acta phys. sin., Vol: 55, No: 11 , published: 25 September 2007
Properties of large-area surface wave plasma
Liu Ming-Hai\Sugai H.\Hu Xi-Wei\et al.
Acta phys. sin., Vol: 55, No: 11 , published: 25 September 2007
Спектрально-оптическое исследование структуры приэлектродной области электродного СВЧ-разряда в водороде
Лебедев Ю.А.\Мокеев М.В.
Теплофиз. высок. температур, Vol: 41, No: 6 , published: 24 September 2007
Numerical simulation of high-frequency driven dielectric barrier microdischarge with coplanar electrode configuration in Ar
Otsuka Shin\Tochikubo Fumiyoshi\Uchida Satoshi
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 10A , published: 18 September 2007
Spectroscopic study on vibrational distribution of N[2] C{3}_P and B{3}_P states in microwave nitrogen discharge
Sakamoto Takeshi\Matsuura Haruaki\Akatsuka Hiroshi
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 10A , published: 18 September 2007
Characteristics of secondary electron emission coefficient and sputtering yield for MgAl[2]O[4]/MgO protective layer in AC-plasma display panels
Jeoung Jin-Man\Ko Byung-Doc\Lee Hye-Jung\et al.
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 10A , published: 18 September 2007
Observation of Microwave In-Liquid Plasma using High-Speed Camera
Shinobu Mukasa, Shinfuku Nomura, and Hiromichi Toyota
Jpn. J. Appl. Phys., Part 1, Vol: 46, No: 9A , published: 07 September 2007
Microwave measurement of decaying plasma in liquid helium
Minami Kazuo\Kojima Chikara\Ohira Takeo\Ishihara Osamu
IEEE Trans. Plasma Sci. Pt 2, Vol: 33, No: 4 , published: 04 September 2007
Transversal radio-frequency discharge in the Xe/Cl[2] mixture
Shuaibov A.K.\Shimon L.L.\Dashchenko A.I.\Shevera I.V.
Укр. фiз. ж., Vol: 49, No: 2 , published: 03 September 2007
Self-consitent particle modeling of inductively coupled CF[4] plasmas: effect of wafer biasing
Takekida Hideto\Nanbu Kenichi
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 3A , published: 24 August 2007
Формирование компактных квазисферических плазменных образований с помощью ВЧИ-разряда
Дубинов А.Е.\Журавлев С.С.\Иванов М.М.\Репин П.Б.
Теплофиз. высок. температур, Vol: 41, No: 4 , published: 20 August 2007
Output characteristics of the high-power microwave generated from a coaxial vircator with a bar reflector in a drift region
Jeon Wook\Lim Jeong Eun\Moon Min Wug\et al.
IEEE Trans. Plasma Sci. Pt 3, Vol: 34, No: 3 , published: 10 August 2007
Self-consistent particle modeling of inductively coupled CF[4] discharges and radical flow
Takekida Hideto\Nanbu Kenichi
IEEE Trans. Plasma Sci. Pt 3, Vol: 34, No: 3 , published: 10 August 2007
Поведение атомарной плазмы в поле акустической волны
Мкртчян А.Р.\Абраамян А.С.\Костанян Р.Б.\и др.
Изв. НАН Армении. Физ., Vol: 40, No: 3 , published: 23 July 2007
О параметрах неравновесного азотного свч-разряда в трубке в прямоугольном волноводе
Лебедев Ю.А.\Шахатов В.А.
Теплофиз. высок. температур, Vol: 44, No: 6 , published: 19 July 2007
Исследование неравновесной плазмы ВЧ-разряда в азоте методом широкополосной спектроскопии КАРС
Шахатов В.А.\Гордеев О.А.
Теплофиз. высок. температур, Vol: 44, No: 1 , published: 10 July 2007
Исследование нагрева электронов в мультиполярных магнитных системах и конструирование электрон-циклотрон-резонансных СВЧ-реакторов низкого давления
Петрин А.Б.
Теплофиз. высок. температур, Vol: 44, No: 1 , published: 10 July 2007
Effects of dielectric barriers in radio-frequency atmospheric glow discharges
Shi Jianjun J./Liu Dawei W./Kong Michael G.
IEEE Trans. Plasma Sci. Pt 1, Vol: 35, No: 2 , published: 29 April 2007
The effect of discharge chamber geometry on the characteristics of low-pressure RF capacitive discharges
Lisovskiy Valeriy A./Booth Jean-Paul/Landry Karine/et al.
IEEE Trans. Plasma Sci. Pt 3, Vol: 35, No: 2 , published: 23 April 2007
Generation of Microplasma Using Pulsed Discharge of Ethanol Droplet in Air
Naoki Shirai, Yu Onaka, Shinji Ibuka, Koichi Yasuoka, and Shozo Ishii
Jpn. J. Appl. Phys., Part 1, Vol: 46, No: 1 , published: 10 January 2007
Поверхностный сверхвысокочастотный разряд при высоких давлениях воздуха
Шибкова Л.В.
Вестн. МГУ. Сер. 3, Vol: 2007, No: 5 , published: 01 January 2007
Исследование индуктивного ВЧ-разряда как самосогласованной системы. Ч. IV. Результаты исследования эквивалентного сопротивления индуктивного ВЧ-разряда низкого давления без магнитного поля
Александров А.Ф./Бугров Г.Э./Вавилин К.В./и др.
Прикл. физ., Vol: 2006, No: 2 , published: 03 December 2006
Исследование индуктивного ВЧ-разряда как самосогласованной системы. Ч. III. Исследование влияния емкостной составляющей на параметры плазмы индуктивного ВЧ-разряда низкого давления
Александров А.Ф./Бугров Г.Э./Вавилин К.В./и др.
Прикл. физ., Vol: 2006, No: 1 , published: 03 December 2006
Усредненная сила давления мощной ВЧ-волны, действующая на релятивистскую заряженную частицу в сильном магнитном поле
Милантьев В.П./Степина С.П.
Прикл. физ., Vol: 2006, No: 6 , published: 03 December 2006
Исследование индуктивного ВЧ-разряда как самосогласованной системы. Ч. VI. Математическое моделирование индуктивного ВЧ-разряда (самосогласованная модель)
Александров А.Ф./Бугров Г.Э./Вавилин К.В./и др.
Прикл. физ., Vol: 2006, No: 5 , published: 01 December 2006
Исследование индуктивного ВЧ-разряда как самосогласованной системы. Ч. VII. Математическое моделирование индуктивного ВЧ-разряда с емкостной компонентой (самосогласованная модель)
Александров А.Ф./Бугров Г.Э./Вавилин К.В./и др.
Прикл. физ., Vol: 2006, No: 5 , published: 01 December 2006
Исследование индуктивного ВЧ-разряда как самосогласованной системы. Ч. V. Результаты исследования эквивалентного сопротивления индуктивного ВЧ-разряда низкого давления при наличии внешнего магнитного поля
Александров А.Ф./Бугров Г.Э./Вавилин К.В./и др.
Прикл. физ., Vol: 2006, No: 4 , published: 26 November 2006
Численный расчет коаксиального микроволнового факела
Грицинин С.И./Коссый И.А./Кулумбаев Э.Б./Лелевкин В.М.
Физ. плазмы, Vol: 32, No: 10 , published: 22 October 2006
Nonlinear effects and anomalous transport in RF plasmas
Chen, F.F.
IEEE Trans. Plasma Sci., Vol: 34, No: 3 , published: 01 June 2006
Self-consistent modeling of nonlocal inductively coupled plasmas
Polomarov, O.V.; Theodosiou, C.E.; Kaganovich, I.D.; Economou, D.J.; Ramamurthi, B.N.
IEEE Trans. Plasma Sci., Vol: 34, No: 3 , published: 01 June 2006
Experimental and theoretical study of RF plasma at low and high frequency
Rakhimova, T.V.; Braginsky, O.V.; Ivanov, V.V.; Kim, T.K.; Kong, J.T.; Kovalev, A.S.; Lopaev, D.V.; Mankelevich, Y.A.; Proshina, O.V.; Vasilieva, A.N.
IEEE Trans. Plasma Sci., Vol: 34, No: 3 , published: 01 June 2006
Исследование эффективности комбинирования импульсно-периодического СВЧ-разряда и гетерогенного катализа для окисления ацетилена
Гатилова Л.В.\Руссо А.\Репке Ю.\Толмачев Ю.А.
Вестн. С.-Петербург. ун-та. Сер. 4, Vol: 2006, No: 3 , published: 01 January 2006
Simulation of capacitively coupled single- and dual-frequency RF discharges
Lee Jae Koo/Baaeva Natalia Yu/Kim Hyun Chul/et al.
IEEE Trans. Plasma Sci. Pt 1, Vol: 32, No: 1 , published: 10 December 2005
Двухкамерная установка для напыления тонких пленок в поперечном высокочастотном разряде
Строкань Г.П.
Приборы и техн. эксперим., Vol: 2003, No: 6 , published: 01 January 2003
Ленгмюровский зонд для невозмущающей диагностики параметров плазмы в.ч.-разрядов в ближнем поле антенн
Бажанов В.С., Смирнов В.А., Умнов А.Л.
Приборы и техн. эксперим., Vol: 1999, No: 3 , published: 01 January 1999
High-frequency electrostatic surface oscillations in a dust-contaminated plasma
Ostrikov Kostyantyn K., Vladimirov Sergey V., Yu Ming Y., Stenflo Lennart
J. Phys. Soc. Jpn., Vol: 68, No: 3 , 1999
On the theory of plasma-sheath resonance in a non-uniform plasma
Tanizuka Noboru, Allen John E.
J. Plasma Phys., Vol: 61, No: 3 , 1999
Role of reaction products in F{-} production in low-pressure, high-density CF[4] plasmas
Hayashi Daiyu, Nakamoto Masahiko, Takada Noriharu et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 10 , 1999
Two-dimensional fluid simulation and Langmuir probe measurement of a planar inductively coupled oxygen plasma
Yoon Hyun Jin, Chung Tae Hun, Seo Dong Cheol
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 12A , 1999
Detection of metastable chlorine ions in time-modulated plasma by time resolved laser-induced fluorescence
Kumagai Shinya, Sasaki Minoru, Koyanagi Mitsumasa, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 12B , 1999
New electrodeless light source excited by a microwave immersed in a uniform static magnetic field
Zhang Rui, Nishida Yasushi, Kanno Masato et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7A , 1999
Production of inductively-coupled large-diameter plasmas with internal antenna
Setsuhara Yuichi, Miyake Shoji, Sakawa Yoichi, Shoji Tatsuo
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Experimental characterization of an inductively coupled plasma discharge using a shape-adjustable coil
Leou Keh-Chyang, Tsai Szu-Che, Chang Chai Hau et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Ferrite core effects in a 13.56 MHz inductively coupled plasma
Lloyd Shane, Shaw Denis M., Watanabe Masahiro, Collins George J.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Pre-sheaths and turbulent flow in electronegative plasmas
Vitello Peter
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Characteristics of very high frequency plasma produced using a ladder-shaped electrode
Mashima Hiroshi, Murata Masaysohi, Takeuchi Yoshiaki et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Production of large-diameter uniform plasma in mTorr range using microwave discharge
Yasaka Yasuyoshi, Nozki Daiki, Koga Kazuya et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Test-wave measurements of microwave absorption efficiency in a planar surface-wave plasma reactor
Ghanashev Ivan, Morita Shin, Toyoda Naoki et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Energy control of ion from a capacitively coupled plasma using RF resonance method
Kikuchi Tetsuo, Ohnishi Keitaro, Yasaka Yasuyoshi et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Behavior of F atoms and CF[2] radicals in fluorocarbon plasmas ror SiO[2]/Si etching
Tachibana Kunihide, Kamisugi Hideaki, Kawasaki Takeshi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
The energies of positive and negative ions in an RF plasma in nitrous oxide
Rees J. Alan, Greenwood Claire L., Seymour David L.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Hybrid modeling of a capacitively coupled radio frequency glow discharge in argon: combined Monte Carlo and fluid model
Bogaerts Annemie, Gijbels Renaat, Goedheer Wim
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Dependence of driving frequency on capacitively coupled plasma in CF[4]
Segawa Sumie, Kurihara Masaru, Nakano Nobuhiko, Makabe Toshiaki
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
A numerical study of a collision-dominated inductively coupled plasma using particle-in-cell/Monte Carlo simulation
Oh Jin-Sung, Makabe Toshiaki
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma
Kamimura Kazuhiro, Iyanagi Katumi, Nakano Nobuhiko, Makabe Toshiaki
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Realistic etch yield of fluorocarbon ions in SiO[2] etch process
Hikosaka Yukinobu, Yayashi Hisataka, Sekine Makoto et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Patterned platinum etching studies in an argon high-density plasma
Delprat Sebasten, Chaker Mohamed, Margot Joelle
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Effect of oxygen component in magneto-active microwave CH[4]/He plasma on large-area diamond nucleation over Si
Jeon Hyeongmin, Wang Chunei, Hatta Akimitsu, Ito Toshimichi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Diamond deposition and behavior of atomic carbon species in a low-pressure inductively coupled plasma
Ito Haruhiko, Teii Kungen, Ishikawa Masayuki et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Ellipsometric monitoring of first states of diamond nucleation in a bias-enhanced surface-wave-excited microwave plasma
Hayashi Yasuaki, Nakamura Hideto, Nagahiro Masaaki, Nishino Shigehiro
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Relationship between intensity of fullerene-mass spectrum and carbon vibrational temperature in microwave-helium plasmas
Ueda Kengo, Kuwahara Kiyoshi, Fujiyama Hiroshi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Ion bombardment effects on boron nitride film synthesis by reactive sputtering with electron cyclotron resonance plasmas
Wakatsuchi Masayuki, Takaba Yoshiro, Kanai Kumiko et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Low-dielectric-constant-film deposition with various gases in a helicon plasma reactor
Yun Seok-Min, Chang Hong-Young, Oh Kyoung-Suk, Choi Chi-Kyu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Gas phase diagnosis of disilane/hydrogen RF glow discharge plasma and its application to high rate growth of high quality amorphous silicon
Futako Wataru, Takagi Tomoko, Nishimoto Tomonori et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Deposition of SiN[x] thin film using μ-SLAN surface wave plasma source
Xu Ying-Yu, Ogishima Takuya, Korzec Dariusz et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Particle growth kinetics in silane RF discharges
Shiratani Masaharu, Fukuzawa Tsuyoshi, Watanabe Yukio
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Negative ion volume production in electron cyclotron resonance hydrogen plasmas
Fukumasa Osamu, Matsumori Masanori
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Oxygen microwave plasma density enhancement by surface waves with a high-permittivity material window
Furukawa M., Koromogawa T., Kamiyo K., et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 8 , 1999
Oxygen microwave plasma density enhancement by surface waves with a high-permittivity material window
Furukawa M., Koromogawa T., Kamiyo K., et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 8 , 1999
Diagnostic of surface wave plasma for oxide etching in comparison with inductive RF plasma
Kokura Hikaru, Yoneda Shinichi, Nakamura Keiji et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 9A , 1999
Role of electron thermal motion in evanescent electromagnetic wave structure of inductively coupled plasma
Takechi Seiji, Shinohara Shunjiro
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 2A , 1999
Characteristics of ultrahigh-frequency surface-wave plasmas excited at 915 MHz
Nagatsu Masaaki, Ito Akira, Toyoda Naoki, Sugai Hideo
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 6A-6B , 1999
Detailed structure of the afterglow of radio-frequency chlorine discharge
Nanbu Kenichi, Nakagome Takeo, Kageyama Junichi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 8B , 1999
Instabilities in a dusty plasma with ion drag and ionization
Samsonov D., Goree J.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 59, No: 1 , 1999
Experimental test of models of high-plasma-density, radio-frequency sheaths
Sobolewski Mark A.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 59, No: 1 , 1999
Theory of magnetized, coupled, rf-driven plasma sheaths in one dimension
Riyopoulos Spilios
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 59, No: 1 , 1999
Discharge impedance of solenoidal inductively coupled plasma discharge
You K.-I., Yoon N. S.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 59, No: 6 , 1999
Self-consistent axial modeling of surface-wave-produced discharges at low and intermediate pressures
Petrova Ts., Benova E., Petrov G., Zhelyazkov I.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 60, No: 1 , 1999
Optical measurements of paired luminous rings in capacitive radio-frequency hydrogen discharges
Sakawa Y., Hori M., Shoji T., Sato T.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 60, No: 5 , 1999
Gas temperature and nitrogen atom concentration influence on the particle kinetics in a surface-wave-sustained N[2] discharge
Stoykova E.
Phys. scr., Vol: 59, No: 1 , 1999
Influence of resonance energy absorption on the properties of gas discharge maintained by asymmetric surface waves
Azarenkov N.A., Gapon A.V., Denisenko I.B., Smolyakov A.I.
Phys. scr., Vol: 59, No: 4 , 1999
On filamentation in microwave discharges at elevated pressures
Maximov A.V., Schluter H.
Phys. scr., Vol: 60, No: 6 , 1999
A comparative study on the intensity of the spectral lines emitted by a chemical flame (air-acetylene) and by an electrical one (inductively coupled plasma)
Hotinceanu M., Neagoe S.
Rom. J. Phys., Vol: 44, No: 5-6 , 1999
Laser ablation inductively coupled plasma - atomic emission spectroscopy (LA-ICP-AES); Fundamental and analyticalexperiemnts
Ciocan A.C., Mao X.L., Borisov V., Russo R.E.
Rom. J. Phys., Vol: 44, No: 5-6 , 1999
Interaction between particle and temperature fields of AC plasma ARC
Gu Yun-peng, Gong Ye, Sun Ji-zhong
Acta phys. sin., Vol: 48, No: 6 , 1999
Критерий пробоя газа в СВЧ поле
Лисовский В.А.
Ж. техн. физ., Vol: 69, No: 11 , 1999
Структура кристалла микрочастиц в плазме высокочастотного разряда
Швейгерт В.А., Швейгерт И.В., Беданов В.М. и др.
Ж. эксперим. и теор. физ., Vol: 115, No: 3 , 1999
Волновая диагностика плазмы с помощью диэлектрического волновода
Катин И.В., Марков Г.А.
Изв. вузов. Радиофиз., Vol: 42, No: 3 , 1999
Асимметрия резонансов насыщенного поглощения в He-Ne/{127}I[2]-лазерах с накачкой поперечным ВЧ разрядом
Бойко А.В., Негрийко А.М., Яценко Л.П.
Квант. электрон., Vol: 28, No: 2 , 1999
Наблюдение светоиндуцированного тока в плазме СВЧ разряда Ar с примесью паров лития, резонансно возбуждаемых лазерным излучением
Востриков О.А., Насыров К.А., Подъячев С.П., Шалагин А.М.
Оптика и спектроскопия, Vol: 86, No: 2 , 1999
Использование резонансного комбинационного рассеяния света для диагностики плазмы
Раздобарин Г.Т., Соломаа Р.Р.У., Сантала М.И.К. и др.
Письма в ЖТФ, Vol: 25, No: 18 , 1999
Электронный энергетический спектр приэлектродной плазмы всимметричного емкостного ВЧ разряда низкого давления
Александров А.Ф., Рухадзе А.А., Савинов В.П. и др.
Письма в ЖТФ, Vol: 25, No: 19 , 1999
Непрерывный оптический разряд в термоэмиссионном преобразователе энергии лазерного излучения в электрическую энергию
Алексеева И.В., Будник А.П., Жеребцов В.А. и др.
Письма в ЖТФ, Vol: 25, No: 7 , 1999
Измерение температуры газа в ВЧ-разряде низкого давления методом сканирующей калориметрии
Магунов А.Н., Лукин О.В., Гасилов А.Ю.
Теплофиз. высок. температур, Vol: 37, No: 2 , 1999
Effects of N[2] addition on aluminum alloy etching in inductively coupled plasma source
Kim Kil Ho, Baek Kye Hyun, Shin Kang Sup et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 10 , 1999
Chemical dry etching of Si Substrate in a discharge flow using Ar/CF[4] gas mixtures
Tsuji Masaharu, Okano Shinji, Tanak Atsushi, Nishimura Yukio
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 11 , 1999
Plasma properties of a negative ion plasma reactive ion etching system
Keller John H., Kocon W. Walter
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Effect of gas plow on RF plasmas
Sato Nobuyasu, Shida Yutaka
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Effects of gas flow on particle growth in silane RF discharges
Matsuoka Yasuhiro, Shiratani Masaharu, Fukuzawa Tsuyoshi et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Effect of oxygen concentration on the detection of mercury in an atmospheric microwave discharge
Hadidi Kamal, Woskov Paul P., Flores Guadalupe J. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Calculated plasma parameters and excitation spectra of high-phtssure helium discharges
Peres I., Alves L.L., Margot J. et al.
Plasma Chem. Plasma Process., Vol: 19, No: 4 , 1999
Optical emission observation in electron beam sustained Ti arc and rf plasmas in the formation of TiN thin film
Xiao Shiqin, Lungu C.P., Takai O., Musa G.
Rom. J. Phys., Vol: 44, No: 3-4 , 1999
The influence of viscosity and of the anayte flow upon the intensity of spectral lines emitted in the air-acetylene flame AD in inductively coupled plasma
Hotinceanu M., Neagoe S.
Rom. J. Phys., Vol: 44, No: 9-10 , 1999
О природе псевдокоронного СВЧ-разряда атмосферного давления
Русанов В.Д., Шолин Г.В., Демура А.В., Тренин А.Е.
Докл. РАН, Vol: 369, No: 2 , 1999
Стримерный СВЧ разряд в сверхзвуковом потоке воздуха
Грачев Л.П., Есаков И.И., Ходатаев К.В.
Ж. техн. физ., Vol: 69, No: 11 , 1999
Диапазон существования самостоятельно развивающегося подкритического стримерного СВЧ разряда
Граев Л.П., Есаков И.И., Ходатаев К.В.
Ж. техн. физ., Vol: 69, No: 11 , 1999
СВЧ разряд высокого давления в надпробойном поле. Ветвление стримера
Веденин П.В., Розанов Н.Е.
Письма в ЖЭТФ, Vol: 69, No: 1-2 , 1999
Возвратно-вихревая термоизоляция плазмы и газового пламени
Гуцол А.Ф., Калинников В.Т.
Теплофиз. высок. температур, Vol: 37, No: 2 , 1999
СВЧ-разряд высокого давления. Филаментация плазменного канала
Веденин П.В.
Физ. плазмы, Vol: 25, No: 4 , 1999
An open-cavity electron cyclotron resonance plasma/ion source
Ning Fung-Truen, Hu Yuan, Lin Tsang-Lang
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 12A , 1999
Endurance characteristics and degradation mechanisms of polysilicon thin film transistor EEPROMs with electron cyclotron resonance N[2]O-plasma gate oxide
Lee NAE-iN, lEE jIN-wOO, hAN cHUL-hI
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 4B , 1999
Effect of electrode for producing the highly charged heavy ions from RIKEN 18 GHz electron cyclotron resonance ion source
Kurita Tetsuro, Nakagawa Takahide, Kidera Masanori et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 6A , 1999
Plasma diagnostics of CH[4]/O[2]/H[2] electron cyclotron resonance plasma with permanent magnets and deposition of amorphous
Yasui Toshiaki, Kodera Hidekazu, Oya Izumi et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7A , 1999
Studies on magnetron sputtering assited by inductively coupled RF plasma for enhanced metal ionization
Yamashita Masahiro, Setsuhara Yuichi, Miyake Shoji et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Magnetic neutral loop discharge (NLD) plasma and application to SiO[2] etching process
Chen Wei, Hayashi Toshio, Itoh Masahiro et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Reduction of electron temperature in rf plasma using magnetic filter
Hayashi Nobuya, Nakashima Toshio, Fujita Hiroharu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Profile control and plasma rotation by biased electrodes in large diameter RF produced plasma
Shinohara Shunjiro, Matsuoka Norikazu, Yoshinaka Toshiro
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Cylidnrical DC magnetrol sputtering assisted by microwave plasma
Yonesu Akira, Kato Takashi, Takemoto Hiroki et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Extensive control of plasma parameters in the afterglow region of electron-cyclotron-resonance plasma for the epitaxial growth of cubic gallium nitride
Yasui Kanji, Kikuchi Masaki, Uwabachi Atushi, Akahane Tadashi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Effect of electromagnetic waves propagating in the periphery of electron cyclotron resonance plasma on the uniformity
Ueda Yoko, Muta Hiroshi, Kawai Yoshinobu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Characteristics of scanning mirror-type magnetic field coaxial electron cyclotron resonance plasma for inner coating of slender glass tubes
Nagano Teppei, Fujiyama Hiroshi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Downstream control of negative-ion plasma parameters in helicon discharge
Nasser Mahmood, Fujita Hiroharu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Two-dimensional measurement of He metastable atom density profile in front of substrate in electron cyclotron resonance plasma flow by laser-induced fluorescence spectroscopy
Watanabe Mahiko, Takiyama Ken, Toyota Hiroshi, Oda Toshiatsu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Energy distribution functions of ions impacted on a negatively biased substrate in an electron cylotron resonance microwave plasma
Ohtsu Yasunori, Mori Keiichi, Fujita Hiroharu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Investigation of electron behavior in ECR plasmas using a self-consistent particle-wave model
Muta Hiroshi
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Accumualtion of negative ions in hollow-type electron cyclotron resonance CF[4] plasma column
Mieno Tetsu, Ogawa Akira
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 7B , 1999
Effect of substrate bias on Si epitaxial growth using sputtering type electron cyclotron resonance (ECR) plasma
Gao Junsi, Nakashima Hiroshi, Wang Junli, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 11B , 1999
Growth of epitaxial silicon film at low temperature by using sputtering-type electron cyclotron resonance plasma
Gao Junsi, Nakashima Hiroshi, Sakai Naofumi et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 3A , 1999
Electron cyclotron resonance plasma produced with a closed spheroidal electron cyclotron resonance surface in a simple cusp field
Uchida Masaki, Fukumoto Shiho, Asakawa Makoto et al.
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 8A , 1999
Confinement of ions in sources based on electron cyclotron resonance phenomenon
Dougar-Jabon V.D., Chacon Velasco A.J., Umnov A.M., Kariaka V.I.
Phys. scr., Vol: 60, No: 3 , 1999
Electron heating during microwave gas discharge sustained by surface cyclotron waves
Girka V.I.
Phys. scr., Vol: 60, No: 3 , 1999
Supersonic pulse, plasma sampling mass spectrometry: theory and practice
Gaddy G.A., Webb S.F., Blumenthal R.
Plasma Chem. Plasma Process., Vol: 19, No: 4 , 1999
Properties of electron cyclotron resonance plasmas and their influence on the deposition of GaN films
Du Xiao-long, Chen Guang-chao, Jiang De-yi et al.
Acta phys. sin., Vol: 48, No: 2 , 1999
Гистерезис при электрон-циклотронном резонансе
Петрин А.Б.
Ж. техн. физ., Vol: 69, No: 12 , 1999
СВЧ и ВЧ возбуждение разряда в парах серы с неоном
Козлов А.Н., Ляхов Г.А., Павлов Ю.В. и др.
Письма в ЖТФ, Vol: 25, No: 13 , 1999
Параметры плазмы электронно-циклотронного резонансного разряда в открытой магнитной ловушке в квазигазодинамическом режиме удержания
Водопьянов А.В., Голубев С.В., Зорин В.Г. и др.
Письма в ЖТФ, Vol: 25, No: 14 , 1999
Turbulence phenomena in the radio frequency induction plasma torch
Ye R., Proulx P., Boulos M.I.
Int. J. Heat and Mass Transfer. , Vol: 42, No: 9 , 1999
Перколяция в дисперсной плазме лазерного факела
Каск Н.Е., Мичурин С.В., Федоров Г.М.
Теплофиз. высок. температур, Vol: 37, No: 1 , 1999
Miniature high intensity microwave ion source (Short Note)
Yoshida Yoshikazu
Jpn. J. Appl. Phys., Part 1, Vol: 38, No: 1A , 1999
Энергетическое распределение электронов в приэлектродной плазме емкостного ВЧ-разряда низкого давления
Александров А.Ф., Савинов В.П., Сингаевский И.Ф.
Вестн. МГУ. Сер. 3, Vol: 1998, No: 6 , published: 01 January 1998
Диагностика изолированной индуктивно-связанной плазмы в смесях хлора и аргона
Большаков А.А., Барнес Р.М.
Вестн. С.-Петербург. ун-та. Сер. 4, Vol: 1998, No: 3 , published: 01 January 1998
Radio-frequency-precionized xenon z-pinch source for extreme ultraviolet lithography
McGeoch Malcolm
Appl. Opt., Vol: 37, No: 9 , 1998
Continuous air monitoring using inductively coupled plasma atomic emission spectrometry: Correction of spectral interferences arising from CN emission
Seltzer M.D.
Appl. Spectrosc. , Vol: 52, No: 2 , 1998
Analysis of discolored aluminum foil by laser ablation inductively coupled plasma mass spectrometry and scanning electron microscopy
Yuzefovsky A.I., Miser D.E.
Appl. Spectrosc. , Vol: 52, No: 5 , 1998
Use of internal standardization to compensate for a wide range of absorbance in the analysis of glasses by UV laser ablation inductively coupled plasma atomic emission spectrometry
Kanicky V., Otruba V., Mermet J.-M.
Appl. Spectrosc. , Vol: 52, No: 5 , 1998
Electromagnetically induced transparency in a RF discharge
Pavone F.S., Artoni M., Bianchini G., Cancio P. et al.
Eur. Phys. J. D, Vol: 1, No: 1 , 1998
Modelling of the heat transfer and fluid flow in a radio-frequency plasma torch with argon-hydrogen as the working gas
Chen X., Sugasawa M., Kikukawa N.
J. Phys. D: Appl. Phys., Vol: 31, No: 10 , 1998
The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor
Andrieux M., Badie J.M., Ducarroir M., Bisch C.
J. Phys. D: Appl. Phys., Vol: 31, No: 12 , 1998
XPS characterization of mica surfaces processed using a radio-frequency (rf) argon plasma
Liu Zh.H., Brown N.M.D.
J. Phys. D: Appl. Phys., Vol: 31, No: 15 , 1998
Self-consistent modelling of overdense plasmas in ECR discharges
Hemmers D., David M., Kempkens H. et al.
J. Phys. D: Appl. Phys., Vol: 31, No: 17 , 1998
Spatial rotational temperature and emission intensity profiles in silane plasmas
Stamou S., Mataras D., Rapakoulias D.
J. Phys. D: Appl. Phys., Vol: 31, No: 19 , 1998
Rf breakdown of low-pressure gas and a novel method for determination of electron-drift velocities in ases
Lisovskiy V.A., Yegorenkov V.D.
J. Phys. D: Appl. Phys., Vol: 31, No: 23 , 1998
Spatial investigation of a large diameter surface wave-excited plasma and its electromagnetic mode
Wu Cong-Feng, Wu Shuai, Zhan Ru-Juan
J. Phys. D: Appl. Phys., Vol: 31, No: 24 , 1998
Selective heating of high-pressure vapour elements by ion-cyclotron resonance
Compant La Fontaine A., Louvet P., Le Gourrierec P., Pailloux A.
J. Phys. D: Appl. Phys., Vol: 31, No: 7 , 1998
Plasma processing of LiNbO[3] in a hydrogen/oxygen radio-frequency discharge
Turcicova H., Perlna V., Vacik J., Cervena J., Zemek J., Zelezny V., Arend H.
J. Phys. D: Appl. Phys., Vol: 31, No: 9 , 1998
Spectral breaking of high-power microwave pulses propagating in a self-induced plasma
Koretzky E., Kuo S.P., Kim J.
J. Plasma Phys., Vol: 59, No: 2 , 1998
Positive ions in RF discharge plasmas of C[4]F[8]/Ar and C[4]F[8]/O[2] mixtures
Hirose Yuji, Ishikawa Itsuo, Sasaki Shinya et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 10 , 1998
Concentric spread plasma source
Watanabe Seiichi, Sumiya Masahiro, Kawasaki Sunao
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 10 , 1998
Negative ion formation in SiO[2] etching using a pulsed inductively coupled plasma
Choi Chang Ju, Kwon O Sung, Seol Yeo Song et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 12B , 1998
Spatial and temporal behavior of radicals in inductively coupled plasm for SiO[2] etching
Hayashi Shigenori, Yamanaka Michinari, Kubota Masafumi, Ogura Mototsugu
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 12B , 1998
Highly selective SiO[2] etching using inductively coupled plasma source with a multispiral coil
Yamanaka M., Hayashi Sh., Kubota M., Nakagawa H.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Enhancement of mask selectivity in SiO[2] etching with a phase-controlled pulsed inductively coupled plasma
Shin K.S., Chi K.K., Kang Ch.J., Jung Ch., Jung Ch.O., Moon J.T., Lee M.Y.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
High density aluminum etcher process window characterization and comparison
Jacobs J., Saito K., Yamamoto J.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
A study of the O[2]-SO[2] plasma etch chemistry for top surface imaging photoresist dry development
Huang Z.S., Melaku Y., Nguyen W.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Mechanism of radical control in capacitive RF plasma for ULSI processing
Tatsumi T., Hayashi H., Morishita S., Noda Sh., Okigawa M., Itabashi N., Hikosaka Y., Inoue M.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Monitoring of electron energy distribution change from optical emission for nonmagnetic ultrahigh-frequency plasma
Kinoshita K., Noda Sh., Okigawa M., Hirosaka Y., Itabashi N., Inoue M.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Production and control of low-pressure Ar and CF[4] plasmas using surface waves
Nagatsu M., Ghanashev I., Morita Sh., Sugai H.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
The correlation netween an electric field and the metastable chlorine ion density distributions in an ultrahigh-frequency plasma
Nakano T., Samukawa S.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 5A , 1998
Experimental study on heat flux from an argon RF plasma using laser interferometry method
Takaki K., Takahashi A., Fujiwara T.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 6A , 1998
Study on initial growth of particles in low-pressure and low-power GeH[4] RF discharges using the high-sensitivity photon-counting laser-light-scattering method
Kawasaki Hirosharu, Sakamoto Kazutaka, Maeda Shinichi et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 10B , 1998
Characteristics of a large-diameter surface-wave mode microwave-induced plasma
Kaneko E., Okamoto T., Watanabe S. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 2A , 1998
Similarities in spatial distributions of absolute GeH[2] density, radical production rate and particle amount in GeH[4] RF discharges
Kawasaki H., Kida J., Sakamoto K. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Deposition of micro-crystalline β-C[3]N[4] films by an inductively-coupled-plasma (ICP)sputtering method
Hsu Ch.-Y., Hong F.Ch.-N.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 6B , 1998
Theoretical model of a stationary low-pressure plasma source based on surface type X-mode
Girka V.O.
Phys. scr., Vol: 58, No: 4 , 1998
Model and measurements for a planar inductive oxygen discharge
Gudmundsson J.T., Lieberman M.A.
Plasma Sources Sci. and Technol., Vol: 7, No: 1 , 1998
Power transfer efficiency and mode jump in an inductive RF discharge
Suzuki K., Nakamura K., Ohkubo H., Sugai H.
Plasma Sources Sci. and Technol., Vol: 7, No: 1 , 1998
Surface wave sustained plasmas in a metal bound plasma slab
Cooperberg D.J., Birdsall C.K.
Plasma Sources Sci. and Technol., Vol: 7, No: 1 , 1998
Fast modelling of low-pressure radio-frequency collisional capacitively coupled discharge and investigation of the formation of a non-Maxwellian electron distribution function
Berezhnoi S.V., Kaganovich I.D., Tsendin L.D.
Plasma Sources Sci. and Technol., Vol: 7, No: 3 , 1998
A coupled two-sheath simulation of RF bias at high electronegativities
Kanakasabapathy S.K., Overzet L.J.
Plasma Sources Sci. and Technol., Vol: 7, No: 3 , 1998
Neutral pumping in a helicon discharge
Gilland J., Breun R., Hershkowitz N.
Plasma Sources Sci. and Technol., Vol: 7, No: 3 , 1998
Improvements to the floating double probe for time-resolved measurements in pulsed rf plasmas
Smith Brian A., Ovrzet Lawrence J.
Rev. Sci. Instrum. , Vol: 69, No: 3 , 1998
Влияние матрицы в масс-спектрометрии с использованием индуктивно связанной плазмы
Пунышев А.А., Васильева Н.Л., Голик С.В.
Ж. прикл. спектроскопии, Vol: 65, No: 5 , 1998
Особенности α-γ-перехода в ВЧ разряде низкого давления в аргоне
Лисовский В.А.
Ж. техн. физ., Vol: 68, No: 5 , 1998
Кинетический коэффициент отражения электронов в кнудсеновской низковольтной дуге
Алексеев Н.И.
Ж. техн. физ., Vol: 68, No: 5 , 1998
Аналитическая модель поведения электрических полей в столкновительном ВЧ-разряде низкого давления
Лисовский В.А., Егоренко В.Д.
Изв. вузов. Физ., Vol: 41, No: 12 , 1998
Формирование структур из макрочастиц в плазме ВЧ разряда индукционного типа
Герасимов Ю.В., Нефедов А.П., Синельщиков В.А., Фортов В.Е.
Письма в ЖТФ, Vol: 24, No: 19 , 1998
Энергетическая цена иона в комбинированном индукционно-емкостном ВЧ разряде
Дудин С.В., Зыков А.В., Положий К.И., Фареник В.И.
Письма в ЖТФ, Vol: 24, No: 22 , 1998
Индуктивный высокочастотный разряд низкого давления в смеси инертных газов и галогенов для экономичных безртутных люминeсцентных источников света
Головицкий А.П.
Письма в ЖТФ, Vol: 24, No: 6 , 1998
Определение коэффициентов переноса электронов в аргоне из кривых зажигания ВЧ и комбинированного разрядов низкого давления
Лисовский В.А.
Письма в ЖТФ, Vol: 24, No: 8 , 1998
Термодиффузионное расслоение плазмы непрерывного СВЧ разряда
Вихарев А.Л., Горбачев А.М., Иванов О.А., Колыско А.Л., Кузнецов О.Ю.
Письма в ЖЭТФ, Vol: 67, No: 7-8 , 1998
Влияние структуры электромагнитного поля на распределение интенсивности ионизации в плазме газового СВЧ разряда с электронно-циклотронным резонансом
Кудряшов С.А., Яфаров Р.К.
Радиотехн. и электрон. (Россия), Vol: 43, No: 1 , 1998
Резонаторный СВЧ-разряд в смеси водорода с метаном
Лебедев Ю.А., Солдатова И.В., Эпштейн И.Л., Холодкевич О.И.
Теплофиз. высок. температур, Vol: 36, No: 1 , 1998
Возникновение популяции холодных электронов в высокочастотном емкостном разряде низкого давления как аналог теплового взрыва
Бережной С.В., Каганович И.Д., Цендин Л.Д.
Физ. плазмы, Vol: 24, No: 7 , 1998
Динамика нагрева электронов в столкновительном ВЧ-разряде в гелии: эксперименты, расчеты и модель
Квандт Э., Катш Г.-М.
Физ. плазмы, Vol: 24, No: 7 , 1998
High-power (0.4-1.2 kW) argon surface-wave plasma for liquid solution analysis
Besner A., Hubert J.
Appl. Spectrosc. , Vol: 52, No: 6 , 1998
Determination of the gas temperature in high-pressure microwave discharges in hydrogen
Gritsinin S.I., Kossyi I.A., Malykh N.I., Ral`chenko V.G., Sergeichev K.F., Silakov V.P., Sychev I.A., Tarasova N.M., Chebotarev A.V.
J. Phys. D: Appl. Phys., Vol: 31, No: 20 , 1998
High-density plasma produced by a holey-plate surface-wave structure cavity
Yoshida Yoshikazu, Sakurai Takeki
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 10 , 1998
Transition of particle growth region in SiH[4] RF discharges
Kawasaki Hiroharu, Sakamoto Kazutaka, Maeda Shinichi et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 10 , 1998
High performance etching process for organic films using SO[2]/O[2] plasma
Ohkuni M., Kugo Sh., Sasaki T., Tateiwa K., Nikon H., Marsuo T., Kubota M.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
The effect of etching cases on notching and charging in high-density plasma
Tabara S.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 6A , 1998
Negative ion assisted silicon oxidation in downstream of microwave plasma
Koromogawa Takashi, Fujii Takashi, Yamashita Akihito, Horiike Yasuhiro, Shindo Haruo
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 9A , 1998
Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar
Tadokoro Masahiro, Hirata Hajime, Nakano Nobuhiko, Petrovic Zoran Lj., Makabe Toshiaki
Astrophys. J. , Vol: 58, No: 6 , 1998
Plasma measurements with triple and single probes in an asymmetrical parallel plate rf plasma reactor
Kubo Takashi, Kawata Hiroaki, Murata Kenji
Rev. Sci. Instrum. , Vol: 69, No: 7 , 1998
Инициированный подкритичный стимерный сверхвысокочастотный разряд и проблема глобальной очистки атмосферы Земли от фреонов
Грачев Л.П., Есаков И.И., Ходатаев К.В.
Ж. техн. физ., Vol: 68, No: 12 , 1998
Особенности развития импульсных СВЧ разрядов в квазиоптическом пучке в различных газах
Грачев Л.П., Есаков И.И., Ходатаев К.В.
Ж. техн. физ., Vol: 68, No: 4 , 1998
О модели Томсона ВЧ-разряда конечной длины
Кирпичников А.П.
Изв. вузов. Физ., Vol: 41, No: 2 , 1998
Определение концентрации электронов в разряде с жидкими неметаллическими электродами в воздухе при атмосферном давлении по поглощению зондирующего СВЧ излучения
Баринов Ю.А., Каплан В.Б., Рождественский В.В., Школьник С.М.
Письма в ЖТФ, Vol: 24, No: 23 , 1998
Численное исследование трансформаторного разряда в статическом режиме
Кулумбаев Э.Б., Лелевкин В.М.
Теплофиз. высок. температур, Vol: 36, No: 6 , 1998
Drift wave stabilization by means of a specific magnetic field inhomogeneity
Beckmann M., Himmel G.
J. Phys. D: Appl. Phys., Vol: 31, No: 14 , 1998
Nonlinear mode competition between unstable drift waves in an rf heated ring discharge
Beckmann M., Himmel G.
J. Phys. D: Appl. Phys., Vol: 31, No: 14 , 1998
Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge
El-Fayoumi I.M., Jones I.R., Turner M.M.
J. Phys. D: Appl. Phys., Vol: 31, No: 21 , 1998
Two-dimensional bounce-averaged Fokker-Planck modelling of an electron cyclotron resonance plasma source
Smirnov A.P., Suetin N.V., Shmelev A.B.
J. Plasma Phys., Vol: 59, No: 2 , 1998
Microwave plasma in a multicusp circular waveguide with a dimension below cutoff
Bhattacharjee Sudeep, Amemiya Hiroshi
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 10 , 1998
Aluminum etch and after-corrosion characteristics in a m=0 helicon wave plasma etcher
Ha Jae Hee, Yim Myoung-ho, Kim Jae-jeong
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 12B , 1998
Effect of post plasma treatment of reliability of electron cyclotron resonance chemical vapor deposited SiOF films
Lee Seoghyeong, Park Jong-Wan
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 12B , 1998
The optimization of the deposition variables for high photoconductivity a-Si:H films prepared by electron cyclotron resonance plasma chemical vapor deposition
Kang Moonsang, Koo Yongseo, An Chul
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 12B , 1998
Variation of radial plasma density profile with the excitation frequency in a magnetron-type plasma
Wickramanayaka S., Li Y., Iizuka S., Takagi K. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4A , 1998
Influence of pulsed electron cyclotron resonance plasma on gate electrode etching
Rujiwara N., Maruyama T., Miyatake H.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Reduction of charge build-up with pulse-modulated bias in pulsed electron cyclotron resonance plasma
Maruyama T., Fujiwara N., Ogino S., Miyatake H.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Enhancement of reactivity in Au etching by pulse-time-modulated Cl[2] plasma
Ohtake H., Samukawa S., Oikawa H., Nashimoto Y.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Effects of charge build-up of underlying layer by high aspect ratio etching
Yonekura K., Kiritani M., Sakamori Sh., Yokoi T., Fujiwara N., Miyatake H.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Effect of electron shading on gate oxide degradation
Sakamori Sh., Maruyama T., Fujiwara N., Miyatake H.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
Reactive ion etching mechanism of RuO[2] thin films in oxygen plasma with the addition of CF[4], Cl[2], and N[2]
Lee E.-J., Kim J.-W., Lee W.-J.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 5A , 1998
Changes in Raman spectra with deposition conditions and plasma treatment of diamond like carbon thin films
Endo K., Miyamura T., Kitaori N. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 6A , 1998
Estimation of sidewall nonradiative recombination in GaInAsP/InP wire structures fabricated by low energy electron-cyclotron-resonance reactive-ion-beam-etching
Tamura M., Ando T., Nunoya N. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 6A , 1998
Slant slot antenna-type electron cyclotron resonance plasma source
Watanabe Seiichi, Tamura Hitoshi, Sumiya Masahiro, Furuse Muneo, Kawasaki Sunao
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 9A , 1998
New electrodeless light source intensified by electron cyclotron resonance heating
Zhang R., Kanno M., Nishida Y. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 3B , 1998
Oxidation of GaAs using helicon-wave excited nitrogen-oxygen-argon plasma
Wada S., Kasahara F., Hara A. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 37, No: 4B , 1998
A theoretical model of an ECRH gaseous plasma source in a flaring magnetic field
Meis C., Marcel R.
Nuovo cim. D, Vol: 20, No: 10 , 1998
Measurements of electron density in helicon-wave excited high-density reactive plasmas by vacuum ultraviolet emission spectroscopy
Kawai Y., Sasaki K., Kadota K.
Plasma Sources Sci. and Technol., Vol: 7, No: 1 , 1998
Series resonance sustained plasmas in a metal bound plasma slab
Cooperberg D.J., Birdsall C.K.
Plasma Sources Sci. and Technol., Vol: 7, No: 2 , 1998
Theoretical and experimental investigations of the electromagnetic field within a planar coil, inductively coupled RF plasma source
El-Fayoumi I.M., Jones I.R.
Plasma Sources Sci. and Technol., Vol: 7, No: 2 , 1998
Design aspects of a compact, single-frequency, permanent-magnet electron cyclotron resonance ion source with a large uniformly distributed resonant plasma volume
Liu Y., Alton G.D., Mills G.D., Reed C.A., Haynes D.L.
Rev. Sci. Instrum. , Vol: 69, No: 3 , 1998
Production of multicharged radioactive ion beams: New results for the 1+→n+ method with the MINIMAFIOS and SARA-CAPRICE electron cyclotron resonance ion sources
Lamy T., Bruandet J.-F., Chauvin N., Curdy J.-C., Fruneau M., Geller R., Gimond G., Sole P., Vieux-Rochas J.-L., Gaubert G., Maunoury L., Sortais P., Villari A.C.C.
Rev. Sci. Instrum. , Vol: 69, No: 3 , 1998
Measurement of ion charge state distributions iside electron cyclotron resonance neon and chlorine plasmas by x-ray spectroscopy
Grubling P., Kuchler D., Ullrich A., Werner T., Zschornack G.
Rev. Sci. Instrum. , Vol: 69, No: 3 , 1998
A two-inch dc/rf circular magnetron sputtering gun for a miniature chamber for an insitu experiment
Rue Gi-Hong, Kim Hyung-Kook
Rev. Sci. Instrum. , Vol: 69, No: 4 , 1998
A new sputtering device of radio-frequency magnetron discharge using a rectangular hollow-shaped electrode
Ohtsu Yasunori, Tsurume Yoshinobu, Fujita Hiroharu
Rev. Sci. Instrum. , Vol: 69, No: 4 , 1998
Comparison of the charge state distributions of electron cyclotron resonance ion sources working in high B mode at different frequencies
Gammino S., Ciavola G.
Rev. Sci. Instrum. , Vol: 69, No: 8 , 1998
Диффузионная модель газового СВЧ-разряда в магнитном поле с распределенным вводом энергии
Гуляев Ю.В., Черкасов И.Д., Яфаров Р.К.
Докл. РАН, Vol: 358, No: 3 , 1998
Получение GaN молекулярно-пучковой эпитаксией с активацией азота ВЧ-емкостным магнетронным разрядом
Мамутин В.В., Жмерик В.Н., Шубина Т.В., Торопов А.А., Лебедев А.В., Векшин В.А., Иванов С.В., Копьев П.С.
Письма в ЖТФ, Vol: 24, No: 12 , 1998
Формирование алмазоподобной фазы в условиях преимущественного осаждения неалмазного углерода в плазме газового СВЧ-разряда с электронным циклотронным резонансом
Суздальцев С.Ю., Сысуев С.В., Яфаров Р.К.
Письма в ЖТФ, Vol: 24, No: 4 , 1998
Диффузионная модель стационарного газового разряда в неоднородном внешнем магнитном поле при СВЧ вакуумно-плазменной обработке с электронно-циклотронным резонансом
Гуляев Ю.В., Черкасов И.Д., Яфаров Р.К.
Радиотехн. и электрон. (Россия), Vol: 43, No: 8 , 1998
Электродный шаровой СВЧ разряд. Феноменология и результаты зондовых измерений
Бардош Л., Лебедев Ю.А.
Ж. техн. физ., Vol: 68, No: 12 , 1998
Роль прианодных процессов в инициировании BЧ-разряда в вакууме
Бурмакинский И.Ю., Каретников М.Д., Свечников А.Б.
Физ. плазмы, Vol: 24, No: 1 , 1998
Vibrations in vertical strings of dust grains
Vladimirov S.V., Cramer N.F.
Phys. scr., Vol: 58, No: 1 , 1998
The electromagnetic basis of the transformer model for an inductively coupled RF plasma source
El-Fayoumi I.M., Jones I.R.
Plasma Sources Sci. and Technol., Vol: 7, No: 2 , 1998
Определение дрейфовой скорости электронов в водороде из кривых зажигания ВЧ-разряда низкого давления
Лисовский В.А.
Изв. вузов. Физ., Vol: 41, No: 4 , 1998
Излучение и энерговклад импульсно-периодического разряда в гелии
Балабанов В.В., Василяк Л.М., Костюченко С.В., Красночуб А.В.
Теплофиз. высок. температур, Vol: 36, No: 6 , 1998
Measurement of the expansion velocity of the electrode sheaths in RF glow discharge and its physical mechanism
Sando K., Sugawara M.
Jpn. J. Appl. Phys., Part 1, Vol: 36, No: 5A , 1997
Two-dimensional fluid simulation of capacitively coupled RF electronegative plasmas
Chung T.H., Meng L., Yoon H.J., Lee J.K.
Jpn. J. Appl. Phys., Part 1, Vol: 36, No: 5A , 1997
Super-wide electron cyclotron resonance plasma source excited by an independent double-slot antenna
Yoshiki H., Amadatsu Sh., Itadani K., Saijo T.
Jpn. J. Appl. Phys., Part 1, Vol: 36, No: 10А , 1997
Dynamic model of the radio-frequency plasma sheath in a highly asymmetric discharge cell
Sobolewski M. A.
Astrophys. J. , Vol: 56, No: 1 , 1997
Magnetic induction and plasma impedance in a cylindrical inductive discharge
Gudmundsson J.T., Lieberman M.A.
Plasma Sources Sci. and Technol., Vol: 6, No: 4 , 1997
Dependence of frequency and pressure on electron energy distribution functions in low pressure plasma
Akashi H., Samukawa S., Takanashi N., Sasaki T.
Jpn. J. Appl. Phys., Part 1, Vol: 36, No: 7A , 1997
Two-dimensional nonlocal heating theory of planar-type inductively coupled plasma discharge
Yoon N. S., Hwang S. M., Choi Duk-In
Astrophys. J. , Vol: 55, No: 6 , 1997
Influence of different coil geometries on the spatial distribution of the plasma density in planar inductively coupled plasmas
Schwabedissen A., Benck E. C., Roberts J. R.
Astrophys. J. , Vol: 56, No: 5 , 1997
Clusters of ionization clumps in weakly ionized annular rf discharges
Liu Chih-Yi, I Lin
Astrophys. J. , Vol: 57, No: 3 , 1997
A discharge as atomic beam source for hydrogen maser
Gheorghiu O.C., Gheorghe Viorica N.
Rom. Rep. Phys., Vol: 49, No: 5-7 , 1997
Кинетика электронов в плазме разряда, создаваемого в свободном пространстве сфокусированным СВЧ пучком
Кузовников А.А., Шибков В.М., Шибкова Л.В.
Ж. техн. физ., Vol: 67, No: 6 , 1997
Мелкомасштабные динамические структуры в микроволновых разрядах низкого давления
ВВеденский Н.В., Вдовичева Н.К., Жарова Н.А., Шершевский И.А., Гильденбург В.Б., Ясин М.И.
Изв. вузов. Радиофиз., Vol: 40, No: 8 , 1997
Нагрев газа в условиях свободно локализованного СВЧ-разряда в воздухе. Математическое моделирование
Шибков В.М.
Теплофиз. высок. температур, Vol: 35, No: 5 , 1997
Конвективная модель микроволнового разряда в газе при атмосферном давлении в форме пространственно локализованного плазменного образования
Сковорода А.А.
Ж. эксперим. и теор. физ., Vol: 112, No: 3 , 1997
Нагрев газа в условиях свободно локализованного СВЧ-разряда в воздухе. Эксперимент
Шибков В.М.
Теплофиз. высок. температур, Vol: 35, No: 6 , 1997
Предыонизация положительного столба высокочастотного емкостного разряда в потоке молекулярного газа электронами приэлектродного слоя в поле столба
Баранов И.Я., Протасова Т.В.
Физ. плазмы, Vol: 23, No: 1 , 1997
К теории СВЧ-разряда при атмосферном давлении
Тимофеев А.В.
Физ. плазмы, Vol: 23, No: 2 , 1997
A higer-order radial mode of m=0 helicon waves
Sakawa Y., Koshikawa N., Shoji T.
Plasma Sources Sci. and Technol., Vol: 6, No: 1 , 1997
Распределение ионов по зарядовым состояниям в мощном импульсном разряде, поддерживаемом излучением миллиметрового диапазона длин волн в условиях электронно-циклотронного резонанса
Голубев С.В., Зорин В.Г., Разин С.В.
Письма в ЖТФ, Vol: 23, No: 8 , 1997
О подобии высокочастотного факела волне пробоя
Асиновский Э.И., Марковец В.В.
Теплофиз. высок. температур, Vol: 35, No: 4 , 1997
Pulse-time-modulated electron cyclotron resonance plasma etching with low radio-frequency substrate bias
Samukawa S.
Appl. Phys. Lett. , Vol: 68, No: 3 , 1996
Kinetic model of an RF discharge in oxygen
Dai X.J.
Austral. J. Phys., Vol: 49, No: 6 , 1996
Electron energy dynamics in a RF discharge with trapezoidal driving voltage: Comparison of experiment and particle-in-cell Monte Carlo collision simulation
Quandt E., Katsch H.-M., Mark P.
J. Phys. D: Appl. Phys., Vol: 29, No: 8 , 1996
The influence of metastables on the plasma-induced emission in a helium rf discharge
Katsch H.-M., Quandt E., Schneider Th.
Plasma Phys. and Contr. Fusion, Vol: 38, No: 2 , 1996
A fluid model of the bulk plasma in a cylindrical magnetized low-pressure RF discharge and comparison with PIC-MC simulation results
Krimke R., Urbassek H.M.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
Spatial distributions of power and ion densities in RF excited remote plasma reactors
Peres I., Kushner M.J.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
A non-local hydrodynamic approach to plasma heating in surface wave sustained discharges
Aliev Yu.M., Schluter H., Shivarova A.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
Явление контракции газового разряда как фазовый переход к новой диссипативной структуре
Голубовский Ю.Б., Некучаев В.О., Пелюхова Е.Б.
Ж. техн. физ., Vol: 66, No: 3 , 1996
Ponderomotive effects on the expansion of a photoplasma in the microwave range
Leloutre B., Furtlehner J.-P., Camus P.
J. Plasma Phys., Vol: 55, No: 1 , 1996
One-dimensional solution for electron heating in an inductively coupled plasma discharge
Yoon N.S., Kim S.S., Chang C.S., Choi D.-I.
Astrophys. J. , Vol: 54, No: 1 , 1996
Metastable atoms and the electron distribution function in a helium discharge positive column
Alexandrov V.M., Flender U., Kolokolov N.B., Rykova O.V., Wiesemann K.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
Plasma structure formation in a free-localized high-pressure microwave discharge
Sinkevich O.A., Sosnin V.E.
J. Phys. D: Appl. Phys., Vol: 29, No: 10 , 1996
Discontinuous transitions between alpha and gamma regimes of rf capacitive discharge
Odrobina I., Kando M.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
Диффузный этап развития безэлектродного СВЧ разряда в воздухе среднего давления
Грачев Л.П., Есаков И.И., Мишин Г.И.
Ж. техн. физ., Vol: 66, No: 12 , 1996
Стадии развития безэлектродного СВЧ разряда
Грачев Л.П., Есаков И.И., Мишин Г.И., Ходатаев К.В.
Ж. техн. физ., Vol: 66, No: 7 , 1996
Свободно локализованный импульсно-периодический СВЧ-разряд в воздухе. Кинетика нагрева газа
Кузовников А.А., Шибков В.М., Шибкова Л.В.
Теплофиз. высок. температур, Vol: 34, No: 3 , 1996
Свободно локализованный импульсно-периодический СВЧ-разряд в воздухе. Напряженность электрического поля в плазме
Шибков В.М.
Теплофиз. высок. температур, Vol: 34, No: 4 , 1996
The control of gas temperature and velocity fields of a RF induction thermal plasma by injecting secondary gas
Nishiyama H., Muro Y., Kamiyama Sh.
J. Phys. D: Appl. Phys., Vol: 29, No: 10 , 1996
Heating mode transition induced by a magnetic field in a capacitive rf discharge
Turner M.M., Hutchinson D.A.W., Doyle R.A., et al.
J. Electron. Mater., Vol: 76, No: 12 , 1996
The effects of magnetic fields on a planar inductively coupled argon plasma
Lee H.-J., Yang II-D., Whang K.-W.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
Reactor geometry and plasma uniformity in a planar inductively coupled radio frequency argon discharge
Stittsworth J.A., Wendt A.E.
Plasma Sources Sci. and Technol., Vol: 5, No: 3 , 1996
Wall association and recirculation in expanding thermal arc plasmas
Meulenbroeks R.F.G., Schram D.C., van de Sanden M.C.M., van der Mullen J.A.M.
J. Electron. Mater., Vol: 76, No: 11 , 1996
Генерация квазистационарных токов и магнитных полей в плазме факела, возбуждаемого циркулярно поляризованным микроволновым излучением
Анпилов А.М., Бережецкая Н.К., Копьев В.А., Коссый И.А., Сатунин С.Н.
Ж. техн. физ., Vol: 66, No: 2 , 1996
Formation of duct and self-focusing in plasma by high power microwave
Ito H., Nishida Y., Yugami N.
J. Electron. Mater., Vol: 76, No: 24 , 1996
A two-region model of a radiofrequency low-pressure, high-density plasma
Wise R.S., Lymberopoulos D.P., Economou D.J.
Plasma Sources Sci. and Technol., Vol: 4, No: 3 , 1995
Управление параметрами приэлектродных слоев высокочастотного емкостного разряда
Баранов И.Я.
Физ. плазмы, Vol: 21, No: 6 , 1995
Modeling and measurement of submicron particles in RF plasmas in Ar{*}
Hosokawa Y., Kitajima T., Makabe T.
Austral. J. Phys., Vol: 48, No: 3 , 1995
Dynamics of charged species in the afterglow region of a low-pressure microwave plasma
Wei T.-Ch., Collins L.R., Phillips J.
J. Phys. D: Appl. Phys., Vol: 28, No: 2 , 1995
Monte Carlo simulation of electron motion in the cathode region of a magnetron glow discharge in argon
Li J., Chen Q.-M., Li Z.-G.
J. Phys. D: Appl. Phys., Vol: 28, No: 4 , 1995
Spatiotemporal electron dynamics in radio-frequency glow discharges: Fluid versus dynamic Monte Carlo simulations
Lymberopoulos D.P., Economou D.J.
J. Phys. D: Appl. Phys., Vol: 28, No: 4 , 1995
Rf plasma properties of flat electrodes with multi-input terminals
Hirakuri K.K., Mutskura N., Machi Y.
Vacuum, Vol: 46, No: 1 , 1995
Зарядка и экранирование микрочастиц в приэлектродном слое высокочастотного газового разряда
Швейгерт В.А.
Письма в ЖТФ, Vol: 21, No: 12 , 1995
Поведение постоянного потенциала плазмы в ВЧ разряде низкого давления
Лисовский В.А., Красников О.В.
Письма в ЖТФ, Vol: 21, No: 22 , 1995
Пространственная структура ВЧ-разряда в аргоне низкого давления
Иванов В.В., Попов А.М., Рахимова Т.В.
Физ. плазмы, Vol: 21, No: 6 , 1995
Two new planar coil designs for a high pressure radio frequency plasma source
Munsat T., Hooke W.M., Bozeman S.P., Washburn S.
Appl. Phys. Lett. , Vol: 66, No: 17 , 1995
Kinetic theory of very high-frequency and high-pressure continuous atomic discharges
Peyraud Cuenca N., Faucher P.
J. Plasma Phys., Vol: 54, No: 3 , 1995
Electric fields in high-frequency parallel-plate helium discharges
Hebner G.A., Greenberg K.E., Riley M.E.
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Electron acceleration resonant with sheath motion in a low-pressure radio frequency discharge
Okuno Y., Ohtsu Y., Fujita H.
Appl. Phys. Lett. , Vol: 64, No: 13 , 1994
Analysis of a one-dimensional, steady-state magnetron discharge
Cramer N.F.
J. Phys. D: Appl. Phys., Vol: 30, No: 18 , 1994
Electrostatic coupling of antenna and the shielding effect in inductive RF plasmas
Sugai H., Nakamura K., Suzuki K.
Jpn. J. Appl. Phys., Part 1, Vol: 33, No: 4B , 1994
Production mechanism of a large-diameter uniform electron cyclotron resonance plasma generated by a circular TE[01] mode microwave
Hirotsu N., Yamaguchi T., Hidaka R., Tanaka M., Kawai Y.
Jpn. J. Appl. Phys., Part 1, Vol: 33, No: 5A , 1994
Эволюция структуры газового разряда в фокусе СВЧ излучения в зависимости от давления
Грачев Л.П., Есаков И.И., Мишин Г.И., Ходатаев К.В., Цыпленков В.В.
Ж. техн. физ., Vol: 64, No: 1 , 1994
Разряд в воздухе в квазиоптическом СВЧ резонаторе
Грачев Л.П., Есаков И.И., Мишин Г.И., Ходатаев К.В.
Ж. техн. физ., Vol: 64, No: 2 , 1994
Параметры плазмы и динамика формирования нитевидных образований в СВЧ-разряде высокого давления
Вихарев А.Л., Горбачев А.М., Иванов О.А., Колыско А.Л.
Ж. эксперим. и теор. физ., Vol: 106, No: 1 , 1994
Исследование неустойчивости несамостоятельного СВЧ-разряда в азотно-кислородных смесях
Попов Н.А.
Теплофиз. высок. температур, Vol: 32, No: 2 , 1994
Влияние формы высокочастотного разряда и покрытия электродов диэлектриком на снос газовым потоком
Баранов И.Я.
Физ. плазмы, Vol: 20, No: 4 , 1994
Effects of downstream magnetic field collimation on ion behavior in electron cyclotron resonance microwave plasma
Okuno Y., Ohtsu Y., Fujita H.
IEEE Trans. Plasma Sci. Pt 3, Vol: 22, No: 3 , 1994
Application of radio-frequency discharged plasma produced in closed magnetic neutral line for plasma processing
Uchida T.
Jpn. J. Appl. Phys., Part 1, Vol: 33, No: 1A , 1994
Предельные соотношения для ВЧ-индукционного разряда
Кирпичников А.П.
Изв. вузов. Физ., Vol: 36, No: 1 , 1993
A comparison of RF electrode sheath models
Godyak V.A., Piejak R.B., Sternberg N.
IEEE Trans. Plasma Sci. Pt 3, Vol: 21, No: 4 , 1993
Electron density and collision frequency of microwave-resonant-cavity-produced discharges
McColl W., Brooks C., Brake M.L.
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A two-dimensional fluid model for an argon rf discharge
Passchier J.D.P., Goedheer W.J.
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Space and time resolved electric field vector distribution in radiofrequency discharges between unequal area electrodes
Alberta M.P., Debontride H., Derouard J., Sadeghi N.
J. phys. Sec. 3, Vol: 3, No: 1 , 1993
On the influence of energy transfer efficiency on the electron energy distribution function in HF sustained rare gas plasmas: Experimental and numerical study
Kortshagen U.
J. Phys. D: Appl. Phys., Vol: 26, No: 8 , 1993
Collisionnal electron heating in a RF discharge
Katsch H.-M., Muller K.G., Quand E.
J. Phys. D: Appl. Phys., Vol: 26, No: 12 , 1993
О механизме осуществления нормальной плотности тока в высокочастотном α-типа разряде, горящем в инертных газах
Райзер Ю.П., Шнейдер М.Н.
Физ. плазмы, Vol: 19, No: 9 , 1993
Ion kinetic-energy distributions in argon rf glow discharges
Olthoff J.K., Van Brunt R.J., Radovanov S.B.
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Low pressure argon plasma created by a microwave surface wave
Elakshar F.F., Isamil L.Z.
Int. J. Electron, Vol: 1992, No: , published: 01 January 1992
Численный анализ диффузионно-дрейфовой и кинетической моделей ВЧ разряда низкого давления
Волкова Е.А., Попов А.М., Поповичева О.Б., Рахимова Т.В., Феоктистов В.А.
Физ. плазмы, Vol: 1992, No: , published: 01 January 1992
A field-free dense plasma produced by electron cyclotron resonance in a linear multipole field
Fukao Masayuki, Harada Yasuo
J. Appl. Phys. , Vol: 1992, No: , published: 01 January 1992
Pressure dependence of the mean electron energy in the bulk plasma of an RF discharge in argon
Seebock R.J., Kohler W.E., Romheld M.
Contrib. Plasma Phys., Vol: 32, No: 6 , 1992
The validity of Bohm`s sheath criterion in rf discharges
Riemann K.-U.
Phys. Fluids. B, Vol: 4, No: 9 , 1992
Pressure dependence of the electrical potential and electron temperature in a microwave-generated plasma
Ismail Lotfi Zaki, El-Magd Ayman Abou
IEEE Trans. Plasma Sci. Pt 3, Vol: 20, No: 2 , 1992
The space-time-averaging procedure and modeling of the RF discharge. PtII. Model of collisional low-pressure RF discharge
Kaganovich Igor D., Tsendin Lev D.
IEEE Trans. Plasma Sci. Pt 3, Vol: 20, No: 2 , 1992
Low-pressure RF discharge in the free-flight regime
Kaganovich Igor D., Tsendin Lev D.
IEEE Trans. Plasma Sci. Pt 3, Vol: 20, No: 2 , 1992
On the continuity equation for electrons in microwave-afterglow plasmas
Abdel-Gawad H.I.
J. Plasma Phys., Vol: 47, No: 2 , 1992
One-dimensional modeling for magneto-microwave plasma using the Monte Carlo method
Ikegawa Masato, Kakehi Yutaka, Kobayashi Junichi
Jpn. J. Appl. Phys., Part 1, Vol: 31, No: 6B , 1992
Электродинамическая модель фотоионизационного режима распространения неравновесного СВЧ разряда
Еремеев А.Г.
Физ. плазмы, Vol: 18, No: 10 , 1992
Динамика и кинетика СВЧ-разряда в аргоне
Коган Е.Я., Кузин Б.Ю.
Теплофиз. высок. температур, Vol: 30, No: 4 , 1992
Динамика разрядов в азоте в пучках электромагнитных волн
Бабаева Н.Ю., Мнацаканян А.Х., Найдис Г.В.
Физ. плазмы, Vol: 18, No: 8 , 1992
Формирование мелкомасштабной структуры СВЧ разряда в газе высокого давления
Вихарев А.Л., Горбачев А.М., Ким А.В., Колыско А.Л.
Физ. плазмы, Vol: 18, No: 8 , 1992
Динамика приэлектродных слоев, ангармоничность тока и батарейный эффект в асимметричном высокочастотном разряде низкого давления
Райзер Ю.П., Шнейдер М.Н.
Физ. плазмы, Vol: 18, No: 9 , 1992
Two-dimensional modeling of electron cyclotron resonance plasma production
Yasaka Yasuyoshi, Fukuyama Atsushi, Hatta Akimitsu, Itatani Ryohei
J. Appl. Phys. , Vol: 72, No: 7 , 1992
Physical properties of a transverse high-frequency gas discharge. I. Basic properties and physical model of the discharge
Abramov V.P., Kerner B.S., Klenov S.L.
J. Phys. D: Appl. Phys., Vol: 25, No: 10 , 1992
Physical properties of a transverse high-frequency gas discharge. II. Spatially non-uniform states in the discharge plasma
Abramov V.P., Kerner B.S., Klenov S.L.
J. Phys. D: Appl. Phys., Vol: 25, No: 10 , 1992
Power efficiency oriented optimal design of high density CCP and ICP sources for semiconductor RF plasma processing equipment
Long Maolin
IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 3.
Power efficiency oriented optimal design of high density CCP and ICP sources for semiconductor RF plasma processing equipment
Long Maolin
IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 3.
Experimental study of effect of rare gas admisture on temperatures of microwave-excited oxygen discharge plasma
Sakamoto Takeshi, Naoi Kouichi, Matsuura Haruaki, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 1A
Heat transport simulation for atmospheric-pressure high-density microgap plasma
Kono Akihiro, Shibata Tomoyuki, Aramaki Mitsutoshi
Jpn. J. Appl. Phys., Part 1, Vol: 45, No: 2
Области pеализации pазличных типов СВЧ-pазpяда в квазиоптических электpомагнитных пучках
Александpов К.В., Гpачев Л.П., Есаков И.И., и дp.
Ж. техн. физ., Vol: 76, No: 11
On the reaction kinetics of chemicaly active molecular microwave plasmas
Stancu G.D., Pipa A.V., Lombardi G., et al.
Contrib. Plasma Phys., Vol: 45, No: 5-6
Analysis and kinetics of transient species in electrode near plasma and plasma boundary sheath of RF plasmas in molecular gases
Geigl M., Peters S., Gabriel O., et al.
Contrib. Plasma Phys., Vol: 45, No: 5-6
Ion molecule and dust particle formation in Ar/CH[4], Ar/C[2]H[2] and Ar/C[3]H[6] radio-frequency plasmas
Do H.T., Thieme G., Frohlich M., et al.
Contrib. Plasma Phys., Vol: 45, No: 5-6
Using the Stark broadening of the H[α], H[β] and H[γ] lines for the measurement of electron density and temperature in a plasma at atmospheric pressure
Yubero C., Calzada M.D., Garcia M.C.
J. Phys. Soc. Jpn., Vol: 74, No: 8
Computational studies of voltage in RF magnetron discharge
Yamamoto Masahiro, Nakashima Seiji, Yamanishi Hitoshi, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 44, No: 12
Dependences of plasma parameters on dilution gas content inductively coupled C[2]F[6]/Ar and C[2]F[6]/O[2] discharges
Kimura Takashi, Noto Masahisa
Jpn. J. Appl. Phys., Part 1, Vol: 44, No: 12
Simulation of step response of silane low-temperature pasma (1)
Yang Jing, Li Jing-Zhen, Sun Xiu-Quan, et al.
Acta phys. sin., Vol: 54, No: 7
PIC-MCC modeling of a capacitive RF discharge
Matyash K., Schneider R.
Contrib. Plasma Phys., Vol: 44, No: 7-8
Rotation of particles trapped in the sheath of a radio-frequency capacitively coupled plasma
Paeva G.V., Dahiya R.P., Kroesen G.M.W., et al.
IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 2
Temperature dependence and silane consumption during particle formation in Ar-silane RF capacitively coupled plasma
Sorokin M., Kroesen G.M.W., Stoffels W.W.
IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 2
Modeling of N[2]-H[2] capacitively coupled plasma for low-k material etching
Shon C.H., Makabe T.
IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 1
On rapid computation of time periodic steady state in simulation of capacitively coupled RF plasma
Kim H.C., Sul Y.T., Manousiouthakis V.I.
IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 1
Quasilinear collisionless electron heating in a weakly magnetized inductively coupled plasma
Sohbatzadeh F., Latifi H.
J. Plasma Phys., Vol: 70, No: 6
Effect of attaching gas addition on plasma parameters in inductive Ar/O[2] and Ar/CF[4] discharges
Kimura Takashi, Takai Tomoyoshi
Jpn. J. Appl. Phys., Part 1, Vol: 43, No: 10
Influences of gap distance on plasma characteristics in narrow gap capacitively coupled radio-frequency discharge
Ohtsu Yasunori, Fujita Hiroharu
Jpn. J. Appl. Phys., Part 1, Vol: 43, No: 2
Etching characteristics of manganese-doped zinc sulfide film using Cl[2]/CF[4] inductively coupled plasma
Yun Sun Jin, Kwon Kwang-Ho, Lee Yong-Eui, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 43, No: 5B
Sheath model for dual-frequency capacitively coupled plasmas
Denpoh Kazuki, Wakayama Go, Nanbu Kenichi
Jpn. J. Appl. Phys., Part 1, Vol: 43, No: 8A
Characteristics of two-electron-temperature in inductively coupled CF[4] plasmas
Huang Song, Ning Zhao-Yuan, Xin Yu, et al.
Acta phys. sin., Vol: 53, No: 10
Электpофизические и тепловые паpаметpы теpмической плазмы в высокочастотном индукционном pазpяде
Геpасимов А.В.
Изв. вузов. Физ., Vol: 47, No: 7
Эмиссионные хаpактеpистики плазмы низкой плотности на основе смеси гелий-хлоp
Шуаибов А.К., Дащенко А.И., Шевеpа И.В.
Оптика и спектроскопия, Vol: 97, No: 1
Измеpение темпеpатуpы дозвуковых потоков индукционной плазмы углекислого газа по эмиссионным спектpам
Быкова Н.Г., Кузнецова Л.А.
Физ. плазмы, Vol: 30, No: 11
Импульсно-пеpиодический факел в коаксиальном волноводе. Темпеpатуpа нейтpального компонента
Баpхудаpов Э.М., Гpицинин С.И., Дpейден Г.В., и дp.
Физ. плазмы, Vol: 30, No: 6
The reliability of measurements on electron energy distribution function in silane rf glow discharges
Lin Kui-Xun, Lin Xuan-Ying, Chi Ling-Fei, et al.
Chin. Phys., Vol: 12, No: 2
Influence of excitation frequency on the electron distribution function in capacitively coupled discharges in argon and helium
Abdel-Fattah Essam, Sugai Hideo
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 10
Plasma properties and ion energy distribution in DC magnetron sputtering assisted by inductively coupled RF plasma
Li Zhuguo, Miyake Shoji, Mori Masakazu
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 11
Spatio temporal variation of the density distributions in Ar RF plasmas using the Monte Carlo simualtion/legendre polynomial weighted sampling method
Horie I., Suzuki T., Kitamori K., Maruyama K.
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 3
Comparative studies of perfluorocarbon alternative gas plasmas for contact hole etch
Nakamura Shingo, Itano Mitsushi, Aoyama Hirokazu, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 9A
Ion densities and ionization fractions of sputtered titanium in inductively coupled plasma assisted sputtering
Nakamura Tadashi, Okimura Kunio
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 9A
Поверхность раздела прямого и возвратного течений внутри высокочастотного индукционного разряда
Герасимов А.В., Кирпичников А.П.
Докл. РАН, Vol: 389, No: 2
Анализ зарядки макрочастиц в приэлектродном слое емкостного высокочастотного разряда
Ваулина О.С., Самарян А.А., Джеймс Б., и др.
Ж. эксперим. и теор. физ., Vol: 123, No: 6
Аналог эффекта полого катода в высокочастотном емкостностном pазpяде низкого давления
Малик Д.А., Оpлов К.Е., Смиpнов А.С., Чеpноизюмская Т.В.
Письма в ЖТФ, Vol: 29, No: 12
О температуре газа в плазме электродного СВЧ-разряда пониженного давления в водороде
Лебедев Ю.А., Мокеев М.В.
Физ. плазмы, Vol: 29, No: 3
Application of modulation techniques to atomic emission spectrometry with inductively-coupled radio-drequency plasma and radio-frequency plasma and radio-frequency glow discharge plasma
Wagatsuma Kazuaki
Appl. Spectrosc. Rev., Vol: 37, No: 2
Annular profile of dust density near RF-powered electrode in capacitively coupled plasma
Ohtsu Y., Fujita H.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 4A
Particle modeling of inductively coupled plasma and radicals flow to predict etch rate of silicon
Shiozawa M., Nanbu K.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 4A
Observation of an inductively coupled RF discharge with one-turn internal antenna
Cicman P., Fujita H.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 5A
Simple monitoring method for RF plasmas by the insulated pulse probemethod
Deguchi M., Itatani R.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 7A
Insulated modulation probe method for monitoring RF plasmas
Deguchi M., Itaani R.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 7A
Efficiency of parallel-plate capacitive radio frequency discharge plasma
Ikegaki H., Tajima S., Endo M., Amemiya H.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 7A
A study of capacitively coupled plasma generation in single-loop
Shindo H., Kudo D., Fujhi S.
Jpn. J. Appl. Phys., Part 1, Vol: 41, No: 8B
Local and fast relaxation phenomena after laser-induced photodetachment in a strongly electronegative rf discharge
Yan M., Bogaerts A., Gijbels R., Goedheer W. J.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 65, No: 1
Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes
Dai Zhong-Ling, Wang You-Nian, Ma Teng-Cai
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 65, No: 3
Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas
Dai Zhong-Ling, Wang You-Nian
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 66, No: 2
Structure of ternary additive hard-sphere fluid mixtures
Malijevsky Alexander, Malijevsky Anatol, Yuste Santos B., Santos Andres, Haro Mariano Lopez de
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 66, No: 6
Weak fountains in a stratified fluid
Lin Wenxian, Armfield S. W.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 66, No: 6
Gas heating in low-pressure microwave argon discharges
Palmero A., Cotrino J., Lao C., Gonzalez-Elipe A. R.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 66, No: 6
Evolution of a Dust Void in a Radio-Frequency Plasma Sheath
Dahiya R. P., Paeva G. V., Stoffels W. W., Stoffels E., Kroesen G. M. W., Avinash K., Bhattacharjee A.
Phys. Rev. Lett., Vol: 89, No: 12
Probe measurements in RF electronegative gas discharges
Kazuyuki Ohe
Rom. Rep. Phys., Vol: 54, No: 1-5
Production of inductively coupled plasma in low pressure gases
Fujita H.
Rom. Rep. Phys., Vol: 54, No: 1-5
Collisional effects on ion energy and angular distributions incident on RF-biased electrodes
Qiu Hua-Tan, Wang You-Nian, Ma Teng-Cai
Acta phys. sin., Vol: 51, No: 6
Пробой воздуха убегающими электронами при электронно-циклотронном резонансе - экспериментальная модель механизма образования гигантских высотных разрядов
Сергейчев К.Ф., Сычев И.А.
Геомагнетизм и аэрон., Vol: 42, No: 4
Пыле-акустическая неустойчивость в плазме индукционного газового разряда
Зобнин А.В., Усачев А.Д., Петров О.Ф., Фортов В.Е.
Ж. эксперим. и теор. физ., Vol: 122, No: 3
Высокочастотный разряд в металлической камере
Шишкин А.Г., Шишкин Г.Г.
Радиотехн. и электрон. (Россия), Vol: 47, No: 3
Исследование ВЧ-разряда в смесях CO[2]-лазера при средних давлениях
Старостин С.А., Боллер К.Дж., Петерс П.Дж.М. и др.
Физ. плазмы, Vol: 28, No: 1
Слаботочный ВС-разряд среднего давления с вторичной фотоэмиссией электронов
Баранов И.Я.
Физ. плазмы, Vol: 28, No: 1
Бесконтактный метод изучения параметров приэлектродной области ВЧ-разряда
Александров А.Ф., Рябый В.А., Савинов В.П., Якунин В.Г.
Физ. плазмы, Vol: 28, No: 12
Распределение электронов и генерации гармоник при нагреве плазмы мощным излучением
Романов А.Ю., Силин В.П., Урюпин С.А., и др.
Физ. плазмы, Vol: 28, No: 8
Electron energy distributions in inductively coupled plasma of argon
Yonemura Shigeru, Nanbu Kenichi
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 12
Decomposition of N[2]O by microwave discharge of N[2]O/He or N[2]O/Ar mixtures
Tsuji Masaharu, Tanoue Takeshi, Kumagae Jun, Nakano Kousuke
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 12
Optical observation of gas discharge induced by high-power and short-pulsed microwave
Onoi M., Azuma K., Fujiwara E., Yatsuzuka N.
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 2B
Preparation of oxygenated fullerene thin film for photoelectric devices
Yang S.-C., Mieno T.
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 2B
Correlation between metastable and ground-state fluorine atom densities measured by laser-induced fluorescence and vacuum ultraviolet absorption spectroscopies
Takizawa K., Sasaki K., Kadota K.
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 8
Novel high-density microwave plasma utilizing an internal spoke antenna for fast deposition of microcrystalline silicon films
Shirai Hajime, Yoshino Koichi, Ohkawara Go et al.
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 7A
High-efficiency neutral-beam generation by combination of inductively coupled plasma and parallel plate DC bias
Samukawa Seiji, Sakamoto Keisuke, Ichiki Katsunori
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 7B
Kinetic modeling of relaxation phenomena after photodetachment in a rf electronegative SiH[4] discharge
Yan M., Bogaerts A., Gijbels R., Goedheer W. J.
Phys. Rev. A: At. Mol. Opt. Phys., Vol: 2, No: 2
Effect of an internal rotating current on low-frequency inductively coupled plasmas
Tsakadze E. L., Ostrikov K. N., Xu S., Jones I. R., Storer R., Yu M. Y., Lee S.
Phys. Rev. A: At. Mol. Opt. Phys., Vol: 4, No: 2
Relaxation of the electron energy distribution function in the afterglow of a N[2] microwave discharge including space-charge field effects
Guerra V., Sa P. A., Loureiro J.
Phys. Rev. A: At. Mol. Opt. Phys., Vol: 4, No: 2
Nonlinear resonances of particles in a dusty plasma sheath
Zafiu C., Melzer A., Piel A.
Phys. Rev. A: At. Mol. Opt. Phys., Vol: 6, No: 2
Self-excited vertical oscillations in an rf-discharge dusty plasma
Samarian A. A., James B. W., Vladimirov S. V., Cramer N. F.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 64, No: 2
Vertical Pairing of Identical Particles Suspended in the Plasma Sheath
Steinberg V., Sutterlin R., Ivlev A. V., Morfill G.
Phys. Rev. Lett., Vol: 86, No: 20
Collisionless Electron Heating by Capacitive rf Sheaths
Gozadinos G., Turner M. M., Vender D.
Phys. Rev. Lett., Vol: 87, No: 13
Deposition of diamondlike carbon film and mass spectroemtry measurement in CH[4]/N[2] RF plasma
Nutsukura N.
Plasma Chem. Plasma Process., Vol: 21, No: 2
Tunable diode laser absorption studies of Hydrocarbons in RF plasmas containing hexamethyldisiloxane
Ropcke J., Revalde G., Osiac M., et al.
Plasma Chem. Plasma Process., Vol: 21, No: 4
Газокинетическая температура плазмы планарного высокочастотного емкостного разряда в газовых смесях N[2]/CO[2]/He
Ажаронок В.В., Филатова И.И., Шиманович В.Д., Орлов Л.Н.
Ж. прикл. спектроскопии, Vol: 68, No: 5
Излучательные свойства СВЧ разряда, формируемого кольцевым волноводно-щелевым излучателем
Бордусов С.В.
Ж. прикл. спектроскопии, Vol: 68, No: 5
Двухзеpкальный pезонатоp для исследования СВЧ безэлектpодного pазpяда в газах высокого давления
Гpачев Л.П., Есаков И.И., Малык С.Г., Ходатаев К.В.
Ж. техн. физ., Vol: 71, No: 6
Процессы разрушения поверхности электрода в плазме высокочастотного разряда
Строкань Г.П.
Ж. техн. физ., Vol: 71, No: 9
Стационарный нитевидный СВЧ-разряд при высоких давлениях аргона
Сковорода А.А., Звонков А.В.
Ж. эксперим. и теор. физ., Vol: 119, No: 1
СВЧ разряд в вакууме на поверхности диэлектрика
Брижинев М.П., Голубев С.В., Дорожкина Д.С. и др.
Ж. эксперим. и теор. физ., Vol: 119, No: 6
Пространственные структуры непрерывного СВЧ разряда
Вихарев А.Л., Горбачев А.М., Иванов О.А. и др.
Ж. эксперим. и теор. физ., Vol: 120, No: 2
Математическая модель емкостного разряда с учетом ион-нейтральных столкновений
Шишкин А.Г.
Мат. моделир., Vol: 13, No: 11
Травление материалов локализованным газовым разрядом
Абрамов А.В., Абрамова Е.А., Суровцев И.С.
Письма в ЖТФ, Vol: 27, No: 3
Генерация плазменных колебаний в СВЧ-разряде низкого давления
Быстров А.М., Гильденбург В.Б.
Физ. плазмы, Vol: 27, No: 1
Кинетика тепловыделения при взаимодействии низкотемпературной кислородной плазмы с каталитически активной поверхностью
Магунов А.Н.
Физ. плазмы, Vol: 27, No: 4
Свойства приэлектродной плазмы электродного СВЧ-разряда в водороде
Лебедев Ю.А., Мокеев М.В.
Физ. плазмы, Vol: 27, No: 5
Влияние переноса резонансного излучения на характеристики ВЧ-разряда и разряда постоянного тока в смесях He-Ar-Xe
Старостин С.А., Петерс П.Дж.М., Ван-дер Пул Г. и др.
Физ. плазмы, Vol: 27, No: 5
Surface-wave sustained discharges - self-consistent modelling
Benova E.Petrova T.
Bulg. J. Phys., Vol: 27, No: 3
Parameter space for collisionless RF sheaths
Manheimer W.M.
IEEE Trans. Plasma Sci. Pt 3, Vol: 28, No: 2
Properties of inductively coupled plasma source with helical coll
Park J.-C., Lee J.K., Kang B.K.
IEEE Trans. Plasma Sci. Pt 3, Vol: 28, No: 2
Power laws for the spatial dependence of electrical parameters in the high-voltage capacitive RF sheath
Muller H., Howling A.A., Hollenstein C.
IEEE Trans. Plasma Sci. Pt 3, Vol: 28, No: 5
On the effects of electron gas viscosity on the interaction of microwave and magnetoactive plasma
Petrin A.B.
IEEE Trans. Plasma Sci. Pt 3, Vol: 28, No: 5
Control of plasma parameters for high-quality hydrogenated amorphous carbon growth
Azuma Kazufumi, Inaba Hiroshi, Tasaka Kenji et al.
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 11
RF-plasma-assisted fast atom beam etching
Ono Takahito, Orimoto Norimune, Lee Seungseoup et al.
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 12B
Effects of H[2] addition in magnetized inductively coupled C[2]F[6] plasma etching of silica aerogel film
Wang Seok-Joo, Park Hyung-Ho, Yeom Geun-Young
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 12B
Equivalent circuit model of an inductive RF discharge with a helical external coil
Yoshiki Hiroyuki
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 2A
Gap length dependence of electron energy distribution in low-pressure Ar capacitively coupled RF discharges
Kimura Takashi, Kaga Kouji, Ohe Kazuyuki
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 3A
Self-consistent particle simulation of radio frequency CF[4] discharge: Effect of gas pressure
Denpoh Kazuki, Nanbu Kenichi
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 5A
Dependence of fluorocarbon plasma chemistry on the electron energy distribution function
Kokura Hikaru, Sugai Hideo
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New method of particle confinement time measurement in RF traps
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A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma
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The influence of weldpool surface shape on the distribution of arc current density
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Наблюдение циркулярного дихроизма ансамбля триплетных метастабильных атомов гелия в Na-He газоразрядной плазме при лазерной оптической ориентации атомов натрия
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Относительная плотность приэлектродных электронных пучков в плазме емкостного ВЧ-разряда
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Зависимость электронного энергетического спектра приэлектродной плазмы высокочастного разряда низкого давления от рода газа
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Стационарные состояния ВЧ индукционного разряда низкого давления вблизи порога погасания
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О структуре неравновесного электродного СВЧ-разряда в азоте
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Зондовое исследование структуры электронного СВЧ-разряда в азоте
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Теплофиз. высок. температур, Vol: 38, No: 4
Двухтемпературная модель баланса энергии плазмы высокочастотного индукционного разряда вбилизи оси плазменного сгустка
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Измерение температуры газа во фторсодержащей плазме ВЧ-разряда методом сканирующей калориметрии
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Физ. плазмы, Vol: 26, No: 4
Численное исследование СВЧ-разряда на волне типа H[10]
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Физ. плазмы, Vol: 26, No: 5
Ion charge state distribution in plasma of electron cyclotron resonance discharge sustained by powerful millimeter wave radiation
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Off-line efficiency measurements of the microwave discharge source (MIDAS) at the Laboratorio Nazionale del Sud
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A microwave driven off-line ion source for ISAC at TRIUMF
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Thirty-five centimeter diameter radio frequency ion-beam source
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Microwave plasma source for the negative hydrogen ion production
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Conceptual design of a helicon ion source for high-current dc accelerators (abstract)
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A design study for a holey-plate structure surface-wave ion source
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Chaotic fluctuations and a plasma density change at the beginning of microwave discharges
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On the effective diffusion length for microwave breakdown
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Study of effect of H[2] addition on the production of fluorocarbon radicals in H[2]/C[4]F[8] inductively coupled plasma via optical emission spectroscopy actinometry
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Chin. Phys., Vol: 14, No: 8
Modelling of a spherical electric discharge at atmospheric pressure under higher modes of incident mirowaves
Rafatov I.R., Kozlov P.V., Lelevkin V.M.
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Gliding arc discharges as a source of intermediate plasma for methane partial oxidation
Kalra Ch.S., Gutsol A.F., Fridman A.A.
IEEE Trans. Plasma Sci. Pt 3, Vol: 33, No: 1pt1
Transition between different modes of a capacitively coupled radio frequency discharge in CH[4] in one- and two-dimensional PIC-MCC simulations
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IEEE Trans. Plasma Sci. Pt 3, Vol: 33, No: 2pt2
Mode characteristics of radio frequency atmospheric glow discharges
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Discharge characteristics of cross-shaped microdischarge cells in ac-plasma display panel
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IEEE Trans. Plasma Sci. Pt 3, Vol: 33, No: 3
Sweeping electrostatic probes in atmospheric pressure arc plasmas. PtII. Temperature determination
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An equivalent circuit model of a plasma core inductor
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Свеpхвысокочастотный pазpяд на повеpхности диэлектpической антенны
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Механизмы pаспpостpанения повеpхностного свеpхвысокочастотного pазpяда
Шибков В.М., Двинин С.А., Еpшов А.П., Шибкова Л.В.
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High density cascaded arc produced plasma expanding in a low pressure region
Dahiya R.P., Kumari N., Veremiyenko V.P., et al.
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Capacity-coupled multidischarge at atmospheric pressure
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IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 1
Rotational, vibrational, and excitation temperatures of a microwave-frequency microplasma
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IEEE Trans. Plasma Sci. Pt 3, Vol: 2, No: 1
Effects of Ar dilution and exciting frequency on absolute density and translational temperature of Si atom in very high frequency-capacitively coupled SiH[4] plasmas
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Различные моды гоpения емкостного высокочастотного pазpяда в метане
Швейгеpт И.В.
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The determination of 18 trace elements in lichens for atmospheric monitoring using inductively coupled plasma-mass spectrometry
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Can. J. Anal. Sci. and Spectrosc., Vol: 48, No: 3
Generation of integrated atmospheric-pressure microplasmas
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Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 10
Characteristics of large-area cold atmospheric discharges from radio-frequency microdischarge arrays
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Absolute density and sticking probability of the CN(X{2}Σ{+}) radicals produced by the dissociative excitation reaction of BrCN with the microwave discharge flow of Ar
Ito Haruhiko, Ichimura Shin-ya, Namiki Kei-ichi C., et al.
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 11
Growth of highly oriented CoCrTa films by inductively coupled plasma-assisted sputtering
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Localized plasma processing of materials using atmospehric-pressure microplasma jets
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Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 6B
Phase-resolved emission spectroscopy of a hydrogen rf discharge for the determination of quenching coefficients
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On the use of global kinetics models for the investigation of energy deposition and chemistry in RF argon-oxygen plamas working in the Torr regime
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Импульсный СВЧ разряд в атмосферном воздухе в фокусе двухзеркального резонатора
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Магнитогидродинамические устойчивости самосжатого резонансного стримерного СВЧ разряда
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Ж. техн. физ., Vol: 73, No: 5
Распространение СВЧ-разряда высокого давления в допробойных полях. Формирование плазменных структур
Веденин П.В., Попов Н.А.
Ж. эксперим. и теор. физ., Vol: 123, No: 1
Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges
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Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 66, No: 6
Ar-O[2] rf plasma diagnosis by mass spectrometry
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Rom. Rep. Phys., Vol: 54, No: 6-10
Инициированный сферический СВЧ-разряд при атмосферном давлении
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Письма в ЖТФ, Vol: 28, No: 15
Газовый разряд в атмосфере как средство улучшения ее экологических характеристик. Обзор. Памяти Г.А. Аскарьяна посвящается
Батанов Г.М., Коссый И.А., Силаков В.П.
Физ. плазмы, Vol: 28, No: 3
Investigation of etch rate uniformity of 60 MHz plasma etching equipment
Koshiishi Akira, Araki Youichi, Himori Shinji, Iijima Tamotsu
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 11
Capacitively coupled microplasma source on a chip at atmospheric pressure
Yoshiki Hiroyuki, Horiike Yasuhiro
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 4A
Studies on gas purification by a pulsed microwae discharge at 2.46 GHz in mixtures of N[2]/NO/O[2] at atmospheric pressure
Baeva M., Gier H., Pott A. et al.
Plasma Chem. Plasma Process., Vol: 21, No: 2
ECR Plasma in growth of cubic GaN by low pressure MOCVD
Gu B., Xu Y., Qin F.W., et al.
Plasma Chem. Plasma Process., Vol: 21, No: 4
Свойства каталитического активного импульсного СВЧ-разряда атмосферного давления
Русанов В.Д., Бабарицкий А.И., Бибиков М.Б., и др.
Докл. РАН, Vol: 377, No: 6
Сфеpический плазмоид с неpезкой гpаницей в линейно поляpизованном квазистатическом электpомагнитном поле
Гpачев Л.П., Есаков И.И., Малык С.Г.
Ж. техн. физ., Vol: 71, No: 6
Методика и устройство для исследования динамики разрядов переменного тока. Стратификация разряда в потоке аргона при атмосферном давлении
Чурилов Г.Н., Лопатин В.А., Новиков П.В. и др.
Приборы и техн. эксперим., Vol: , No: 4
Efect of Ar{+} ion bombardment during hydrogenated amorphous silicon film growth in plasma chemical vapor depositon system
Kato Isamu, Nakano Yuuki, Yamaguchi Nobuhiko
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 11
Dominance of Cl[2]{+} or Cl{+} ions in time-modulated inductively coupled Cl[2] plasma investigated with laser induced fluorescence technique and probe measurements
Kumagai Shinya, Sasaki Minoru, Koyanagi Mitsumasa, Hane Kazuhiro
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 12B
Effects of discharge frequency in plasma etching and ultrahigh-frequency plasma source for high-performance etching for ultralarge-scale integrated circuits
Samukawa S., Donnelly V.M., Malyshev M.V.
Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 4A
Sheath model for radio-frequency-biased, high-density plasmas valid for all ω/ω[i]
Sobolewski Mark A.
Phys. Rev. E: Stat. Nonlinear Soft Matter Phys., Vol: 62, No: 4
Об устойчивости низкотемпературных состояний СВЧ-разряда высокого давления
Звонков А.В., Тимофеев А.В., Хандель П.
Физ. плазмы, Vol: 26, No: 9
Modeling and diagnostic of the plasma of magnetic field supported discharges
Porokhova I.A., Holik M., Bilyk O., et al.
Contrib. Plasma Phys., Vol: 45, No: 5-6
Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation
Gao Peng, Xu Jun, Deng Xin-Lu, et al.
Acta phys. sin., Vol: 54, No: 7
Zr-N films prepared by MW-ECR PE-UNB alanced magnetron sputtering: plasma diagnostics and structure evolution
Zhang Zhi-Guo, Liu Tian-Wei, Xu Jun, et al.
Acta phys. sin., Vol: 54, No: 7
О зажигании ЭЦР-pазpяда в pасходящемся магнитном поле
Тимофеев А.В.
Физ. плазмы, Vol: 31, No: 5
A new method of electron temperature determination in unmagnetized and magnetized RF plasmas without RF compensating circuit
Choi Y.-S., Chung K.-S., Lee B.-K.
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Miniaturized magnetic nitrogen DC Microplasmas
Wilson Ch.G., Gianchandani Y.B.
IEEE Trans. Plasma Sci. Pt 3, Vol: 32, No: 1 pt3
Energy distribution of ions incident onto a Dc-biased substrate in electron cyclotron resonance sputtering plasma for SrTiO[3] thin film preparation
Ohtsu Yasunori, Fujita Hiroharu, Niino Atsushi, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 43, No: 1
Low-temperature silicon oxidation with very small activation energy and high-quality interface by electron cyclotron resonance plasma stream irradiation
Saito Kunio, Jin Yoshito, Ono Toshiro, et al.
Jpn. J. Appl. Phys., Part 1, Vol: 43, No: 6B
X-ray source based on electron cyclotron resonance discharge in a magnetic mirror trap
Dougar-Jabon V.D.
Phys. scr., Vol: 69, No: 4
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Вавилин К.В., Плаксин В.Ю., Ри М.Х., Рухадзе А.А.
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Diocotron instability in gas-discharge nonneutral electron plasma, when mangetic field is not parallel to the anode surface
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Bull. Georg. Nat. Acad. Sci., Vol: 167, No: 3
Enhancement of Ar{8+} kion beam intensity from RIKEN 18 GHz electron cyclotron resonance ion source by optimizing the magnetic field configuration
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Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 6A
Исследование оптических характеристик импульсного разряда в аргоне атмосферного давления во внешнем магнитном поле
Омаров О.А., Эльдаров Ш.Ш., Гаджиев А.М., и др.
Теплофиз. высок. температур, Vol: 41, No: 2
Loss cone profile on the imaginary surface just enclosing the resonance surface in 14.4 GHz ECR ion source
Rashid M.H., Bhandari R.K.
Indian J. Phys. B., Vol: 76, No: 5
Модель анодного слоя магнетронного разряда
Рычков Д.С., Кривобоков В.П., Маракасов Д.А.
Атом. энергия, Vol: 45, No: 11
Estimate of the negative-ion density in O[2]/Ar ECR plasma utilizing ion acoustic waves
Shindo Masako, Kawai Yoshinobu
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Mirror-trapped plasma heated by high-power millimeter-wave radiation as an electron-cyclotron-resonance source of soft X-rays
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Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 2B
RF potential formation in electronegative plasma column under a magnetic field
Cicman Peter, Fujita HIroharu
Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 3A
Enhancement of Ar{8+} current extracted from RIKEN 18 GHz electron cyclotron resonance ion source by moving the plasma electrode toward the resonance zone
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Jpn. J. Appl. Phys., Part 1, Vol: 40, No: 8
Поляpизационный оптогальванический эффект в натpий-гелиевой газоpазpядной плазме
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Microwave absorption in electron cyclotron resonance plasma
Liu Ming-Hai, Hu Xi-Wei, Wu Qin-Chong, Yu Guo-Yang
Chin. Phys. Lett., Vol: 17, No: 1
Etching characteristics of fine Ta patterns with electron cyclotron resonance chlorine plasma
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Surface treatment by Ar plasma irradiation in electron cyclotron resonance chemicalvapor deposition
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Optimum discharge condition of DC bias electron cyclotron resonance plasma sputtering for high quality Si epitaxial growth
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Direct measurement of sheath electric field distribution in front of substrate in electron cyclotron resonance plasma by laser-induced fluorescence technique
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Jpn. J. Appl. Phys., Part 1, Vol: 39, No: 2A
Electrode discharge assisted electron cyclotron wave current startup on the CT-6B tokamak
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Nucl. Fusion, Vol: 40, No: 2
Electron Boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge
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Rigid and differential plasma crystal rotation induced by magnetic fields
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Highly charged ion densities and ion confinement properties in an electron-cyclotron-resonance ion source
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Theory for spiral structure formation in rotating plasmas
Kono Mitsuo, Tanaka Masayoshi
Phys. scr., Vol: 84, No:
Effect of the plasma inhomogeneity on the wave excitation and the rf power deposition in helicon discharges
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Experimental investigations of the rotating magnetic field influence on an ECR discharge plasma
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Plasma Phys. and Contr. Fusion, Vol: 42, No: 8
Study and development of the 14 GHz ECR ion source RECRIS for atomic physics and material researches
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Numerical simulation of an electron cyclotron resonance plasma source
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О распределении тока положительных ионов по поверхности катода в разряде с осциллирующими электронами
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Формирование неалмазной фазы углерода в плазме микроволнового газового разряда с электронным циклотронным резонансом
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Письма в ЖТФ, Vol: 26, No: 18
Электронно-циклотронный резонансный разряд в тяжелых газах, поддерживаемый мощным микроволновым пучком в магнитной ловушке, как источник мягкого рентгеновского излучения
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Письма в ЖТФ, Vol: 26, No: 24
Газовые разряды, поддерживаемые параметрической турбулентностью
Ахиезер А.И., Михайленко В.С., Ольшанский В.В., Степанов К.Н.
Физ. плазмы, Vol: 26, No: 7
Electron cyclotron resonance sources: Historical review and future prospects (invited) (abstract)
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Production of highly charged ion beams from electron cyclotron resonance ion sources (invited)
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Rev. Sci. Instrum. , Vol: 2, No: Pt 2
A new 14 GHz electron-cyclotron-resonance ion source for the heavy ion accelerator facility ATLAS
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Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Production of intense beams of highly charged metallic ions from RIKEN 18 GHz electron cyclotron resonance ion source
Nakagawa T., Arje J., Miyazawa Y., Hemmi M., Chiba T., Inabe N., Kase M., Kageyama T., Kamigaito O., Kidera M., Goto A., Yano Y.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Experiments on a 14.5 GHz electron cyclotron resonance source
Hill C.E., Langbein K.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Beam development at the new 14 GHz electron cyclotron resonance ion source of ATOMKI
Biri S., Vamosi J.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Use of multiple-discrete-frequency microwave radiation to enhance the performances of traditional B-minimum electron cyclotron resonance ion sources (abstract)
Alton G.D., Meyer F.W., Liu Y., Beene J.R., Tucker D.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Preliminary results of the 14 GHz SERSE superconducting electron cyclotron resonance ion source working in high-B mode
Ludwig P., Bourg F., Briand P., Girard A., Melin G., Guillaume D., Seyfert P., La Grassa A., Ciavola G., Di Bartolo G., Gammino S., Cafici M., Castro M., Chines F., Marietta S., Passarello S.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Genral purpose high-performance electron cyclotron resonance ion source for production of multicharged ions
Sortais P., Bex L., Maunoury L., Lamy T., Villari A.C.C.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Operation of the ECR ion source Alice and its platform
Cavenago M., Cervellera F., Kulevoy T., Marchetti M.T., Vassiliev A.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Performance of the ion source DECRIS-14-2
Efremov A., Behterev V., Bogomolov S.L., Kutner V.B., Lebedev A.N., Loginov V.N., Yazvitsky Y.Yu.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Development of 18 GHz NIRS electron cyclotron resonance ion source with high-voltage extraction configuration
Kitagawa A., Muramatsu M., Yamada S., Okada T., Yamamoto M., Uno K., Biri S., Varmosi J., Zhou X.H.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Superconducting hexapole/solenoid for SERSE
Krischel D., Schillo M., Hobl A., Gruneberg H., Hergesell H.-J.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Design aspects and status of construction of the mVINIS ion source
Efremov A., Kutner V., Bogomolov S., Lebedev A., Loginov V., Yazvitsky N., Dobrosavljevic A., Draganic I., Dekic S., Stalevski T.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Development of the third generation electron cyclotron resonance ion source
Lyneis C.M., Xie Z.Q., Taylor C.E.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
The development of an electron cyclotron resonance ion source for the heavy ion research facility in Lanzhou
Zhanwen Liu, Wen Zhang, Hongwei Zhao, Ping Yuan, Xuezhen Zhang, Xiaohong Guo, Zimin Zhang, Xixia Li, Hui Wang, Yucheng Feng, Jinyu Li, Jiyuan Gao, Baohua Ma, Hailiang Lei, Sixin Zhou, Yifang Wang, Baowen Wei
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
The operational parameters for the Texas A&M high B mode electron cyclotron resonance ion source
May D.P.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Electron cyclotron resonance ion source ionic currents (both in the stable and periodic regimes) modeled in relation with the hot electron temperature via the potential dip
Pras R., Lamoureux M., Girard A., Khodja H., Melin G.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Production of multiply charged metallic ions by compact electron cyclotron resonance ion source with SF[6] plasma
Saitoh Y., Ohkoshi K., Yokota W.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
High secondary electron emission for an enhanced electron density in election cyclotron resonance plasma
Schachter L., Dobrescu S., Badescu-Singureanu Al.I., Baltateanu N.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Status report on ECR ion source operation at the GSI accelerator facilities
Tinschert K., Bossler J., Schennach S., Schulte H.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
A 2.45 GHz ECR ion source for production of medium charge states ions
Wutte D.C., Leitner M.A., Williams M.D., Leung K.N., Gough R.A., Saadatmand K., Benveniste V.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Manufacture of a compact Ku-band electron cyclotron resonance ion source with two resonance zones and variable frequency
Tojyo E., Oyaizu M., Imanishi A., Jeong S.C., Kawakami H., Niki K., Shirakabe Y., Hattori T., Ohshiro Y.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Electron-beam extraction system for the Frankfurt 14 GHz electron cyclotron resonance ion source
Runkel S., Hohn O., Schmidt L., Stiebing K.E., Schmidt-Bocking H., Schempp A., Becker R.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Design aspects of a compact, single-frequency, permanent-magnet electron cyclotron resonance ion source with a large uniformly distributed resonant plasma volume (abstract)
Liu Y., Alton G.D., Mills G.D., Reed C.A., Haynes D.L.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
A high temperature oven for the production of vapors from solid materials at the Laboratorio Nazionale del Sud Superconducting Electron cyclotron Resonance SourcE
Di Bartolo G., Chines F., Ciavola G., Gammino S., Marchetta C., Marletta S., Messina E., Passarello S., Wang Z.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Ion sources at the KVI (abstract)
Drentje A.G., Kremers H.R., Mulder J., Sljbring J.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Successful modeling, design, and test of electron cyclotron resonance ion sources
Heinen A., Ruther M., Ducree J., Leuker J., Mrogenda J., Ortjohann H.W., Reckels E., Vitt Ch., Andra H.J.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Production of multicharged radioactive ion beams: New results for the 1+→n+ method with the MINIMAFIOS and SARA-CAPRICE electron cyclotron resonance ion sources (abstract)
Lamy T., Bruandet J.-F., Chauvin N., Curdy J.-C., Fruneau M., Geller R., Gimond G., Sole P., Vieux-Rochas J.-L., Gaubert G., Maunoury L., Sortais P., Villari A.C.C.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
An electron cyclotron resonance source for radioactive beryllium ion beam production
Jayamanna K., Zyuzin Z., Buchmann L., Cojocaru G., Dombsky M., Kuo T., McDonald M., Schmor P.W., Yuan D.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Electron cyclotron resonance ion source developments at Louvain-la-Neuve
Barue C., Biri S., Cherkani-Hassani S., Gaelens M., Loiselet M., Ryckewaert G.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Beam characteristics using stable isotopes from a multicusp source for the TRIUVF ISAC facility
Kuo T., Yuan D., Jayamanna K., McDonald M., Baartman R., Mackenzie G., Bricault P., Dombsky M., Schmor P., Dutto G., Lee Y., Leung K.-N., Williams D., Gough R.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Beam bunching of the radioactive nuclear beam in a 6.4 GHz electron cyclotron resonance ion source
Oyaizu M., Ishiyama H., Jeong S.C., Kawakarni H., Miyatake H., Tanaka J., Tojo E., Wada M., Katayama I., Nomura T., Fujita M., Tanigaki M., Shinozuka T., Fujioka M.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Production of metallic ions with an ECRIS at GANIL
Bex L., Dupuis M., Flambard J.L., Leherissier P., Rataud J.P.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Propagation of metal vapor vacuum arc ions into electron cyclotron resonance ion sources
Cavenago M., Kulevoy T., Vassiliev A.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Production of 3d metal ion electron cyclotron resonance plasmas and ion beams using volatile compounds
Ullrich A., Grubling P., Zschornack G.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Distributed electron cyclotron resonance plasma immersion for large area ion implantation (invited)
Le Coeur F., Lagarde T., Pelletier J., Arnal Y., Burke R., Brunel M.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Development of a 2.45 GHz electron cyclotron resonance ion source for ion-implanter application
Sekiguchi M., Matsushita H., Jonoshita I., Kabasawa M.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Electron cyclotron resonance applicator of the Wilkinson microwave power divider type for large diameter ion sources
Fusellier C., Wartski L., Coste Ph., Schwebel C., Aubert J.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Characteristics of electron cyclotron resonance plasmas for large area ion source application
Hwang S.M., Yang J.G., Yoon N.S., Hong J., Kim B.C., You K.-I.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Compact electron cyclotron resonance plasma source
Gaudin C., Hay L., Buzzi J.M., Bacal M., Lamoreux M.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Formation of uniform titanium dioxide films by sputtering of tapered targets in an electron cylotron resonance plasma
Ishii S., Morishita N., Kato Y., Tani F., Koizumi Y., Sunagawa M.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Estimate of cusp loss width in multicusp negative ion source
Morishita T., Ogasawara M., Hatayama A.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
High-density plasma production for neutralizing negative ion beam
Tanaka M.Y., Bacal M., Sasao M., Kuroda T.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Status of 2.45 GHz compact National Institute of Radiological Sciences electron cyclotron resonance ion source
Muramatsu M., Kitagawa A., Sato S., Tashiro K., Yamada S., Shibuya S., Hattori T.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Ion source development at GSI
Spadtke P., Bossler J., Emig H., Leible K.D., Muhle C., Reich H., Schulte H., Tinschert K.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Modelling of electron-cyclotron-resonance ion source and scaling laws
Girard A., Perret C., Melin G., Lecot C.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Study of microwave coupling in electron cyclotron resonance ion sources and microwave ion sources
Celona L., Ciavola G., Gammino S.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Models of many-element electron cyclotron resonance plasmas
Marchetti M.T., Cavenago M., Pegoraro F.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Parametric decay of electron cyclotron waves and its influence on the ion transport in an electron cyclotron resonance ion source
Meyer D., Bolshukhin D., Qiesemann K.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Parametric decay of electron cyclotron waves and its influence on the ion transport in an electron cyclotron resonance ion source
Meyer D., Bolschukhin D., Wiesemann K.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Exploration of the afterglow of the pulsed electron cyclotron resonance source under the injection of neutral fluxes
Mironov V., Shirkov G., Strekalovsky O., Tokareva N.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
An improved extraction for the multicusp-type light ion-ion source apparatus
Reijonen J., Heikkinen P., Liukkonen E., Arje J.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Numerical simulation of highly charged ion production in RIKEN 18 GHz electron cyclotron resonance ion source
Shirkov G., Nakagawa T.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Determination of ion charge state distributions in krypton and cobalt electron cyclotron resonance plasmas by wavelength dispersive x-ray spectroscopy
Grubling P., Kuchler D., Lehnert U., Ullrich A., Werner T., Zschornack G.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Plasma potential profile in a 2.45 GHz electron cyclotron resonance multicharged ion source
Kato Yushi, Ishii Shigeyuki
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Pulse height analysis using Si-pin diode of x-ray irradiated from a 2.45 GHz electron cyclotron resonance multicharged ion source
Kato Yushi, Kubo Yoshiyuki, Ishii Shigeyuki
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Negative hydrogen ions and evidence for a potential dip in an electron cyclotron resonance discharge for highly charged ions
Bolshukhin D., Meyer D., Wolters U., Wiesemann K.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Spectroscopic determination of cold electrons in electron cyclotron resonance discharges with highly charged ions
Bibinov N.K., Bolschukhin D.O., Bratsev V.F., Kokh D.B., Ochkur V.I., Vinogradov I.P., Wiesemann K.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Measurement of ion charge state distributions inside electron cyclotron resonance neon and chlorine plasmas by x-ray spectroscopy (abstract)
Grubling P., Kuchler D., Ullrich A., Werner T., Zschornack G.
Rev. Sci. Instrum. , Vol: 2, No: Pt 2
Operational characteristics of a periodic plasma torch
Kuo S., Bivolaru D., Carter C.D., et al.
IEEE Trans. Plasma Sci. Pt 3, Vol: 32, No: 1 pt3
Импульсно-пеpиодический факел в коаксиальном волноводе. Динамика фоpмиpования и пpостpанственная стpуктуpа
Гpиницин С.И., Князев В.Ю., Коссый И.А., и дp.
Физ. плазмы, Vol: 30, No: 3
Analytical characteristics of microwave plasma time-of-flight mass spectrometry with alternative/mixed gases and "off-cone" sampling
Su Yongxuan, Jin Zhe, Duan Yixiang
Can. J. Anal. Sci. and Spectrosc., Vol: 48, No: 3
Diagnostics of an RF plasma flash evaporation process using the monochromatic imaging technique
Buchner P., Schubert H., Uhlenbusch J., Weiss M.
Plasma Chem. Plasma Process., Vol: 21, No: 1
A new RMSP reset pulse for improved reset discharge controllability in AC PDP
Yang J.H., Chung W.J., Kim J.S., et al.
IEEE Trans. Plasma Sci. Pt 3, Vol: 32, No: 1 pt3
Бактеpицидная лампа емкостногоpазpяда на паpах йода
Соснин Э.А., Лавpентьева Л.В., Мастеpова Я.В., и дp.
Письма в ЖЭТФ, Vol: 30, No: 14
Enhancement of nitrogen gas breakdown voltage between coated aluminum electrodes with fluorocarbon polymer film prepared in C[8]F[18] vapor RF plasma
Biloiu C., Biloiu I.A., Sakai Y. et al.
Jpn. J. Appl. Phys., Part 1, Vol: 42, No: 2B
Design and operating characteristics of a simple and reliable DBD reactor for use with atmospheric air
Francke K.-P., Rudolph R., Miessner H.
Plasma Chem. Plasma Process., Vol: 23, No: 1
The mutual conversion of CO[2] and CO in Dielectric Barrier Discharge (DBD)
Zheng G., Jiang J., Wu Y., et al.
Plasma Chem. Plasma Process., Vol: 23, No: 1
Starch-enhanced synthesis of oxygenates from methane and carbon dioxide using dielectric-barrier discharges
Zou J.-J., Zhang Y.-P., Liu C.-J., et al.
Plasma Chem. Plasma Process., Vol: 23, No: 1