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The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor

Andrieux M., Badie J.M., Ducarroir M., Bisch C.

J. Phys. D: Appl. Phys., vol: 31, num: 12, 1457-1464, published: , GB


   Optics.
      Optics of atoms and ions
         Emission and absorption.
            Broadening of lines.
               Doppler-broadening.

   Optics.
      Optics of atoms and ions
         Emission and absorption.
            Systematics of spectra.

   Optics.
      Optics of molecules.
         Emission and absorption.
            Electron spectra.

   Optics.
      Optics of molecules.
         Emission and absorption.
            Common questions of line broadening.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            Low pressure discharges.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.