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Effects of fluorocarbon films on CF radical in CF[4]/H[2] plasma

Arai Toshihiko, Goto Miki, Horikoshi Keita et al.

Jpn. J. Appl. Phys., Part 1, vol: 38, num: 7B, 4377-4379, published: , JP


   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Etching.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.