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Analysis of deprotection reaction in chemically amplified resists using an fourier transform infrared spectrometer with an exposure tool

Sekiguchi Atsushi, Miyake Yasuhiro, Isono Mariko

Jpn. J. Appl. Phys., Part 1, vol: 39, num: 3A, 1392-1398, published: , JP

   Atoms and molecules.
      Interaction of atoms and molecules with external fields and radiation.
         Photoionisation and photodissociation.
            Dissociation and other transformations of molecules by action of light.