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Design of a pressure measurement device for the plasma source of a VG 9000 glow discharge mass spectrometer

Born Sabine, Venzago Cornel, Stojanik Bernd

Appl. Spectrosc. , vol: 52, num: 10, 1358-1359, published: , US


   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         Glow discharges.
            Positive columns.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Particle measurements.