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Two-dimensional measurement of He metastable atom density profile in front of substrate in electron cyclotron resonance plasma flow by laser-induced fluorescence spectroscopy

Watanabe Mahiko, Takiyama Ken, Toyota Hiroshi, Oda Toshiatsu

Jpn. J. Appl. Phys., Part 1, vol: 38, num: 7B, 4380-4382, published: , JP

   Laser physics.
      Laser applications: Physical bases.
         Laser diagnostics.

   Laser physics.
      Laser action on matter.
         Laser action on atoms and molecules.
            Exciting of atoms and molecules.

   Laser physics.
      Laser spectroscopy.
         Linear spectroscopy.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            High frequency discharges in magnetic field.

   Plasma Physics (including Thermonuclear Fusion).
      Elementary processes in plasma.
         Metastable states.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.

      Optics of atoms and ions
         Optics of plasma.

         Luminescence of atoms and molecules.
            Luminescence in gases and vapors.

      Optical image forming. Optical instruments and optical methods.
         Optical instruments for measuring of various physical quantities.
            Measurements of other quantities.