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Dominance of Cl[2]{+} or Cl{+} ions in time-modulated inductively coupled Cl[2] plasma investigated with laser induced fluorescence technique and probe measurements

Kumagai Shinya, Sasaki Minoru, Koyanagi Mitsumasa, Hane Kazuhiro

Jpn. J. Appl. Phys., Part 1, vol: 39, num: 12B, 6980-6984, published: , JP

         Luminescence of atoms and molecules.
            Luminescence in gases and vapors.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            High pressure discharges.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.