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Ion energy and mass analyzer at radio frequency electrode in a plasma chamber

Mizutani Naoki, Nagata Yasushi, Kubo Akira, Hayashi Toshio

Rev. Sci. Instrum. , vol: 69, num: 4, 1918-1919, published: , US


   Plasma Physics (including Thermonuclear Fusion).
      Plasma applications.
         Plasma technology.

   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Particle measurements.