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Deposition of diamondlike carbon film and mass spectroemtry measurement in CH[4]/N[2] RF plasma

Nutsukura N.

Plasma Chem. Plasma Process., vol: 21, num: 2, 265-277, published: , US


   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Film deposition.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Particle measurements.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            Low pressure discharges.