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In situ measurements of etching species in SF[6] microwave downstream plasma by ion attachment mass spectroscopy

Fujiwara Kazuya, Shindo Haruo

Jpn. J. Appl. Phys., Part 1, vol: 43, num: 8A, 5540-5544, published: , JP

   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Surface treatment.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Particle measurements.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         Surface phenomena.
            Interaction of heavy particles with surfaces. Sputtering.