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Surface kinetics of CF[x] radicals and fluorine atoms in the afterglow of high-density C[4]F[8] plasmas

Suzuki Chihiro, Sasaki Koichi, Kadota Kiyoshi

Jpn. J. Appl. Phys., Part 1, vol: 37, num: 10, 5763-5766, published: , JP


   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         Afterglow plasma.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma chemistry.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         Surface phenomena.
            Interaction of plasma with surfaces.