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Difference in reaction schemes in photolysis of triphenylsulfonium salts between 248 nm and dry/wet 193 nm resists

Matsui Yoshinori/Sugawara Hidekazu/Seki Shu/et al.

Appl. Phys. Express, vol: 1, num: 3, 036001/1-036001/3, published: 20 December 2008,


   Atoms and molecules.
      Interaction of atoms and molecules with external fields and radiation.
         Photoionisation and photodissociation.
            Dissociation and other transformations of molecules by action of light.

   Atoms and molecules.
      Interaction of atoms and molecules with environment.
         Energy level broadening and transition between its.
            Electronic transition.
               Intermolecular and interatomic energy transfer.