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Direct measurement of sheath electric field distribution in front of substrate in electron cyclotron resonance plasma by laser-induced fluorescence technique

Watanabe Mahiko, Takiyama Ken, Oda Toshiatsu

Jpn. J. Appl. Phys., Part 1, vol: 39, num: 2A, L116-L118, published: , JP


   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            High frequency discharges in magnetic field.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.

   Atoms and molecules.
      Interaction of atoms and molecules with environment.
         Energy level shifts and splittings.
            Optical and X-ray terms.

   Atoms and molecules.
      Interaction of atoms and molecules with external fields and radiation.
         Transitions by laser radiation.
            Dynamic of processes.

   Laser physics.
      Laser applications: Physical bases.
         Laser diagnostics.
            Plasma.

   Laser physics.
      Laser applications: Physical bases.
         Precision measurements.
            Measurements of plasma parameters.