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A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer

Wang Zhao-Kui/Lin Kui-Xun/Lin Xuan-Ying/et al.

Chin. Phys., vol: 14, num: 7, 1413-1417, published: 05 April 2009,


   Plasma Physics (including Thermonuclear Fusion).
      Plasma diagnostic techniques and instrumentation.
         Particle measurements.

   Plasma Physics (including Thermonuclear Fusion).
      Electric discharges (Gas discharges).
         High frequency discharges.
            Low pressure discharges.