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Measurement of spatial distribution of SiF[4] and SiF[2] densities in high density SiF[4] plasma using single-path infrared diode laser absorptionspectroscopy and laser-induced fluorescence technique

Nakamura M., Hori M., Goto T., et al.

Jpn. J. Appl. Phys., Part 1, vol: 40, num: 7, 4730-4735, published: , JP


   Optics.
      Optical image forming. Optical instruments and optical methods.
         Optical instruments for measuring of various physical quantities.
            Measurements of other quantities.

   Optics.
      Optics of atoms and ions
         Optics of plasma.