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Generation of uniform large-area very high frequency plasmas by launching two specific standing waves simultaneously

Hsin-Liang Chen, Yen-Cheng Tu, Cheng-Chang Hsieh, Deng-Lain Lin, Keh-Chyang Leou

J. Appl. Phys. , vol: 116, num: 10, , published: 14 September 2014, 103307


   Plasma Physics (including Thermonuclear Fusion).
      Oscillations and waves in plasma.
         Interactions of electromagnetic waves with plasma.
            Oscillations and waves in bounded plasma.

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