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Relationship between sensitivites of chemically amplified resist based on adamantane derivatives upon exposure to ArF excimer laser, electron beam, and extreme ultraviolet radiation

Furukawa Kikuo/Kozawa Takahiro/Seiki Shu/Tagawa Seiichi

Appl. Phys. Express, vol: 1, num: 6, 067001/1-067001/3, published: 29 October 2008,


   Atoms and molecules.
      Intermolecular forces.
         Interatomic interaction.
            Excimers and exciplexes.

   Atoms and molecules.
      Interaction of atoms and molecules with external fields and radiation.
         Transitions between electronic states.
            Lifetimes and transition probabilities for molecules.