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Charge exchange ion energy distribution at the RF electrode in a plasma etching chamber

Mizutani Naoki, Hayashi Toshio

Jpn. J. Appl. Phys., Part 1, vol: 38, num: 7A, 4206-4212, published: , JP


   Atoms and molecules.
      Collisions of atoms and molecules with particles.
         Collisions of atoms with heavy particles.
            Ion-atomic collisions.
               Charge-transfer processes.

   Atoms and molecules.
      Collisions of atoms and molecules with particles.
         Collisions of atoms with heavy particles.
            Collisions with atoms.
               Collisions with atoms of inert gases.

   Plasma Physics (including Thermonuclear Fusion).
      Elementary processes in plasma.
         Charge-exchange collisions.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Etching.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma basis properties.
         Kinetic phenomena.
            Distribution functions.

   Plasma Physics (including Thermonuclear Fusion).
      Elementary processes in plasma.
         Elastic collisions.
            Heavy particles scattering.