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Laser-induced fluorescence measurements of absolute SiH densities in SiH[4]-H[2] RF discharges and comparison with a numerical model

Hertl M., Dorval N., Leroy O., Jolly J., Pealat M.

Plasma Sources Sci. and Technol., vol: 7, num: 2, 130-135, published: , GB

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.

         Luminescence of atoms and molecules.
            Luminescence in gases and vapors.

   Laser physics.
      Laser applications: Physical bases.
         Precision measurements.
            Measurements of plasma parameters.