www.viniti.ru Всероссийский Институт Научной и Технической Информации
 

База данных PEIS-V больше не обновляется с 1 июня 2018г.

The PEIS-V database is no longer updated from June 1, 2018


Physics Electronic Information Service by VINITI

PEIS-V | Help

Effect of higher silanes in silane plasmas on properties of hydrogenated amorphous silicon films

Suzuki Atsushi

Jpn. J. Appl. Phys., Part 1, vol: 38, num: 11B, L1315-L1317, published: , JP


   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.
            Film deposition.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Particle measurements.

   Gases and liquids. Thermodynamics and statistical physics.
      Theory of irreversible processes and kinetic phenomena.
         Kinetics of the phase transitions.
            Growth kinetics.

   Gases and liquids. Thermodynamics and statistical physics.
      Statistical thermodynamics.
         Thermodynamics and statistical physics of surfaces and films.

   Gases and liquids. Thermodynamics and statistical physics.
      Statistical thermodynamics.
         Thermodynamics and statistical physics of quantum systems.
            Interaction of matter with electromagnetic field.

   Gases and liquids. Thermodynamics and statistical physics.
      Statistical thermodynamics.
         Thermodynamics and statistical physics of quantum systems.
            Disordered systems.
               Amorphous materials.