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Plasma diagnostics of CH[4]/O[2]/H[2] electron cyclotron resonance plasma with permanent magnets and deposition of amorphous

Yasui Toshiaki, Kodera Hidekazu, Oya Izumi et al.

Jpn. J. Appl. Phys., Part 1, vol: 38, num: 7A, 4200-4205, published: , JP


   Atoms and molecules.
      Interaction of atoms and molecules with external fields and radiation.
         Emission and absorption of atoms and molecules by collisions.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            High frequency discharges in magnetic field.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Film deposition.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma radiation.
         Optical radiation.
            Line radiation.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Optical methods.
            Intensities of spectral lines.

   Radiophysics. Physical electronics.
      Electron and ion emission. Spectroscopy.
         Electron emission.
            Electron spectroscopy.
               Photoelectric electron.

   Radiophysics. Physical electronics.
      Electron and ion microscopy.
         Electron and ion microscopes.
            Physical applications.