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Laser-induced fluorescence measurements of absolute SiH densities in SiH[4]-H[2] RF discharges and comparison with a numerical model

Hertl M., Dorval N., Leroy O., Jolly J., Pealat M.

Plasma Sources Sci. and Technol., vol: 7, num: 2, 130-135, published: , GB


   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Laser diagnostics.
            Resonant fluorescence.

   Optics.
      Luminescence.
         Luminescence of atoms and molecules.
            Luminescence in gases and vapors.
               Photoluminescence.

   Laser physics.
      Laser applications: Physical bases.
         Precision measurements.
            Measurements of plasma parameters.