www.viniti.ru Всероссийский Институт Научной и Технической Информации
 

База данных PEIS-V больше не обновляется с 1 июня 2018г.

The PEIS-V database is no longer updated from June 1, 2018


Physics Electronic Information Service by VINITI

PEIS-V | Help

Planar laser-induced fluorescence of fluorocarbon radicals in oxide etch process plasma

Hayashi S., Ishikawa K., Sekine M.

Jpn. J. Appl. Phys., Part 1, vol: 41, num: 4A, 2207-2212, published: , JP


   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Etching.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma chemistry.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.